High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution (English)
- New search for: Okazaki, S.
- New search for: Okazaki, S.
In:
MICROELECTRONIC ENGINEERING
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133
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23-35
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2015
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ISSN:
- Article (Journal) / Print
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Title:High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolution
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Contributors:Okazaki, S. ( author )
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Published in:MICROELECTRONIC ENGINEERING ; 133 ; 23-35
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Publisher:
- New search for: Elsevier Science B.V., Amsterdam.
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Publication date:2015-01-01
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Size:13 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 621.381
- Further information on Dewey Decimal Classification
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Classification:
DDC: 621.381 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 133
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor applicationAriffin, Nur Hamizah Zainal / Yahaya, Hafizal / Shinano, Shunji / Tanaka, Satoru / Hashim, Abdul Manaf et al. | 2014
- 6
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Effects of carbon pre-germanidation implant into Ge on the thermal stability of NiGe filmsLiu, Qingbo / Wang, Guilei / Guo, Yiluan / Ke, Xingxing / Radamson, Henry / Liu, Hong / Zhao, Chao / Luo, Jun et al. | 2014
- 11
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Ordered-standing nickel hydroxide microchannel arrays: Synthesis and application for highly sensitive non-enzymatic glucose sensorsMiao, Fengjuan / Tao, Bairui / Chu, Paul K. et al. | 2014
- 16
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Study on resist performance of chemically amplified molecular resists based on cyclic oligomersYamamoto, Hiroki / Kudo, Hiroto / Kozawa, Takahiro et al. | 2014
- 23
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High resolution optical lithography or high throughput electron beam lithography: The technical struggle from the micro to the nano-fabrication evolutionOkazaki, Shinji et al. | 2014
- 36
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Electrical impedance, electrochemistry, mechanical stiffness, and hardness tunability in glassy carbon MEMS μECoG electrodesKassegne, Sam / Vomero, Maria / Gavuglio, Roberto / Hirabayashi, Mieko / Özyilmaz, Emre / Nguyen, Sebastien / Rodriguez, Jesus / Özyilmaz, Eda / van Niekerk, Pieter / Khosla, Ajit et al. | 2014
- 45
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Characterization of stable and transient cavitation in megasonically irradiated aqueous solutionsBalachandran, Rajesh / Zhao, Mingrui / Yam, Petrie / Zanelli, Claudio / Keswani, Manish et al. | 2014
- 51
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A plasma processing combined with trench isolation technology for large opening of parylene based high-aspect-ratio microstructuresKuo, Wen-Cheng / Liu, Chih-Ming et al. | 2014
- 59
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Study of conductivity switching mechanism of CdSe/PVP nanocomposite for memory device applicationKaur, Ramneek / Tripathi, S.K. et al. | 2014
- 66
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Realization and characterization of surface micromachined tunable band stop CSRR filter using MEMS bridges on silicon substratePradhan, Buddhadev / Gupta, Bhaskar et al. | 2014
- 73
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AFM study of charging of the Au–n-GaAs contactShmargunov, A.V. / Bozhkov, V.G. / Novikov, V.A. et al. | 2014
- 78
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Dependency analysis of line edge roughness in electron-beam lithographyZhao, X. / Lee, S.-Y. / Choi, J. / Lee, S.-H. / Shin, I.-K. / Jeon, C.-U. / Kim, B.-G. / Cho, H.-K. et al. | 2014
- 88
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Enhancement of the charge trapping performances with HfAlO composite oxide thin films in SONOS-type nonvolatile memoryLan, Xuexin / Gong, Changjie / Ou, Xin / Cao, Yanqiang / Sun, Chong / Chen, Yan / Xu, Bo / Xia, Yidong / Li, Aidong / Yin, Jiang et al. | 2014
- 92
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Multilayer thin film capacitors by selective etching of Pt and Ru electrodesHamm, Steven C. / Currano, Luke / Gangopadhyay, Shubhra et al. | 2014
- 98
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Fabrication of nanostep for total internal reflection fluorescence microscopy to calibrate in waterUnno, Noriyuki / Maeda, Asao / Satake, Shin-ichi / Tsuji, Takahiro / Taniguchi, Jun et al. | 2014
- 104
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Hot embossing and mechanical punching of biodegradable microcontainers for oral drug deliveryPetersen, Ritika Singh / Mahshid, Rasoul / Andersen, Nis Korsgaard / Keller, Stephan Sylvest / Hansen, Hans Nørgaard / Boisen, Anja et al. | 2014
- 110
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Schottky barrier height engineering of Al contacts on Si by embedded Au nanoparticlesGorji, Mohammad Saleh / Razak, Khairunisak Abdul / Cheong, Kuan Yew et al. | 2014
- 120
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Two dimensional simulation and modeling of the electrical characteristics of the a-SiC/c-Si(p) based, thyristor-like, switchesDimitriadis, E.I. / Archontas, N. / Girginoudi, D. / Georgoulas, N. et al. | 2014
- 129
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Nanometer scale patterning of GaN using nanoimprint lithography and Inductively Coupled Plasma etchingEkielski, M. / Juchniewicz, M. / Płuska, M. / Wzorek, M. / Kamińska, E. / Piotrowska, A. et al. | 2014
- 134
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Innovative UV nanoimprint lithography using a condensable alternative chlorofluorocarbon atmosphereMatsui, Shinji / Hiroshima, Hiroshi / Hirai, Yoshihiko / Nakagawa, Masaru et al. | 2014
- IFC
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Inside Front Cover - Editorial Board| 2015