Monolithic integrated system with an electrowetting-on-dielectric actuator and a film-bulk-acoustic-resonator sensor (English)
- New search for: Zhang, M.
- New search for: Cui, W.
- New search for: Chen, X.
- New search for: Wang, C.
- New search for: Pang, W.
- New search for: Duan, X.
- New search for: Zhang, D.
- New search for: Zhang, H.
- New search for: Zhang, M.
- New search for: Cui, W.
- New search for: Chen, X.
- New search for: Wang, C.
- New search for: Pang, W.
- New search for: Duan, X.
- New search for: Zhang, D.
- New search for: Zhang, H.
In:
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
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25
, 2
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025002
;
2015
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ISSN:
- Article (Journal) / Print
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Title:Monolithic integrated system with an electrowetting-on-dielectric actuator and a film-bulk-acoustic-resonator sensor
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Contributors:
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Published in:JOURNAL OF MICROMECHANICS AND MICROENGINEERING ; 25, 2 ; 025002
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Publisher:
- New search for: Institute of Physics Publishing
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Publication date:2015-01-01
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Size:25002 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 620
- Further information on Dewey Decimal Classification
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Classification:
DDC: 620 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 25, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 023001
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State of the art in acoustic energy harvestingFarid Ullah Khan / Izhar et al. | 2015
- 025001
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Nanoporous anodic aluminum oxide as a promising material for the electrostatically-controlled thin film interference filterPei-Hsuan Lo / Guo-Lun Luo / Chih-Chun Lee / Weileun Fang et al. | 2015
- 025002
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Monolithic integrated system with an electrowetting-on-dielectric actuator and a film-bulk-acoustic-resonator sensorMenglun Zhang / Weiwei Cui / Xuejiao Chen / Chao Wang / Wei Pang / Xuexin Duan / Daihua Zhang / Hao Zhang et al. | 2015
- 025003
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Post-CMOS compatible high-throughput fabrication of AlN-based piezoelectric microcantileversA Pérez-Campos / G F Iriarte / J Hernando-Garcia / F Calle et al. | 2015
- 025004
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Highly responsive core-shell microactuator arrays for use in viscous and viscoelastic fluidsBriana L Fiser / Adam R Shields / M R Falvo / R Superfine et al. | 2015
- 025005
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Solvent-transfer assisted photolithography of high-density and high-aspect-ratio superhydrophobic micropillar arraysShaolin Zhou / Mingjun Hu / Qiuquan Guo / Xiaobing Cai / Xiangmin Xu / Jun Yang et al. | 2015
- 025006
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An integrated photocatalytic microfluidic platform enabling total phosphorus digestionJianhua Tong / Tian Dong / Chao Bian / Minrui Wang / Fangfang Wang / Yin Bai / Shanhong Xia et al. | 2015
- 025007
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High precision cell slicing by harmonically actuated ultra-sharp SixNy bladesHwapyeong Jeong / Tao Li / Yogesh B Gianchandani / Jaesung Park et al. | 2015
- 025008
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Wafer level fabrication of single cell dispenser chips with integrated electrodes for particle detectionJonas Schoendube / Azmi Yusof / Kiril Kalkandjiev / Roland Zengerle / Peter Koltay et al. | 2015
- 025009
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A novel MEMS actuator with large lateral stroke driven by Lorentz forceXingdong Lv / Weiwei Wei / Xu Mao / Jinling Yang / Fuhua Yang et al. | 2015
- 025010
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A basic experimental study of ultrasonic assisted hot embossing process for rapid fabrication of microlens arraysChih-Yuan Chang / Che-Hao Yu et al. | 2015
- 025011
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PolyMUMPs MEMS device to measure mechanical stiffness of single cells in aqueous mediaS Warnat / H King / C Forbrigger / T Hubbard et al. | 2015
- 025012
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Miniature large range multi-axis force-torque sensor for biomechanical applicationsR A Brookhuis / R G P Sanders / K Ma / T S J Lammerink / M J de Boer / G J M Krijnen / R J Wiegerink et al. | 2015
- 025013
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Dense vertical SU-8 microneedles drawn from a heated mold with precisely controlled volumeZhuolin Xiang / Hao Wang / Suresh Kanna Murugappan / Shih-Cheng Yen / Giorgia Pastorin / Chengkuo Lee et al. | 2015
- 025014
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Determining the thermal expansion coefficient of thin films for a CMOS MEMS process using test cantileversChao-Lin Cheng / Ming-Han Tsai / Weileun Fang et al. | 2015
- 025015
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Slip flow through a converging microchannel: experiments and 3D simulationsVijay Varade / Amit Agrawal / A M Pradeep et al. | 2015
- 025016
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Electrotactile display using microfabricated micro-needle arrayN Kitamura / J Chim / N Miki et al. | 2015
- 025017
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Fabrication of 3D nanostructures by multidirectional UV lithography and predictive structural modelingJungkwun Kim / Cheolbok Kim / Mark G Allen / Yong-Kyu ‘YK’ Yoon et al. | 2015
- 025018
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Construction of programmable interconnected 3D microfluidic networksPatrick R Hunziker / Marc P Wolf / Xueya Wang / Bei Zhang / Stephan Marsch / Georgette B Salieb-Beugelaar et al. | 2015
- 025019
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Pressure effects on the dissipative behavior of nanocrystalline diamond microelectromechanical resonatorsJ T Santos / T Holz / A J S Fernandes / F M Costa / V Chu / J P Conde et al. | 2015
- 027001
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Fabrication of a micro-hole array on metal foil by nanosecond pulsed laser beam machining using a cover plateKyoung Ho Ha / Se Won Lee / Janggil Kim / Won Young Jee / Chong Nam Chu et al. | 2015
- 027002
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Bidirectional inward migration of particles lagging behind a Poiseuille flow in a rectangular microchannel for 3D particle focusingYoung Won Kim / Jung Yul Yoo et al. | 2015
- 027003
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Internal passivation of Al-based microchannel devices by electrochemical anodizationPaul J Hymel / D S Guan / Yang Mu / W J Meng / Andrew C Meng et al. | 2015
- 027004
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Hemispherical coil electrically small antenna made by stretchable conductors printing and plastic thermoformingZhigang Wu / Magnus Jobs / Anders Rydberg / Klas Hjort et al. | 2015