Cleaning technology in semiconductor device manufacturing 1989 - 2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1 - 10 (English)
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- New search for: Ruzyllo, Jerzy
- New search for: Electrochemical Society, Electronics and Photonics Division
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2007
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ISBN:
- Conference Proceedings / Storage medium
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Title:Cleaning technology in semiconductor device manufacturing 1989 - 2007 : proceedings from the ECS Semiconductor Cleaning Symposia 1 - 10
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Contributors:
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Publisher:
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Place of publication:Pennington, NJ
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Publication date:2007
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Size:1 CD-ROM
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Remarks:12 cm
Die Vorlage enth. insgesamt 10 Kongresse. - Die einzelnen Kongresse sind parallel auch als Buch-Ausg. vorh. -
ISBN:
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Type of media:Conference Proceedings
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Type of material:Storage medium
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Language:English
- New search for: 53.56
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- New search for: 621.38152
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The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Cleaning technology in semiconductor device manufacturing : proceedings of the seventh international symposium| 2002
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Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing| 1996
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Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing| 1994
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Semiconductor cleaning technology, 1989 : proceedings of the First International Symposium on Cleaning Technology in Semiconductor Device Manufacturing| 1990
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Cleaning and surface conditioning technology in semiconductor device manufacturing 10| 2007
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Cleaning technology in semiconductor device manufacturing IX| 2005
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Cleaning technology in semiconductor device manufacturing VIII| 2004
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Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium| 2000
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Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing| 1998
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Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing| 1992