Wafer-to-wafer process fault detection using data stream mining techniques (English)
- New search for: Ko, J.M.
- New search for: Hong, S.R.
- New search for: Choi, J.Y.
- New search for: Kim, C.O.
- New search for: Ko, J.M.
- New search for: Hong, S.R.
- New search for: Choi, J.Y.
- New search for: Kim, C.O.
In:
INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING
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14
, 1
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103-113
;
2013
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ISSN:
- Article (Journal) / Print
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Title:Wafer-to-wafer process fault detection using data stream mining techniques
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Contributors:
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Published in:INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING ; 14, 1 ; 103-113
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Publisher:
- New search for: SPRINGER
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Publication date:2013-01-01
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Size:11 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 621
- Further information on Dewey Decimal Classification
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Classification:
DDC: 621 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 14, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 5
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Hybrid micromachining of glass using ECDM and micro grindingCao, Xuan Doan / Kim, Bo Hyun / Chu, Chong Nam et al. | 2012
- 11
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Planarization of wafer edge profile in chemical mechanical polishingPark, Yeongbong / Jeong, Hobin / Choi, Sungha / Jeong, Haedo et al. | 2012
- 17
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Chatter marks reduction in meso-scale milling through ultrasonic vibration assistance parallel to tooling’s axisKo, Jeong Hoon / Tan, Shao Wei et al. | 2012
- 23
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Capability of tungsten carbide micro-mills to machine hardened tool steelGilbin, Alexandre / Fontaine, Michaël / Michel, Gérard / Thibaud, Sébastien / Picard, Philippe et al. | 2012
- 29
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Analytical model to predict temperature distribution and ablation depth in excimer laser micromachiningMarla, Deepak / Barde, Vishal / Joshi, Suhas Sitaram et al. | 2012
- 37
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Electrochemical magnetic abrasive machining of AISI304 stainless steel tubesJudal, Kesarbhai Bhikhabhai / Yadava, Vinod et al. | 2012
- 45
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Time-slicing control strategy for rotary SMA actuatorsDo, Phu / Lee, Byung Ryong et al. | 2012
- 49
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A computer-aided and robot-assisted surgical system for reconstruction of anterior cruciate ligamentHuynh, Le Minh / Kim, Yoon Hyuk et al. | 2012
- 55
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Generation and control of 3D standing wave illumination for wide-field high-resolution 3D microscopic measurementUsuki, Shin / Kanaka, Hiroyoshi / Miura, Kenjiro Takai et al. | 2012
- 61
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Design of a static balancer with space mappingCho, Chang-Hyun / Lee, Woo-Sub / Kang, Sung-Chul et al. | 2012
- 69
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Kinematic analysis of 7 degrees of freedom upper-limb exoskeleton robot with tilted shoulder abductionLoh, Byoung Gook / Rosen, Jacob et al. | 2012
- 77
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Fixtureless inspection of deformable parts using partial capturesJaramillo, Andrés / Prieto, Flavio / Boulanger, Pierre et al. | 2012
- 85
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Precision robotic deburring based on force control for arbitrarily shaped workpiece using CAD model matchingSong, Hee-Chan / Song, Jae-Bok et al. | 2012
- 93
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Design of roll profile in shape rolling of an irregular angle bar by the modified butterfly methodLee, Sang-Jin / Kim, Sung-Min / Ko, Dae-Cheol / Kim, Byung-Min et al. | 2012
- 103
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Wafer-to-wafer process fault detection using data stream mining techniquesKo, Jong Myoung / Hong, Seong Rok / Choi, Ja Young / Kim, Chang Ouk et al. | 2012
- 115
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Swarm intelligence topology optimization based on artificial bee colony algorithmPark, Ji-Yong / Han, Seog-Young et al. | 2012
- 123
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Effect of crowning on differential pinion shaft contact in the partial elasto-hydrodynamic lubricationPark, Young-Whan / Kim, Dong-Won / Kim, Tae-Wan et al. | 2012
- 129
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Structural behavior evaluation of T-joints of the composite bogie frame under bendingLee, Woo Geun / Kim, Jung Seok / Yoon, Hyuk Jin / Shin, Kwang Bok / Seo, Sung Il et al. | 2012
- 137
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An inverse algorithm of nonlinear load-displacement for a slotted disc spring geometric designFawazi, Noor / Yang, In-Hyung / Kim, Jin-Su / Lee, Jung-Youn / Kim, Heung-Seob / Oh, Jae-Eung et al. | 2012
- 147
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A stitching algorithm for measuring large areas using scanning electron microscopesHong, Won-Pyo / Lee, Seok-Woo / Choi, Hon-Zong et al. | 2012
- 153
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Dynamic modeling and analysis of a wind turbine drivetrain using the torsional dynamic modelShi, Wei / Kim, Chang-Wan / Chung, Chin-Wha / Park, Hyun-Chul et al. | 2012
- 161
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Effect of Al content on structure and properties of Ti1−xAlxN hard film prepared by multi-arc ion platingLu, Long / Feng, Guangguang / Ren, Minghao / Zhang, Huixia / Lyu, Sungki et al. | 2012
- 165
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A novel high speed/high precision ball screwXu, Zhe-Zhu / Liu, Xiao-Jing / Choi, Chong-Hun / Lyu, Sung-Ki et al. | 2012
- 169
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Erratum to: Graphite Foil Based Assembled Bipolar Plates for Polymer Electrolyte Fuel CellsJi, Sanghoon / Hwang, Yong-Sheen / Park, Taehyun / Lee, Yoon Ho / Paek, Jun Yeol / Chang, Ikwhang / Lee, Min Hwan / Cha, Suk Won et al. | 2012