Soft x-ray appearance potential spectroscopy study of MgO (100) and alpha -Al~2O~3 (100) single crystals (English)
- New search for: Fukuda, Y.
- New search for: Sanada, N.
- New search for: Mochizuki, S.
- New search for: Yatsuzuka, I.
- New search for: Fukuda, Y.
- New search for: Sanada, N.
- New search for: Mochizuki, S.
- New search for: Yatsuzuka, I.
In:
JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUM SURFACES AND FILMS
;
31
, 6
;
06F110
;
2013
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ISSN:
- Article (Journal) / Print
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Title:Soft x-ray appearance potential spectroscopy study of MgO (100) and alpha -Al~2O~3 (100) single crystals
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Contributors:
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Published in:JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY A VACUUM SURFACES AND FILMS ; 31, 6 ; 06F110
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Publisher:
- New search for: American Vacuum Society
-
Publication date:2013-01-01
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Size:06F110
-
ISSN:
-
Type of media:Article (Journal)
-
Type of material:Print
-
Language:English
- New search for: 621.55
- Further information on Dewey Decimal Classification
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Classification:
DDC: 621.55 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 31, Issue 6
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Very fast-opening UHV gate valveSonderegger, Kurt / Dür, Michael / Buthig, Joachim / Pantazis, Sarantis / Jousten, Karl et al. | 2013
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Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100)Zhernokletov, Dmitry M. / Dong, Hong / Brennan, Barry / Kim, Jiyoung / Wallace, Robert M. / Yakimov, Michael / Tokranov, Vadim / Oktyabrsky, Serge et al. | 2013
-
Growth of one-dimensional vertically aligned carbon nanostructures on SiC—Catalyst effectBüke, Göknur (Cambaz) et al. | 2013
-
Modified high power impulse magnetron sputtering process for increased deposition rate of titaniumBarker, Paul Michael / Lewin, Erik / Patscheider, Jörg et al. | 2013
-
Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scatteringZhang, Wenyu / Nahm, Rambert K. / Ma, Paul F. / Engstrom, James R. et al. | 2013
-
Band offsets for mismatched interfaces: The special case of ZnO on CdTe (001)Jaffe, John E. / Kaspar, Tiffany C. / Droubay, Timothy C. / Varga, Tamas et al. | 2013
-
Modeling of the effects of charge transport on voltage-dependent photocurrent in ultrathin CdTe solar cellsArnab, Salman M. / Kabir, M. Z. et al. | 2013
-
Novel ArF photoresist polymer to suppress the formation of roughness in plasma etching processesUesugi, Takuji / Okada, Takeru / Wada, Akira / Kato, Keisuke / Yasuda, Atsushi / Maeda, Shinichi / Samukawa, Seiji et al. | 2013
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Atomic layer etching removal of damaged layers in a contact hole for low sheet resistanceKim, Jong Kyu / Cho, Sung Il / Lee, Sung Ho / Kim, Chan Kyu / Min, Kyung Suk / Yeom, Geun Young et al. | 2013
-
Electron depletion via cathode spot dispersion of dielectric powder into an overhead plasmaGillman, Eric D. / Foster, John E. et al. | 2013
- 061304
-
Effect of open area ratio and pattern structure on fluctuations in critical dimension and Si recessKuboi, N. / Tatsumi, T. / Fukasawa, M. / Kinoshita, T. / Komachi, J. / Ansai, H. / Miwa, H. et al. | 2013
-
Inductively coupled plasma–reactive ion etching of c- and a-plane AlGaN over the entire Al composition range: Effect of BCl3 pretreatment in Cl2/Ar plasma chemistryShah, Amit P. / Laskar, Masihhur R. / Azizur Rahman, A. / Gokhale, Maheshwar R. / Bhattacharya, Arnab et al. | 2013
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Measurements of sputtered neutrals and ions and investigation of their roles on the plasma properties during rf magnetron sputtering of Zn and ZnO targetsMaaloul, L. / Stafford, L. et al. | 2013
-
Effect of process parameters on properties of argon–nitrogen plasma for titanium nitride film depositionSaikia, Partha / Kakati, Bharat et al. | 2013
-
Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen dischargesLiu, Jia / Wen, De-Qi / Liu, Yong-Xin / Gao, Fei / Lu, Wen-Qi / Wang, You-Nian et al. | 2013
-
Ion optical effects in a low pressure rf plasmaOechsner, Hans / Paulus, Hubert et al. | 2013
-
Damaged silicon contact layer removal using atomic layer etching for deep-nanoscale semiconductor devicesKim, Jong Kyu / Cho, Sung Il / Lee, Sung Ho / Kim, Chan Kyu / Min, Kyung Suk / Kang, Seung Hyun / Yeom, Geun Young et al. | 2013
-
Space and phase resolved ion energy and angular distributions in single- and dual-frequency capacitively coupled plasmasZhang, Yiting / Kushner, Mark J. / Moore, Nathaniel / Pribyl, Patrick / Gekelman, Walter et al. | 2013
-
Spray deposition of nanostructured metal films using hydrodynamically stabilized, high pressure microplasmasKoh, Travis L. / Gordon, Michael J. et al. | 2013
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Effect of titanium contamination on oxygen atom recombination probability on plasma conditioned surfacesSrivastava, Ashutosh K. / Khare, Rohit / Donnelly, Vincent M. et al. | 2013
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Microstructure and mechanical properties of Ti–B–C–N–Si nanocomposite films deposited by unbalanced magnetron sputteringJang, Jaeho / An, Eunsol / Park, In-Wook / Nam, Dae-Geun / Jo, Ilguk / Lin, Jianliang / Moore, John J. / Ho Kim, Kwang / Park, Ikmin et al. | 2013
- 061402
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Phase transition of In/Si(111)-4x1 surface studied with low-energy electron diffractionYeo, J. / Shim, H. / Lee, G. et al. | 2013
-
Mechanisms for hyperthermal polyatomic hydrocarbon modification of PMMA surfaces from molecular dynamics simulationsChoudhary, Kamal / Hill, Leah B. / Kemper, Travis W. / Sinnott, Susan B. et al. | 2013
-
Role of gold nanoclusters supported on TiO2(110) model catalyst in CO oxidation reactionVisikovskiy, Anton / Mitsuhara, Kei / Kido, Yoshiaki et al. | 2013
-
Dissociation of trimethylgallium on the ZrB2(0001) surfaceManandhar, Kedar / Trenary, Michael / Otani, Shigeki / Zapol, Peter et al. | 2013
-
Roughness evolution during the atomic layer deposition of metal oxidesPremkumar, Peter Antony / Delabie, Annelies / Rodriguez, Leonard N. J. / Moussa, Alain / Adelmann, Christoph et al. | 2013
-
Fabrication of superconducting tantalum nitride thin films using infrared pulsed laser depositionChaudhuri, Saumyadip / Maasilta, Ilari J. / Chandernagor, Lucie / Ging, Marion / Lahtinen, Manu et al. | 2013
-
Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and waterMullings, Marja N. / Hägglund, Carl / Bent, Stacey F. et al. | 2013
-
On the environmental stability of ZnO thin films by spatial atomic layer depositionIlliberi, Andrea / Scherpenborg, Robert / Theelen, Mirjam / Poodt, Paul / Roozeboom, Fred et al. | 2013
-
Evolution of sputtered tungsten coatings at high temperatureStelmakh, Veronika / Rinnerbauer, Veronika / Joannopoulos, John D. / Soljačić, Marin / Celanovic, Ivan / Senkevich, Jay J. / Tucker, Charles / Ives, Thomas / Shrader, Ronney et al. | 2013
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Large effect of titanium precursor on surface reactivity and mechanical strength of electrospun nanofibers coated with TiO2 by atomic layer depositionMcClure, Christina D. / Oldham, Christopher J. / Walls, Howard J. / Parsons, Gregory N. et al. | 2013
-
Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymersCarcia, Peter F. / Scott McLean, Robert / Walls, Dennis J. / Reilly, Michael H. / Wyre, John P. et al. | 2013
-
Abrasion resistance of silica-based coatings prepared by atmospheric pressure plasma chemical vapor deposition for protection of polymeric surfacesNoborisaka, Mayui / Mori, Takanori / Horikoshi, Ryohei / Shirakura, Akira / Hashimoto, Ayako / Suzuki, Tetsuya et al. | 2013
-
Thermal barrier coating deposition by rarefied gas jet assisted processes: Simulations of deposition on a stationary airfoilRodgers, Theron M. / Zhao, Hengbei / Wadley, Haydn N. G. et al. | 2013
-
Deuterium ion beam irradiation onto the pulsed laser deposited tungsten thin filmsMostako, A. T. T. / Khare, Alika / Rao, C. V. S. / Vala, Sudhirsinh / Makwana, R. J. / Basu, T. K. et al. | 2013
-
Antimony-assisted carbonization of Si(111) with solid source molecular beam epitaxyHackley, Justin / Sarney, Wendy L. / Richardson, Christopher J. K. et al. | 2013
-
Characterization and photoluminescence of Co-doped SiC filmsSun, Xianke / Jin, Xin / Wang, Shiqi / Liu, Huarui / Sun, Peng / An, Yukai / Guo, Ruisong / Liu, Jiwen et al. | 2013
-
Characteristics of Al-doped ZnO thin films prepared in Ar + H2 atmosphere and their vacuum annealing behaviorZhu, Bailin / Lü, Kun / Wang, Jun / Li, Taotao / Wu, Jun / Zeng, Dawen / Xie, Changsheng et al. | 2013
-
SiO2/TiO2 distributed Bragg reflector near 1.5 μm fabricated by e-beam evaporationFeng, I-Wen / Jin, Sixuan / Li, Jing / Lin, Jingyu / Jiang, Hongxing et al. | 2013
-
Effect of Mn doping on the structural, optical, and magnetic properties of In2O3 filmsWang, Shiqi / An, Yukai / Duan, Lingshen / Liu, Huarui / Liu, Jiwen / Wu, Zhonghua et al. | 2013
-
Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputteringMei, A. B. / Howe, B. M. / Zhang, C. / Sardela, M. / Eckstein, J. N. / Hultman, L. / Rockett, A. / Petrov, I. / Greene, J. E. et al. | 2013
-
Dry etching techniques for active devices based on hexagonal boron nitride epilayersGrenadier, Samuel / Li, Jing / Lin, Jingyu / Jiang, Hongxing et al. | 2013
- 061518
-
Ag as a surfactant for Co/MgO(111)-(√3x√3)R 30^oJohnson-Steigelman, H.T. / Parihar, S.S. / King, S.T. / Lyman, P.F. et al. | 2013
-
Improved design of 5 nm class electron optical microcolumn for manufacturing convenience and its characteristicsOh, Tae-Sik / Kim, Dae-Wook / Ahn, Seungjoon / Seob Kim, Ho et al. | 2013
-
Evaporation and thermal cracking of dimeric parylenesFranz, Gerhard / Schamberger, Florian et al. | 2013
-
Simulation of the transient heat transfer between two coaxial cylindersGraur, Irina / Ho, Minh Tuan / Wuest, Martin et al. | 2013
-
Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and high vacuum regimeVölklein, Friedemann / Grau, Mario / Meier, Andreas / Hemer, Grit / Breuer, Lars / Woias, Peter et al. | 2013
-
Measurement of the tangential momentum accommodation coefficient of H2 on stainless steel, extreme ultraviolet-resist, and polyimideVelthuis, Johannes F. M. / van Bokhoven, Laurens et al. | 2013
-
Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometryToukabri, Rim / Shi, Yujun et al. | 2013
-
Atomic layer etching removal of damaged layers in a contact hole for low sheet resistance 061302Kyu Kim, Jong et al. | 2013
-
Antimony-assisted carbonization of Si(111) with solid source molecular beam epitaxy 061511Hackley, Justin et al. | 2013
-
Surfaces - Microstructure and mechanical properties of Ti-B-C-N-Si nanocomposite films deposited by unbalanced magnetron sputtering 061401Jang, Jaeho et al. | 2013
-
Interfaces - Probing ultrathin film continuity and interface abruptness with x-ray photoelectron spectroscopy and low-energy ion scattering 061101Zhang, Wenyu et al. | 2013
-
On the environmental stability of ZnO thin films by spatial atomic layer deposition 061504Illiberi, Andrea et al. | 2013
-
Effect of trimethylsilane pressure on hot-wire chemical vapor deposition chemistry using vacuum ultraviolet laser ionization mass spectrometry 061606Toukabri, Rim et al. | 2013
-
Effect of open area ratio and pattern structure on fluctuations in critical dimension and Si recess 061304Kuboi, Nobuyuki et al. | 2013
-
Thermal barrier coating deposition by rarefied gas jet assisted processes: Simulations of deposition on a stationary airfoil 061509Rodgers, Theron M et al. | 2013
-
Growth of one-dimensional vertically aligned carbon nanostructures on SiC — Catalyst effect 060603Büke, Göknur et al. | 2013
-
SiO2/TiO2 distributed Bragg reflector near 1.5 μm fabricated by e-beam evaporation 061514Feng, I-Wen et al. | 2013
-
Nanoscale compositional analysis of NiTi shape memory alloy films deposited by DC magnetron sputtering 06F102Sharma, S K et al. | 2013
-
Radiofrequency pulsed glow discharge-ToFMS depth profiling of a CdTe solar cell: A comparative study versus time of flight secondary ion mass spectrometry 06F106Gonzalez-Gago, Cristina et al. | 2013
-
TOF SIMS analyses of stray Ga during FIB milling 06F108Santeufemio, Christopher et al. | 2013
-
Surface initiated atom transfer radical polymerization grafting of sodium styrene sulfonate from titanium and silicon substratesFoster, Rami N. / Keefe, Andrew J. / Jiang, Shaoyi / Castner, David G. et al. | 2013
-
Soft x-ray appearance potential spectroscopy study of MgO (100) and α-Al2O3 (100) single crystalsFukuda, Yasuo / Sanada, Noriaki / Mochizuki, Sachie / Yatsuzuka, Ikuko et al. | 2013
-
Vacuum Science and Technology - Improved design of 5 nm class electron optical microcolumn for manufacturing convenience and its characteristics 061601Oh, Tae-Sik et al. | 2013
-
Effect of early stage growth on moisture permeation of thin-film Al2O3 grown by atomic layer deposition on polymers 061507Carcia, Peter F et al. | 2013
-
Ag as a surfactant for Co/MgO(111)-()R 30°Johnson-Steigelman, H. Trevor / Parihar, Somendra S. / King, Seth T. / Lyman, Paul F. et al. | 2013
-
Radiofrequency pulsed glow discharge-ToFMS depth profiling of a CdTe solar cell: A comparative study versus time of flight secondary ion mass spectrometryGonzalez-Gago, Cristina / Pisonero, Jorge / Bordel, Nerea / Sanz-Medel, Alfredo / Tibbetts, Nicole J. / Smentkowski, Vincent S. et al. | 2013
-
Pseudomorphic growth of InAs on misoriented GaAs for extending quantum cascade laser wavelengthMeyer, Charles / Cheng, Emily / Grayer, Justin / Mueller, David / Triplett, Gregory / Roberts, Denzil / Graham, Samuel et al. | 2013
-
Physical properties of epitaxial ZrN/MgO(001) layers grown by reactive magnetron sputtering 061516Mei, A B et al. | 2013
-
Abrasion resistance of silica-based coatings prepared by atmospheric pressure plasma chemical vapor deposition for protection of polymeric surfaces 061508Noborisaka, Mayui et al. | 2013
-
X-ray photoelectron spectroscopy study of para-substituted benzoic acids chemisorbed to aluminum oxide thin films 06F107Kreil, Justin et al. | 2013
-
Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry studyWang, Han / Fu, Kan et al. | 2013
-
Nanoscale compositional analysis of NiTi shape memory alloy films deposited by DC magnetron sputteringSharma, S. K. / Mohan, S. / Bysakh, S. / Kumar, A. / Kamat, S. V. et al. | 2013
-
Reduction of angular dip width of surface plasmon resonance sensor by coupling surface plasma waves on sensing surface and inside metal–dielectric–metal structureHuang, Bohr-Ran / Liao, Chung-Chi / Lu, Chun-Yi / Ke, Wen-Cheng / Huang, Yi-Lun / Chen, Nai-Chuan et al. | 2013
-
Role of gold nanoclusters supported on TiO2(110) model catalyst in CO oxidation reaction 061404Visikovskiy, Anton et al. | 2013
-
Surface initiated atom transfer radical polymerization grafting of sodium styrene sulfonate from titanium and silicon substrates 06F103Foster, Rami N et al. | 2013
-
Spray deposition of nanostructured metal films using hydrodynamically stabilized, high pressure microplasmas 061312Koh, Travis L et al. | 2013
-
Deuterium ion beam irradiation onto the pulsed laser deposited tungsten thin films 061510Mostako, A T T et al. | 2013
-
Plasma Science and Technology - Novel ArF photoresist polymer to suppress the formation of roughness in plasma etching processes 061301Uesugi, Takuji et al. | 2013
-
Reduction of angular dip width of surface plasmon resonance sensor by coupling surface plasma waves on sensing surface and inside metal-dielectric-metal structure 06F104Huang, Bohr-Ran et al. | 2013
-
In-situ plasma cleaning of samples to remove hydrocarbon and/or polydimethylsiloxane prior to ToF-SIMS analysis 06F105Smentkowski, Vincent S et al. | 2013
-
Effect of open area ratio and pattern structure on fluctuations in critical dimension and Si recessa)Kuboi, Nobuyuki / Tatsumi, Tetsuya / Fukasawa, Masanaga / Kinoshita, Takashi / Komachi, Jun / Ansai, Hisahiro / Miwa, Hiroyuki et al. | 2013
-
In-situ plasma cleaning of samples to remove hydrocarbon and/or polydimethylsiloxane prior to ToF-SIMS analysisSmentkowski, Vincent S. / Moore, C. A. et al. | 2013
-
TOF SIMS analyses of stray Ga during FIB millingSanteufemio, Christopher / Gorman, Brian P. / Zhou, Chuanzhen / Giannuzzi, Lucille A. / Stevie, Fred A. et al. | 2013
-
Soft x-ray appearance potential spectroscopy study of MgO (100) and alpha -Al~2O~3 (100) single crystalsFukuda, Y. / Sanada, N. / Mochizuki, S. / Yatsuzuka, I. et al. | 2013
-
Inductively coupled plasma-reactive ion etching of c- and a-plane AlGaN over the entire Al composition range: Effect of BCl3 pretreatment in Cl2/Ar plasma chemistry 061305Shah, Amit P et al. | 2013
-
Band offsets for mismatched interfaces: The special case of ZnO on CdTe (001) 061102Jaffe, John E et al. | 2013
-
Effect of Mn doping on the structural, optical, and magnetic properties of In2O3 films 061515Wang, Shiqi et al. | 2013
-
Evaporation and thermal cracking of dimeric parylenes 061602Franz, Gerhard et al. | 2013
-
Simulation of the transient heat transfer between two coaxial cylinders 061603Graur, Irina et al. | 2013
-
Measurement of the tangential momentum accommodation coefficient of H2 on stainless steel, extreme ultraviolet-resist, and polyimide 061605Velthuis, Johannes F M et al. | 2013
-
Special Issue: Surface Analysis - Nucleation and growth of MgO atomic layer deposition: A real-time spectroscopic ellipsometry study 06F101Wang, Han et al. | 2013
-
Electron depletion via cathode spot dispersion of dielectric powder into an overhead plasma 061303Gillman, Eric D et al. | 2013
-
Effect of process parameters on properties of argon-nitrogen plasma for titanium nitride film deposition 061307Saikia, Partha et al. | 2013
-
Damaged silicon contact layer removal using atomic layer etching for deep-nanoscale semiconductor devices 061310Kyu Kim, Jong et al. | 2013
-
Space and phase resolved ion energy and angular distributions in single- and dual-frequency capacitively coupled plasmas 061311Zhang, Yiting et al. | 2013
-
Modified high power impulse magnetron sputtering process for increased deposition rate of titanium 060604Michael Barker, Paul et al. | 2013
-
Photovoltaics and Energy - Modeling of the effects of charge transport on voltage-dependent photocurrent in ultrathin CdTe solar cells 061201Arnab, Salman M et al. | 2013
-
Phase transition of In/Si(111)-4×1 surface studied with low-energy electron diffractionYeo, Jonghoon / Shim, Hyungjoon / Lee, Geunseop et al. | 2013
-
Measurements of sputtered neutrals and ions and investigation of their roles on the plasma properties during rf magnetron sputtering of Zn and ZnO targets 061306Maaloul, L et al. | 2013
-
Ion optical effects in a low pressure rf plasma 061309Oechsner, Hans et al. | 2013
-
Effect of titanium contamination on oxygen atom recombination probability on plasma conditioned surfaces 061313Srivastava, Ashutosh K et al. | 2013
-
Investigation of arsenic and antimony capping layers, and half cycle reactions during atomic layer deposition of Al2O3 on GaSb(100) 060602Zhernokletov, Dmitry M et al. | 2013
-
Phase transition of In/Si(111)-4×1 surface studied with low-energy electron diffraction 061402Yeo, Jonghoon et al. | 2013
-
Ag as a surfactant for Co/MgO(111)-(√3×√3)R 30° 061518Trevor Johnson-Steigelman, H et al. | 2013
-
Evolution of sputtered tungsten coatings at high temperature 061505Stelmakh, Veronika et al. | 2013
-
Soft x-ray appearance potential spectroscopy study of MgO (100) and α-Al2O3 (100) single crystals 06F110Fukuda, Yasuo et al. | 2013
-
Mechanisms for hyperthermal polyatomic hydrocarbon modification of PMMA surfaces from molecular dynamics simulations 061403Choudhary, Kamal et al. | 2013
-
Dissociation of trimethylgallium on the ZrB2(0001) surface 061405Manandhar, Kedar et al. | 2013
-
Large effect of titanium precursor on surface reactivity and mechanical strength of electrospun nanofibers coated with TiO2 by atomic layer deposition 061506McClure, Christina D et al. | 2013
-
X-ray photoelectron spectroscopy study of para-substituted benzoic acids chemisorbed to aluminum oxide thin filmsKreil, Justin / Ellingsworth, Edward / Szulczewski, Greg et al. | 2013
-
Dry etching techniques for active devices based on hexagonal boron nitride epilayers 061517Grenadier, Samuel et al. | 2013
-
Fabrication of superconducting tantalum nitride thin films using infrared pulsed laser deposition 061502Chaudhuri, Saumyadip et al. | 2013
-
Pseudomorphic growth of InAs on misoriented GaAs for extending quantum cascade laser wavelength 06F109Meyer, Charles et al. | 2013
-
Experimental and numerical investigations of electron density in low-pressure dual-frequency capacitively coupled oxygen discharges 061308Liu, Jia et al. | 2013
-
Letters - Very fast-opening UHV gate valve 060601Sonderegger, Kurt et al. | 2013
-
Characterization and photoluminescence of Co-doped SiC films 061512Sun, Xianke et al. | 2013
-
Characteristics of Al-doped ZnO thin films prepared in Ar + H2 atmosphere and their vacuum annealing behavior 061513Zhu, Bailin et al. | 2013
-
Thin Films - Roughness evolution during the atomic layer deposition of metal oxides 061501Antony Premkumar, Peter et al. | 2013
-
Tin oxide atomic layer deposition from tetrakis(dimethylamino)tin and water 061503Mullings, Marja N et al. | 2013
-
Optimized MEMS Pirani sensor with increased pressure measurement sensitivity in the fine and high vacuum regime 061604Völklein, Friedemann et al. | 2013