Principles of lithography — 3rd ed (English)
- New search for: Levinson, Harry J.
- New search for: Society of Photo-optical Instrumentation Engineers
- New search for: Levinson, Harry J.
- New search for: Society of Photo-optical Instrumentation Engineers
2010
-
ISBN:
- Book / Electronic Resource
-
Title:Principles of lithography
-
Contributors:
-
Published in:Press monograph ; 198
-
Edition:3rd ed
-
Publisher:
- New search for: SPIE
-
Place of publication:Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA)
-
Publication date:2010
-
Size:1 Online-Ressource (xiii, 494 p)
-
Remarks:ill
Campusweiter Zugriff (Universität Hannover) - Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots.
"SPIE digital library"--Website
Includes bibliographical references
Restricted to subscribers or individual electronic text purchasers -
ISBN:
-
DOI:
-
Type of media:Book
-
Type of material:Electronic Resource
-
Language:English
- New search for: 621.3815/31
- Further information on Dewey Decimal Classification
-
Keywords:
-
Classification:
DDC: 621.3815/31 -
Source: