Synergetic effect of H2O2 and glycine on cobalt CMP in weakly alkaline slurry (English)
- New search for: Jiang, L.
- New search for: He, Y.
- New search for: Li, Y.
- New search for: Luo, J.
- New search for: Jiang, L.
- New search for: He, Y.
- New search for: Li, Y.
- New search for: Luo, J.
In:
MICROELECTRONIC ENGINEERING
;
122
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82-86
;
2014
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ISSN:
- Article (Journal) / Print
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Title:Synergetic effect of H2O2 and glycine on cobalt CMP in weakly alkaline slurry
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Contributors:
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Published in:MICROELECTRONIC ENGINEERING ; 122 ; 82-86
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Publisher:
- New search for: Elsevier Science B.V., Amsterdam.
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Publication date:2014-01-01
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Size:5 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 621.381
- Further information on Dewey Decimal Classification
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Classification:
DDC: 621.381 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 122
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Atomic-layer-deposited SiO2/TiO2/SiO2 sandwiched dielectrics for metal–insulator–metal capacitor applicationZhang, Qiu-Xiang / Zhu, Bao / Zhang, Li-Feng / Ding, Shi-Jin et al. | 2014
- 5
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The electron scattering at grain boundaries in tungsten filmsChoi, Dooho et al. | 2014
- 9
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Microfabrication of surface acoustic wave device using UV LED photolithography techniqueBing, Chu Yih / Mohanan, Ajay Achath / Saha, Tridib / Nagasundara Ramanan, Ramakrishnan / Parthiban, R. / Ramakrishnan, N. et al. | 2014
- 13
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X-ray source downscaling enabled by combining microfabricated electrodes with carbon nanotube cold electron emittersKottler, Christian / Longtin, Rémi / Giudice, Sandra / Jose-James, Rony / Niedermann, Philippe / Neels, Antonia / Kaufmann, Rolf / Sanchez-Valencia, Juan Ramon / Elsener, Hans Rudolf / Gröning, Oliver et al. | 2014
- 20
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A metal-embedded photo-mask for contact photolithography with application on patterned sapphire substrateYan, Jhih-Nan / Chang, Cho-Wei / Lee, Yung-Chun et al. | 2014
- 25
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In-line through silicon vias etching depths inspection by spectroscopic reflectometryFursenko, O. / Bauer, J. / Marschmeyer, S. et al. | 2014
- 29
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Improved LDMOS performance with buried multi-finger gatesXu, Dawei / Cheng, Xinhong / Yu, Yuehui / Wang, Zhongjian / Cao, Duo / Xia, Chao / Liu, Linjie / Trellenkamp, Stefan / Mantl, Siegfried / Zhao, Qing-Tai et al. | 2014
- 33
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Characterization of non-amine-based post-copper chemical mechanical planarization cleaning solutionManivannan, Ramachandran / Cho, Byoung-Jun / Hailin, Xiong / Ramanathan, Srinivasan / Park, Jin-Goo et al. | 2014
- 40
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Crystallite size estimation and photosensitivity characterization of nanocrystalline Zn1− xCdxS (0⩽ x ⩽0.9) based heterojunctions prepared by simple dip-coatingAbdel Rafea, M. / Farag, A.A.M. / El-Shazly, O. / El-Wahidy, E.F. / Roushdy, N. et al. | 2014
- 46
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Experimental investigation of electromigration failure in Cu–Sn–Cu micropads in 3D integrated circuitsHuang, Zhihong / Jones, Robert E. / Jain, Ankur et al. | 2014
- 52
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Study of microstructure evolution in novel Sn–Zn/Cu bi-layer and Cu/Sn–Zn/Cu sandwich structures with nanoscale thickness for 3D packaging interconnectionLi, Qingqian / Chan, Y.C. / Zhang, Kaili / Yung, K.C. et al. | 2014
- 59
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Structural, morphological and ac conductivity study of PrFe0.5Ni0.5O3 thin filmMir, Feroz A. et al. | 2014
- 64
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Study on applying a flexibility-assisted array air bag imprinting processing technology in the development of linear gradient imprinting and simulating an asymmetric imprinting planeWeng, Yung-Jin / Weng, Yung-Chun et al. | 2014
- 70
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Organic solvent-free water-developable sugar resist material derived from biomass in green lithographyTakei, Satoshi / Oshima, Akihiro / Ichikawa, Takumi / Sekiguchi, Atsushi / Kashiwakura, Miki / Kozawa, Takahiro / Tagawa, Seiichi / Oyama, Tomoko G. / Ito, Syoji / Miyasaka, Hiroshi et al. | 2014
- 77
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Scanning Spreading Resistance Microscopy analysis of locally blocked implant sitesDoering, Stefan / Wachowiak, Andre / Winkler, Uwe / Richter, Matthias / Goehler, Jens / Roetz, Hagen / Eckl, Stefan / Mikolajick, Thomas et al. | 2014
- 82
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Synergetic effect of H2O2 and glycine on cobalt CMP in weakly alkaline slurryJiang, Liang / He, Yongyong / Li, Yan / Li, Yuzhuo / Luo, Jianbin et al. | 2014
- IFC
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Inside Front Cover - Editorial Board| 2014