Highly c-axis oriented AlN layers grown on c-plane sapphire substrates by radio-frequency sputter epitaxy at 1080^oC (English)
- New search for: Mutsukura, N.
- New search for: Shinoda, H.
- New search for: Mutsukura, N.
- New search for: Shinoda, H.
In:
THIN SOLID FILMS
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520
, 13
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4237-4241
;
2012
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ISSN:
- Article (Journal) / Print
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Title:Highly c-axis oriented AlN layers grown on c-plane sapphire substrates by radio-frequency sputter epitaxy at 1080^oC
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Contributors:Mutsukura, N. ( author ) / Shinoda, H. ( author )
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Published in:THIN SOLID FILMS ; 520, 13 ; 4237-4241
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Publisher:
- New search for: Elsevier Science B.V., Amsterdam.
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Publication date:2012-01-01
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Size:5 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 530.4275
- Further information on Dewey Decimal Classification
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Classification:
DDC: 530.4275 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 520, Issue 13
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 4219
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Atmospheric plasmas for thin film deposition: A critical reviewMerche, Delphine / Vandencasteele, Nicolas / Reniers, François et al. | 2012
- 4237
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Highly c-axis oriented AlN layers grown on c-plane sapphire substrates by radio-frequency sputter epitaxy at 1080°CMutsukura, Nobuki / Shinoda, Hiroyuki et al. | 2012
- 4237
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Highly c-axis oriented AlN layers grown on c-plane sapphire substrates by radio-frequency sputter epitaxy at 1080^oCMutsukura, N. / Shinoda, H. et al. | 2012
- 4242
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Carbon coatings on silica glass optical fibers studied by reflectance Fourier-transform infrared spectroscopy and focused ion beam scanning electron microscopyStolov, Andrei A. / Lombardo, Jeffrey J. / Slyman, Brian E. / Li, Jie / Chiu, Wilson K.S. et al. | 2012
- 4249
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Morphology and crystallization of ThO2 thin films on polycrystalline IrBagge-Hansen, M. / Outlaw, R.A. / Seo, K. / Manos, D.M. et al. | 2012
- 4254
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Structural properties of porous silicon/SnO2:F heterostructuresGarcés, F.A. / Acquaroli, L.N. / Urteaga, R. / Dussan, A. / Koropecki, R.R. / Arce, R.D. et al. | 2012
- 4259
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Growth of heavily doped monocrystalline and polycrystalline SiGe-based quantum dot superlatticesHauser, David / Savelli, Guillaume / Plissonnier, Marc / Montès, Laurent / Simon, Julia et al. | 2012
- 4264
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Nanostructure transition in Cr–C–N coatings deposited by pulsed closed field unbalanced magnetron sputteringWu, Z.L. / Lin, J. / Moore, J.J. / Lei, M.K. et al. | 2012
- 4270
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Structural and optical properties of heteroepitaxial beta Ga2O3 films grown on MgO (100) substratesKong, Lingyi / Ma, Jin / Luan, Caina / Mi, Wei / Lv, Yu et al. | 2012
- 4275
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Microstructural differences between two Zr(C,N) coatings revealed by analytical transmission electron microscopyDörfel, Ilona / Rooch, Heidemarie / Österle, Werner et al. | 2012
- 4282
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Influence of spray pyrolysis deposition parameters on the optoelectronic properties of WO3 thin filmsBertus, L.M. / Enesca, A. / Duta, A. et al. | 2012
- 4291
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Low-temperature synthesis of ZnO nanorods using organic–inorganic composite as a seed layerUeno, Naoyuki / Nakanishi, Kouji / Ohta, Toshiaki / Egashira, Yasuyuki / Nishiyama, Norikazu et al. | 2012
- 4297
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Wet chemical preparation of YVO4:Eu thin films as red-emitting phosphor layers for fully transparent flat dielectric discharge lampKlausch, A. / Althues, H. / Freudenberg, T. / Kaskel, S. et al. | 2012
- 4302
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Optical and structural properties of NiMgO thin films formed by sol–gel spin coatingBoutwell, R.C. / Wei, M. / Scheurer, A. / Mares, J.W. / Schoenfeld, W.V. et al. | 2012
- 4305
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Control of aluminum doping of ZnO:Al thin films obtained by high-power impulse magnetron sputteringTiron, V. / Sirghi, L. / Popa, G. et al. | 2012
- 4310
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Crystallinity and electrical conductivity of sulfur-containing microcrystalline diamond thin filmNose, K. / Suwa, T. / Fujita, R. / Kamiko, M. / Mitsuda, Y. et al. | 2012
- 4314
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Susceptor-assisted microwave annealing for activation of arsenic dopants in siliconAlford, T.L. / Gadre, Mandar J. / Vemuri, Rajitha N.P. / Theodore, N. David et al. | 2012
- 4321
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Reduction of nanoparticle deposition during fabrication of porous anodic aluminaDing, Jianning / Zhu, Yun / Yuan, Ningyi / Ding, Guqiao et al. | 2012
- 4326
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Self-assembly of organic acid molecules on the metal oxide surface of a cupronickel alloyKruszewski, Kristen M. / Renk, Emilee R. / Gawalt, Ellen S. et al. | 2012
- 4332
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Near-superhydrophobic behavior of multi-walled carbon nanotube thin filmsClark, Michael D. / Krishnamoorti, Ramanan et al. | 2012
- 4339
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Mechanically robust super-oleophobic stamp for direct stamping of silver nanoparticle inkKim, Jiseok / Lin, Pinyen / Kim, Woo Soo et al. | 2012
- 4344
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Diffusion of Cr, Fe, and Ti ions from Ni-base alloy Inconel-718 into a transition alumina coatingDressler, M. / Nofz, M. / Dörfel, I. / Saliwan-Neumann, R. et al. | 2012
- 4350
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Nature in corrosion–erosion surface for [TiN/TiAlN]n nanometric multilayers growth on AISI 1045 steelCaicedo, J.C. / Cabrera, G. / Caicedo, H.H. / Amaya, C. / Aperador, W. et al. | 2012
- 4362
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Spinodal decomposition of Ti0.33Al0.67N thin films studied by atom probe tomographyJohnson, L.J.S. / Thuvander, M. / Stiller, K. / Odén, M. / Hultman, L. et al. | 2012
- 4369
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Nanoindentation and micro-mechanical fracture toughness of electrodeposited nanocrystalline Ni–W alloy filmsArmstrong, D.E.J. / Haseeb, A.S.M.A. / Roberts, S.G. / Wilkinson, A.J. / Bade, K. et al. | 2012
- 4373
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Formation and optimization of undercut-microholes in InGaN light emitting diodes by using wet chemical etchingKim, Hyun-Kyu / Ryu, Jae-Hyoung / Kim, Hee-Yun / Kang, Ji-Hye / Han, Nam / Park, Young Jae / Ryu, Beo Deul / Hong, Chang Hee / Kim, Hyung Gu et al. | 2012
- 4378
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Raman study of Ni and Ni silicide contacts on 4H– and 6H–SiCCichoň, Stanislav / Macháč, Petr / Barda, Bohumil / Machovič, Vladimír / Slepička, Petr et al. | 2012
- 4389
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Crystallization and electrical characteristics of Ge1Cu2Te3 films for phase change random access memoryKamada, Toshiya / Sutou, Yuji / Sumiya, Masashi / Saito, Yuta / Koike, Junichi et al. | 2012
- 4394
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Influence of high temperature processing of sol–gel derived barium titanate thin films deposited on platinum and strontium ruthenate coated silicon wafersStawski, Tomasz M. / Vijselaar, Wouter J.C. / Göbel, Ole F. / Veldhuis, Sjoerd A. / Smith, Brian F. / Blank, Dave H.A. / ten Elshof, Johan E. et al. | 2012
- 4402
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Ultraporous poly(3,4-ethylenedioxythiophene) for nanometric electrochemical supercapacitorAradilla, David / Estrany, Francesc / Armelin, Elaine / Alemán, Carlos et al. | 2012
- 4410
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In situ ellipsometric study of copper growth on siliconHaidu, Francisc / Gordan, Ovidiu D. / Zahn, Dietrich R.T. et al. | 2012
- 4418
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Plasma oxidation of electron beam evaporated cadmium thin filmsAli, H.M. / Raaif, M. et al. | 2012
- 4422
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An evaluation of depletion layer photoactivity in Cu2ZnSnS4 thin filmSarswat, Prashant K. / Free, Michael L. et al. | 2012
- 4427
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The OFF to ON switching time and ON state consolidation in write-once-read-many-times memory devices based on doped and undoped carbon-sphere/polymer compositesMachado, Wagner S. / Mamo, Messai A. / Coville, Neil J. / Hümmelgen, Ivo A. et al. | 2012
- 4432
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Optimization of ZnO:Al/Ag/ZnO:Al structures for ultra-thin high-performance transparent conductive electrodesCrupi, I. / Boscarino, S. / Strano, V. / Mirabella, S. / Simone, F. / Terrasi, A. et al. | 2012
- 4436
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Room-temperature H2S gas sensing properties of carbonized silicon nanoporous pillar arrayWang, Hai Yan / Wang, Yong Qiang / Chen, Hong Yan / Li, Xin Jian et al. | 2011
- 4439
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Impact of a-Si:H hydrogen depth profiles on passivation properties in a-Si:H/c-Si heterojunctionsSchulze, T.F. / Korte, L. / Rech, B. et al. | 2012
- 4445
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Field-effect transistors of the block co-oligomers based on thiophene and pyridineHaemori, Masamitsu / Itaka, Kenji / Yamaguchi, Jun / Kumagai, Akira / Yaginuma, Seiichiro / Fukumoto, Hiroki / Matsumoto, Yuji / Yamamoto, Takakazu / Koinuma, Hideomi et al. | 2012
- 4449
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Simulation of forward dark current voltage characteristics of tandem solar cellsRubinelli, F.A. et al. | 2012
- 4455
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Effects of double passivation for optimize DC properties in gamma-gate AlGaN/GaN high electron mobility transistor by plasma enhanced chemical vapor depositionCho, Sung-Jin / Wang, Cong / Kim, Nam-Young et al. | 2012
- 4459
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Voltammetric detection of bisphenol a by a chitosan–graphene composite modified carbon ionic liquid electrodeWang, Qingxiang / Wang, Yuhua / Liu, Shengyun / Wang, Liheng / Gao, Feng / Gao, Fei / Sun, Wei et al. | 2012
- 4465
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Elaboration of single wall carbon nanotubes-based gas sensors: Evaluating the bundling effect on the sensor performanceNdiaye, Amadou L. / Varenne, Christelle / Bonnet, Pierre / Petit, Élodie / Spinelle, Laurent / Brunet, Jérôme / Pauly, Alain / Lauron, Bernard et al. | 2012
- 4470
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Growth temperature dependent dielectric properties of BiFeO3 thin films deposited on silica glass substratesAhmed, Taimur / Vorobiev, Andrei / Gevorgian, Spartak et al. | 2012
- 4475
-
Organometallic tris(8-hydroxyquinoline)aluminum complexes as buffer layers and dopants in inverted organic solar cellsTolkki, Antti / Kaunisto, Kimmo / Heiskanen, Juha P. / Omar, Walaa A.E. / Huttunen, Kirsi / Lehtimäki, Suvi / Hormi, Osmo E.O. / Lemmetyinen, Helge et al. | 2012
- 4482
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Further work function and interface quality improvement on Al2O3 capped high-k/metal gate p-type metal-oxide-semiconductor field-effect-transistors by incorporation of fluorineChen, Y.W. / Lai, C.M. / Cheng, L.W. / Hsu, C.H. / Hsu, C.W. et al. | 2012
- 4486
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Orientation-dependent phase separation of GaAsSb epilayers grown by gas-source molecular-beam epitaxyChen, Yi-Ren / Chou, Li-Chang / Yang, Ying-Jay / Lin, Hao-Hsiung et al. | 2012
- 4493
-
Crossover of magnetoresistance from positive to negative in La0.5Sr0.5CoO3− σ/Si heterostructureJin, K.X. / Li, H. / Wang, J.Y. / Tan, X.Y. / Zhao, S.G. / Chen, C.L. et al. | 2012
- 4497
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Properties of TaSiN thin films deposited by reactive radio frequency magnetron sputteringMešić, Biljana / Schroeder, Herbert et al. | 2012
- 4501
-
Comparative study of erbium disilicide thin films grown in situ under ultrahigh vacuum or ex situ with a capping layerReckinger, N. / Duţu, C.A. / Tang, X. / Dubois, E. / Yarekha, D.A. / Godey, S. / Nougaret, L. / Łaszcz, A. / Ratajczak, J. / Raskin, J.-P. et al. | 2012
- 4506
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Corrigendum to “Electrical properties of BaTiO3 based ferroelectric capacitors grown on oxide sacrificial layers for micro-cantilevers applications” Thin Solid Films 520 (2012) 3071–3078Vasta, Giuseppe / Jackson, Timothy J. / Tarte, Edward et al. | 2012
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Contents| 2012