Handbook of microlithography, micromachining, and microfabrication : volume 1: microlithography (English)
- New search for: Society of Photo-optical Instrumentation Engineers
- New search for: Rai-Choudhury, P.
- New search for: Society of Photo-optical Instrumentation Engineers
1997
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ISBN:
- Book / Electronic Resource
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Title:Handbook of microlithography, micromachining, and microfabrication : volume 1: microlithography
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Additional title:Microlithography, micromachining, and microfabrication, volume 1, microlithography
Microlithography -
Contributors:Rai-Choudhury, P. ( editor ) / Society of Photo-optical Instrumentation Engineers ( publisher )
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Published in:SPIE Press monograph ; PM39
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Publisher:
- New search for: SPIE Optical Engineering Press
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Place of publication:Bellingham, Washington
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Publication date:1997
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Size:1 Online-Ressource (viii, 768 pages)
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Remarks:Campusweiter Zugriff (Universität Hannover) - Vervielfältigungen (z.B. Kopien, Downloads) sind nur von einzelnen Kapiteln oder Seiten und nur zum eigenen wissenschaftlichen Gebrauch erlaubt. Keine Weitergabe an Dritte. Kein systematisches Downloaden durch Robots.
"SPIE Digital Library."--Website. - Includes bibliographical references and index. - Restricted to subscribers or individual electronic text purchasers
Includes bibliographical references and index
Restricted to subscribers or individual electronic text purchasers -
ISBN:
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DOI:
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Type of media:Book
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Type of material:Electronic Resource
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Language:English
- New search for: 670
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Keywords:
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Classification:
DDC: 670 -
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