Materials science in semiconductor processing (English)
1.1998 - 16.2013; Vol. 17.2014 -
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ISSN:
- Journal / Electronic Resource
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Holding:lizenziert: 1.1998 - 152.2022
lizenziert: 153.2023 -
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Title:Materials science in semiconductor processing
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Publisher:
- New search for: Elsevier Science
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Place of publication:Amsterdam [u.a.]
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Course of appearance:1.1998 - 16.2013; Vol. 17.2014 -
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Size:Online-Ressource
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Remarks:Gesehen am 11.05.23
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ISSN:
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ZDBID:
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Type of media:Journal
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Type of material:Electronic Resource
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Language:English
- New search for: 53.56
- Further information on Basic classification
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Keywords:
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Classification:
BKL: 53.56 Halbleitertechnologie -
Holding:lizenziert: 1.1998 - 152.2022
lizenziert: 153.2023 - -
Source: