Wafers Particulate Reaching and Deposition onto Wafers (Japanese)
- New search for: Fujii, S.
- New search for: Xie, G.
- New search for: Kim, K. Y.
- New search for: Hayakawa, I.
- New search for: Fujii, S.
- New search for: Xie, G.
- New search for: Kim, K. Y.
- New search for: Hayakawa, I.
- Conference paper / Print
-
Title:Wafers Particulate Reaching and Deposition onto Wafers
-
Contributors:
-
Conference:Earozoru Kagaku, Gijutsu Kenkyū Tōronkai ; 6. ; 1988 ; Osaka
-
Published in:
-
Publisher:
- New search for: Earozoru Kenkyū Kyōgikai
-
Place of publication:Kyōto
-
Publication date:1988
-
Type of media:Conference paper
-
Type of material:Print
-
Language:Japanese
- New search for: 58.11
- Further information on Basic classification
-
Keywords:
-
Classification:
BKL: 58.11 Mechanische Verfahrenstechnik -
Source:
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 311
-
Observation of Kosa Aerosol by PIXE AnalysisFujimura, M. / Tanonaka, T. / Mizoguchi, T. et al. | 1988
-
Variation of Concentration of Atmospheric Aerosol Particles at the Center of TokyoMiura, K. / Sekikawa, T. et al. | 1988
-
Bipolar Diffusion Charging of High-Concentration Aerosol ParticlesAdachi, M. / Okuyama, K. / Kousaka, Y. et al. | 1988
-
Charging of Aerosol Particles by Photoelectric EffectSakamoto, K. / Togawa, M. / Fujii, T. / Shinozuka, S. et al. | 1988
-
Effect of Filter Structure on the Collection Performance of Air FiltersEmi, H. / Otani, Y. / Kanaoka, C. / Ando, S. / Yamamoto, T. / Mori, J. et al. | 1988
-
Trachea-Bronchus Divergence in Beagle Dog for Lung Depositior ModelKoizumi, A. / Yamada, Y. / Fukuda, S. / Iida, H. / Miyamoto, K. / Kurahashi, E. / Matsushita, Y. et al. | 1988
-
On the Acidity of Sulfate Aerosols in the Urban and Continental AtmosphereYamato, M. / Ono, A. / Ohata, T. / Ikegami, K. / Ida, H. et al. | 1988
-
Automatic Counting of Asbestos FibersMaehata, N. / Kaga, A. / Inoue, Y. / Yoshikawa, A. et al. | 1988
-
Volcanic Effect of El Chichon on Antarctic Stratospheric AerosolsIwasaka, Y. / Nomura, A. et al. | 1988
-
An Electrostatic Agglomeration Apparatus with Multi-electrodesWatanabe, T. et al. | 1988
-
Deposition of Ultrafine Aerosols in a Human Nasal CastYamada, Y. / Cheng, Y. S. / Yeh, H. C. / McClellan, R. O. / Swift, D. L. et al. | 1988
-
Vertical Distribution of Dimethylsulfide and Aerosol Phase Methanesulfonic AcidKoga, S. / Tanaka, H. et al. | 1988
-
Simultaneous and Instantaneous Measurement of the Shape, Size, Number Density and Location of Particles by Using the Multiplexed Matched Spatial FilterShimizu, I. et al. | 1988
-
Advanced Theory of Light Scattering. Application to Optical SizingGouesbet, G. et al. | 1988
-
A Numerical Simulation of Dust Behavior in Gas FlowsTsuzuki, K. et al. | 1988
-
On Influence of the Door Usage in Biological Clean Operating RoomFujii, S. / Im, T. B. et al. | 1988
-
Development. of a New Portable Laser Particle Counter and It's PerformanceTajima, N. / Jin, Y. / Sugimoto, K. / Sato, Y. et al. | 1988
-
Generation of Lead Fume by Evaporation-condensation Method and Shape of the Aerosol ParticlesTohno, S. / Takahashi, K. et al. | 1988
-
Tracing Airflow in Clean Rooms by means of C.A.T.S.Amir, B. / Sugita, N. / Hatta, Y. / Kozuka, A. et al. | 1988
-
A Model for Deposition of Aerosol Particles in Unidirectional Flow CleanroomsFujii, S. / Xie, G. / Kim, K. Y. et al. | 1988
-
Pulmonary Deposition in Rats Exposed to Fibrous Particles by InhalationTanaka, I. / Akiyama, T. et al. | 1988
-
Measurement of Tobacco. Smoke Particles by LAS-XIshii, I. / Kaneki, K. / Ishizu, Y. et al. | 1988
-
PIXE Analysis of Aerosol Particles - Preparation of Standard Samples and Calibration Test -Kasahara, M. / Tohno, S. / Takahashi, K. / Hirai, T. / Choi, K. C. et al. | 1988
-
New Application Method of Aerosol Therapy to E.N.T. DiseasesHyo, N. / Hyo, Y. / Wakuda, K. / Takano, H. et al. | 1988
-
Effects of the Exposure of Gaseous NO, and Water Droplets in which NO2 is Dissolved on Rat LungsUozumi, M. et al. | 1988
-
PROSPECT PRESENTATION: Stratospheric AerosolsTakagi, M. et al. | 1988
-
Identification of Trospheric Aerosol Particles by Laser Microprobe Mass SpectrometryInaba, T. / Yokozawa, H. / Kikuchi, T. / Furuya, K. / Yamato, M. / Iwasaka, Y. et al. | 1988
-
Study of End Effect on Rectangular Jet Virtual ImpactorGotou, K. / Matsuura, T. / Masuda, H. et al. | 1988
-
Wafers Particulate Reaching and Deposition onto WafersFujii, S. / Xie, G. / Kim, K. Y. / Hayakawa, I. et al. | 1988
-
Performance of High Efficiency Membrane Gas Filter for Ultrafine AerosolsKousaka, Y. / Okuyama, K. / Shimada, M. / Takii, Y. et al. | 1988
-
The Effect of Length and Diameter on Deposition of Fibrous Aerosol in Model Bifurcating TubesMyojo, T. et al. | 1988
-
Aerosol Yields from the Reactions of alpha- and beta-pinene with OzoneIzumi, K. / Fukuyama, T. et al. | 1988
-
Development of a New Method for Measuring Droplet Size Distribution by Use of a Hot-film AnemometerOzaki, Y. / Utiyama, M. / Fukuyama, T. / Nakajima, M. et al. | 1988
-
Discussion on Calculation Technique of Liu-Kapadia's ChargingMurakami, T. / Yoshida, T. / Uyama, T. et al. | 1988
-
Effect of Wind Speed on PhotosynthesisYabuki, K. et al. | 1988
-
Inflammatory and Allergic Pathophysiology in Upper Airway and Aerosol TherapyOhyama, M. et al. | 1988
-
PROSPECT PRESENTATION: Comparative Study of Particulates and Gas on Lung EffectUozumi, M. et al. | 1988
-
Electric Potential Profile and Particle Deposition near a Surface Composed of Different Kinds of MaterialsYoshida, HN. / Kan, T. / Masuda, H. et al. | 1988
-
Characterization of Submicron Coal Fly Ash by Size-density SeparationMukai, K. / Kikuchi, T. / Furuya, K. et al. | 1988
-
Performance of Electrostatic Classifier for Ultrafine Aerosols below 0.02umYamada, X. / Miyamoto, K. / Koizumi, A. / Cheng, Y. S. / Yeh, H. C. / McClellan, R. O. et al. | 1988
-
Measurement of Asbestos Aerosols by MPS-3Homma, K. / Shirai, T. et al. | 1988
-
PROSPECT PRESENTATION: Observation and Measurement of the Behavior of Fluids and Particles in a Turbulent Flow by Visualization TechniquesSato, Y. et al. | 1988
-
Deposition of Aerosol Particles in a Laminar Flow FieldShimada, M. / Okuyama, K. / Kousaka, Y. et al. | 1988
-
Measurement of Size Distribution for Naturally-occurring Radioactive Aerosol Using Diffusion Battery and Andersen Sampler Methods in KURShimo, M. / Yamasaki, K. et al. | 1988
-
PROSPECT PRESENTATION: Air Cleanliness in Clean Room and Deposition of ParticlesOkada, T. et al. | 1988
-
Basic Study on Aerosolization of the Interferon II. Comparison among Several Aerosol InhalersKita, M. / Hasegawa, K. / Sato, Y. et al. | 1988
-
Mixing and Deposition of Submicron. Particles in a Model of Alveolated AirwayOtani, X. / Emi, H. / Tanaka, T. et al. | 1988
-
The Multiple Thin Films Method - I. for Simultaneous Detection of Sulfuric Acid Sulfate and Nitrate ParticlesQian, G. W. / Yamato, M. / Ono, A. / Ishizaka, Y. / Tanaka, H. et al. | 1988
-
Spatial Structure of Aerosols Related to the Fluctuation of Particle ConcentrationsTakano, X. / Kagawa, H. / Kinnou, Y. et al. | 1988
-
Aerosol Deposition due to Electrostatic Forces in Clean Rooms Takasago Thermal Engineering Co., Ltd.Sakata, S. / Chirifu, S. / Inoue, M. / Yoshida, T. / Okada, T. et al. | 1988
-
Development of the Experimental System for the Inhalation of the Monodisperse AerosolSato, Y. / Itho, H. et al. | 1988
-
Light-scattering by Polystyrene Doublets - Measurement of Angular DependenceNakajima, M. / Mizuochi, M. / Ozaki, Y. / Utiyama, M. / Fukuyama, T. et al. | 1988
-
Determination of the Correct Number of Polystyrene Particles in Pure WaterKatsuta, T. / Fukai, Y. / Aotani, S. et al. | 1988
-
Measurement of Mist Size Distribution Using Heated Nichrome PlateYoshiyama, H. / Tamori, I. / Ueda, H. et al. | 1988
-
Sulfuric Acid Particles as Background Aerosols over Oceans in Southern Hemisphere and Surrounding AntarcticaYamato, M. / Iwasaka, Y. / Qian, G. W. / Ono, A. / Yamanouchi, T. / Aoki, S. / Nishio, F. / Fukabori, M. et al. | 1988
-
Manipulation of Small Particles by Radiation PressureShimizu, I. et al. | 1988
-
Studies on Cross-Sensitivity Error for Particle CounterAkiyama, T. / Kimura, M. et al. | 1988