Atomic scale study of InP etching by Cl~2-Ar ICP plasma discharge (English)
- New search for: Rhallabi, A.
- New search for: Chanson, R.
- New search for: Landesman, J.-P.
- New search for: Cardinaud, C.
- New search for: Fernandez, M.-C.
- New search for: Rhallabi, A.
- New search for: Chanson, R.
- New search for: Landesman, J.-P.
- New search for: Cardinaud, C.
- New search for: Fernandez, M.-C.
In:
EPJ APPLIED PHYSICS
;
53
, 3
;
33606
;
2011
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ISSN:
- Article (Journal) / Print
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Title:Atomic scale study of InP etching by Cl~2-Ar ICP plasma discharge
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Contributors:Rhallabi, A. ( author ) / Chanson, R. ( author ) / Landesman, J.-P. ( author ) / Cardinaud, C. ( author ) / Fernandez, M.-C. ( author )
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Published in:EPJ APPLIED PHYSICS ; 53, 3 ; 33606
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Publisher:
- New search for: EDP SCIENCES
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Publication date:2011-01-01
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Size:33606 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 530
- Further information on Dewey Decimal Classification
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Classification:
DDC: 530 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 53, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Structural, elastic, electronic, optical and thermal properties of cubic perovskite CsCdF3 under pressure effectGhebouli, B. / Ghebouli, M. A. / Fatmi, M. et al. | 2011
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Resistance and 1/f noise between circular contacts on conductive thin filmsLiang, C. / Vandamme, L. K.J. / Leroy, G. / Gest, J. et al. | 2011
- 30401
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Synthesis and nonlinear optical characterization of nanocrystalline gamma -alumina produced by in-flight thermal plasma routeBoroojerdian, P. / Ara, M.H.M. / Javadi, Z. / Akbari, B. / Karemi, T. et al. | 2011
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Fabrication and fracture toughness properties of carbon nanotube-reinforced cement compositeLuo, J. L. / Duan, Z. / Xian, G. / Li, Q. / Zhao, T. et al. | 2011
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Oxidation of ion beam synthesised embedded indium nanoclusters in silicaSanthana Raman, P. / Nair, K. G.M. / Rath, A. / Satyam, P. V. / Panigrahi, B. K. / Ravichandran, V. et al. | 2011
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Abnormal optical characteristics of the waveguide-grating structuresLi, J. / Zhang, X. / Liu, H. / Li, R. et al. | 2011
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Time-domain near-field/near-field transform with PWS operationsRavelo, B. / Liu, Y. / Ben Hadj Slama, J. et al. | 2011
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Thermodynamical and excess thermoacoustical study on some monosaccharide (glucose) with enzyme amylase in aqueous media at 298.15 KNithiyanantham, S. / Palaniappan, L. et al. | 2011
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The organic transistor: state-of-the-art and outlookHorowitz, G. et al. | 2011
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Study of HF behaviour of railway power substation in reduced scaleOuaddi, H. / Baranowski, S. / Nottet, G. / Demoulin, B. / Koné, L. et al. | 2011
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Low SAR planar antenna for multi standard cellular phonesBen Ahmed, M. / Bouhorma, M. / Elouaai, F. / Mamouni, A. et al. | 2011
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Characteristic impedance extraction of embedded and integrated interconnectsRoullard, J. / Capraro, S. / Lacrevaz, T. / Gallitre, M. / Bermond, C. / Farcy, A. / Fléchet, B. et al. | 2011
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Atomic scale study of InP etching by Cl2-Ar ICP plasma dischargeRhallabi, A. / Chanson, R. / Landesman, J.-P. / Cardinaud, C. / Fernandez, M.-C. et al. | 2011
- 33606/1
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Atomic scale study of InP etching by CI2-Ar ICP plasma dischargeRhallabi, A. / Chanson, R. / Landesman, J.P. / Cardinaud, C. / Fernandez, M.C. et al. | 2011
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Substrate integrated waveguide (SIW) inductive window band-pass filter based on post-wall irisesNouri, K. / Haddadi, K. / Benzaïm, O. / Lasri, T. / Feham, M. et al. | 2011
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Novel approach of UWB multi-band system based on orthogonal function for transports applicationsElbahhar, F. / Lamari, A. / Rivenq, A. / Rouvaen, J. M. / Heddebaut, M. / Boukour, T. / Sakkila, L. et al. | 2011
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Tunable dual-mode DFB laser for millimetre-wave signal generationGinestar, S. / van Dijk, F. / Accard, A. / Poingt, F. / Pommereau, F. / Le Gouezigou, L. / Le Gouezigou, O. / Lelarge, F. / Rousseau, B. / Landreau, J. et al. | 2011
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Focus on Telecom 2009 & JFMMAMamouni, A. et al. | 2011
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Synthesis and nonlinear optical characterization of nanocrystalline γ-alumina produced by in-flight thermal plasma routeBoroojerdian, P. / Majles Ara, M. H. / Javadi, Z. / Akbari, B. / Karemi, T. et al. | 2011