Effect of capacitive to inductive coupling transition in multiple linear U-type antenna on silicon thin film deposition from pure SiH~4 discharges (English)
- New search for: Kim, H.B.
- New search for: Lee, H.C.
- New search for: Kim, K.N.
- New search for: Yeom, G.Y.
- New search for: Kim, H.B.
- New search for: Lee, H.C.
- New search for: Kim, K.N.
- New search for: Yeom, G.Y.
In:
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUM SURFACES AND FILMS
;
26
, 4
;
842-846
;
2008
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ISSN:
- Article (Journal) / Print
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Title:Effect of capacitive to inductive coupling transition in multiple linear U-type antenna on silicon thin film deposition from pure SiH~4 discharges
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Contributors:
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Published in:JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUM SURFACES AND FILMS ; 26, 4 ; 842-846
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Publisher:
- New search for: SLACK INCORPORATED
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Publication date:2008-01-01
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Size:5 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 621.55
- Further information on Dewey Decimal Classification
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Classification:
DDC: 621.55 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 26, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 561
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W chemical-vapor deposition usingOgura, Atsushi / Imai, Satoshi / Kagawa, Taihei / Kurozaki, Hirotaka / Ishikawa, Masato / Muramoto, Ikuyo / Machida, Hideaki / Ohshita, Yoshio et al. | 2008
- 565
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Experiments and modeling of dual reactive magnetron sputtering using two reactive gasesKubart, T. / Trinh, D. H. / Liljeholm, L. / Hultman, L. / Högberg, H. / Nyberg, T. / Berg, S. et al. | 2008
- 571
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Study of electron beam evaporated compositionally modulated Fe/Al multilayersBrajpuriya, R. / Tripathi, S. / Sharma, A. / Chaudhari, S. M. / Shripathi, T. / Lakshmi, N. et al. | 2008
- 581
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Development of a cosputter-evaporation chamber for Fe–Ga filmsMorley, N. A. / Yeh, S.-L. / Rigby, S. / Javed, A. / Gibbs, M. R. J. et al. | 2008
- 587
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Growth of InN on Si (111) by atmospheric-pressure metal-organic chemical vapor deposition using double-buffer layersLi, Zhen-Yu / Lan, Shan-Ming / Uen, Wu-Yih / Chen, Ying-Ru / Chen, Meng-Chu / Huang, Yu-Hsiang / Ku, Chien-Te / Liao, Sen-Mao / Yang, Tsun-Neng / Wang, Shing-Chung et al. | 2008
- 592
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Characterization of molecular nitrogen in III-V compound semiconductors by near-edge x-ray absorption fine structure and photoemission spectroscopiesBozanic, A. / Majlinger, Z. / Petravic, M. / Gao, Q. / Llewellyn, D. / Crotti, C. / Yang, Y.-W. et al. | 2008
- 597
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Mechanisms and selectivity for etching of and Si in plasmasWang, Chunyu / Donnelly, Vincent M. et al. | 2008
- 605
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Classical size effect in oxide-encapsulated Cu thin films: Impact of grain boundaries versus surfaces on resistivitySun, Tik / Yao, Bo / Warren, Andrew P. / Kumar, Vineet / Roberts, Scott / Barmak, Katayun / Coffey, Kevin R. et al. | 2008
- 610
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Morphological analysis of thin film prepared by rf magnetron sputteringDai, Wei / Zhang, Tongjun / Yang, Junyou / Sun, Rongxing / Xu, Juliang et al. | 2008
- 616
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X-ray photoelectron spectroscopy studies of water-induced surface reorganization of amphiphilic poly(2-hydroxyethyl methacrylate--dimethylsiloxane) copolymers using cryogenic sample handling techniquesChen, Lu / Hook, Daniel J. / Valint, Paul L. / Gardella, Joseph A. et al. | 2008
- 624
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Can the throttling of a perfect gas through a free molecular orifice produce a cooling effect?Young, Robert M. / Braggins, Timothy T. / Kirby, Christopher F. / Adam, J. Douglas / Petach, Michael B. / Tward, Emanuel et al. | 2008
- 634
-
Survey on measurement of tangential momentum accommodation coefficientAgrawal, Amit / Prabhu, S. V. et al. | 2008
- 648
-
PAPERS FROM THE 54TH INTERNATIONAL SYMPOSIUM OF AVS - Preface| 2008
- 650
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Bulk ratio method for determining surface enhancement using Auger analysisGeller, J. D. et al. | 2008
- 650
-
Applied Surface Science - Bulk ratio method for determining surface enhancement using Auger analysisGeller, J.D. et al. | 2008
- 654
-
Investigation of thin-oxide-free protective coatings on chromium and stainless steel formed by treatment with etidronic acidJohnson, S. L. / Sherwood, P. M. A. et al. | 2008
- 660
-
Cluster primary ions: Spikes, sputtering yields, secondary ion yields, and interrelationships for secondary molecular ions for static secondary ion mass spectrometrySeah, Martin P. et al. | 2008
- 668
-
Three dimensional image construction and spectrum extraction from two dimensional elemental mapping in Auger electron spectroscopyUrushihara, N. / Iida, S. / Sanada, N. / Suzuki, M. / Paul, D. F. / Bryan, S. / Nakajima, Y. / Hanajiri, T. / Kakushima, K. / Ahmet, P. et al. | 2008
- 673
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Electronic states of Fe nanostructures on Pt(997) surfaceCheng, Ruihua / Ayieta, E. / Losovyj, Ya. B. et al. | 2008
- 678
-
Effect of annealing temperature on the photocatalytic activity of sol-gel derived thin filmsBiswas, S. / Majumder, Arpi / Hossain, M. F. / Takahashi, T. / Kubota, Y. / Fujishima, A. et al. | 2008
- 683
-
Role of hydrogen bonding environment in films for surface passivationBurrows, M. Z. / Das, U. K. / Opila, R. L. / De Wolf, S. / Birkmire, R. W. et al. | 2008
- 683
-
Electronic Materials and Processing - Role of hydrogen bonding environment in a-Si: H films for c-Si surface passivationBurrows, M.Z. et al. | 2008
- 688
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Microstructural evolution of nickel-germanide in the systems during in situ annealingLee, Jae-Wook / Bae, Jee-Hwan / Park, Min-Ho / Kang, Han-Byul / Kim, Hyoungsub / Yang, Cheol-Woong et al. | 2008
- 692
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Effects of hydrogen ambient and film thickness on ZnO:Al propertiesDuenow, Joel N. / Gessert, Timothy A. / Wood, David M. / Dillon, Anne C. / Coutts, Timothy J. et al. | 2008
- 697
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Main determinants for III–V metal-oxide-semiconductor field-effect transistors (invited)Ye, Peide D. et al. | 2008
- 705
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Characterization of plasma etching induced interface states at Schottky contactsMamor, M. / Sellai, A. et al. | 2008
- 710
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- 716
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Photoluminescence characterization of polythiophene films doped with highly functional moleculesKato, H. / Takemura, S. / Kobe, H. / Mori, Y. / Yamada, A. / Matsuoka, Y. / Watanabe, Y. / Shimada, K. / Hiramatsu, T. / Nanba, N. et al. | 2008
- 720
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Influence of a post–chemical mechanical polishing cleaning process on the ferroelectric properties of a thin film capacitor fabricated by the damascene processKim, Nam-Hoon / Jun, Young-Kil / Ko, Pil-Ju / Lee, Woo-Sun et al. | 2008
- 724
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Silicate formation and thermal stability of ternary rare earth oxides as high- dielectricsVan Elshocht, S. / Adelmann, C. / Conard, T. / Delabie, A. / Franquet, A. / Nyns, L. / Richard, O. / Lehnen, P. / Swerts, J. / De Gendt, S. et al. | 2008
- 731
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Magnetic Interfaces and Nanostructures - High magnetization FeCo-Pd multilayersWalock, M.J. et al. | 2008
- 731
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High magnetization multilayersWalock, M. J. / Ambaye, H. / Chshiev, M. / Klose, F. R. / Butler, W. H. / Mankey, G. J. et al. | 2008
- 735
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Thermal stability of synthetic antiferromagnet and hard magnet coupled spin valvesTadisina, Zeenath R. / Gupta, Subhadra / LeClair, Patrick / Mewes, Tim et al. | 2008
- 739
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Process development and material characterization of polycrystalline , PbTe, and PbSnSeTe thin films on silicon for millimeter-scale thermoelectric generatorsBoniche, I. / Morgan, B. C. / Taylor, P. J. / Meyer, C. D. / Arnold, D. P. et al. | 2008
- 739
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- 757
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- 768
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- 777
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Technique to measure contact angle of micro/nanodroplets using atomic force microscopyJung, Yong Chae / Bhushan, Bharat et al. | 2008
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Improvement of the surface roughness and sensing properties of cerium dioxide thin film by chemical mechanical polishingKim, Nam-Hoon / Ko, Pil-Ju / Lee, Woo-Sun et al. | 2008
- 798
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Evaluation of bond quality and heat transfer of Cu-based microchannel heat exchange devicesMei, Fanghua / Jiang, J. / Meng, W. J. et al. | 2008
- 805
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- 805
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- 812
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Photoconductive analysis of ion implantation damage and annealing in silicon wafersAhrenkiel, R. K. et al. | 2008
- 819
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Nanometer-scaled triangular platinum islands fabricated using the bridge phenomenon of polystyrene beadsLee, Byoung-Kyu / Kim, Kyoung Seob / Lee, Ji-Hye / Kim, Nam-Hoon / Roh, Yonghan et al. | 2008
- 819
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Nanometer-Scale Science and Technology - Nanometer-scaled triangular platinum islands fabricated using the bridge phenomenon of polystyrene beadsLee, Byoung-Kyu et al. | 2008
- 824
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Conducting polymer nanofilm growth on a nanoscale linked-crater pattern fabricated on an Al surfaceKato, H. / Takemura, S. / Ishii, A. / Takarai, Y. / Watanabe, Y. / Sugiyama, T. / Hiramatsu, T. / Nanba, N. / Nishikawa, O. / Taniguchi, M. et al. | 2008
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Plasmonics Topical Conference - Thermoplasmonic shift and dispersion in thin metal filmsLereu, A.L. et al. | 2008
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- 842
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Effect of capacitive to inductive coupling transition in multiple linear U-type antenna on silicon thin film deposition from pure dischargesKim, Hong Bum / Lee, Hyoung Cheol / Kim, Kyong Nam / Yeom, Geun Young et al. | 2008
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Study on plasma assisted metal-organic chemical vapor deposition of Zr(C,N) and Ti(C,N) thin films and in situ plasma diagnostics with optical emission spectroscopyCho, S. J. / Nam, S.-H. / Jung, C.-K. / Jee, H.-G. / Boo, J.-H. / Kim, S. / Han, J. G. et al. | 2008
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Dry etching of extreme ultraviolet lithography mask structures in inductively coupled plasmasKim, D. Y. / Lee, H. J. / Jung, H. Y. / Lee, N.-E. / Kim, T. G. / Kim, B. H. / Ahn, Jinho / Kim, C. Y. et al. | 2008
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Etching characteristics and application of physical-vapor-deposited amorphous carbon for multilevel resistKim, H. T. / Kwon, B. S. / Lee, N.-E. / Park, Y. S. / Cho, H. J. / Hong, B. et al. | 2008
- 865
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Global plasma simulations using dynamically generated chemical modelsMunro, James J. / Tennyson, Jonathan et al. | 2008
- 865
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- 870
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Surface reactions during low- etching using plasmaFukasawa, Masanaga / Tatsumi, Tetsuya / Oshima, Keiji / Nagahata, Kazunori / Uchida, Saburo / Takashima, Seigo / Hori, Masaru / Kamide, Yukihiro et al. | 2008
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Low-damage low- etching with an environmentally friendly plasmaSoda, Eiichi / Kondo, Seiichi / Saito, Shuichi / Ichihashi, Yoshinari / Sato, Aiko / Ohtake, Hiroto / Samukawa, Seiji et al. | 2008
- 881
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Temperature effect on the glancing angle deposition of Si sculptured thin filmsPatzig, Christian / Rauschenbach, Bernd et al. | 2008
- 881
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Advanced Surface Engineering - Temperature effect on the glancing angle deposition of Si sculptured thin filmsPatzig, Christian et al. | 2008
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Effect of swift heavy ion irradiation on the hardness of chromium nanorodsNagar, Rupali / Mehta, B. R. / Singh, J. P. / Jain, D. / Ganesan, V. / Kesapragada, S. V. / Gall, D. et al. | 2008
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Effect of substrate temperatures on amorphous carbon nitride films prepared by reactive sputteringAono, Masami / Akiyoshi, Hidenobu / Kikuchi, Shunsuke / Kitazawa, Nobuaki / Watanabe, Yoshihisa et al. | 2008
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