Reactive ion beam etching of film and removal of sidewall redeposition (English)
- New search for: Wang, Xudi
- New search for: Liu, Ying
- New search for: Xu, Xiangdong
- New search for: Fu, Shaojun
- New search for: Cui, Zheng
- New search for: Wang, Xudi
- New search for: Liu, Ying
- New search for: Xu, Xiangdong
- New search for: Fu, Shaojun
- New search for: Cui, Zheng
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
24
, 4
;
1067-1072
;
2006
- Article (Journal) / Electronic Resource
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Title:Reactive ion beam etching of film and removal of sidewall redeposition
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Additional title:Reactive ion beam etching of film
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Contributors:Wang, Xudi ( author ) / Liu, Ying ( author ) / Xu, Xiangdong ( author ) / Fu, Shaojun ( author ) / Cui, Zheng ( author )
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Published in:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films ; 24, 4 ; 1067-1072
-
Publisher:
- New search for: American Vacuum Society
-
Publication date:2006-07-01
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Size:6 pages
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ISSN:
-
DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 24, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 895
-
Thermal conductivity of AIN-diamond particulate composite films on siliconJagannadham, K. et al. | 2006
- 895
-
Thermal conductivity of AlN-diamond particulate composite films on siliconJagannadham, K. et al. | 2006
- 900
-
Effects of remote plasma nitridation on the structural and electrical characteristics of the gate dielectrics grown using remote plasma atomic layer deposition methodsChoi, Jihoon / Kim, Seokhoon / Kim, Jinwoo / Kang, Hyunseok / Jeon, Hyeongtag / Bae, Choelhwyi et al. | 2006
- 908
-
Modeling of dc magnetron plasma for sputtering: Transport of sputtered copper atomsYagisawa, T. / Makabe, T. et al. | 2006
- 914
-
Investigation of room temperature electrical resistivities of LaNiO3-d thin films deposited by rf magnetron sputtering and high oxygen-pressure processingZhang, X.D. et al. | 2006
- 914
-
Investigation of room temperature electrical resistivities of LaNiO~3~-~d~e~l~t~a thin films deposited by rf magnetron sputtering and high oxygen-pressure processingZhang, X. D. / Meng, X. J. / Sun, J. L. / Wang, G. S. / Lin, T. / Chu, J. H. et al. | 2006
- 914
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Investigation of room temperature electrical resistivities of thin films deposited by rf magnetron sputtering and high oxygen-pressure processingZhang, X. D. / Meng, X. J. / Sun, J. L. / Wang, G. S. / Lin, T. / Chu, J. H. et al. | 2006
- 919
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X-ray photoelectron spectroscopy study of the nucleation processes and chemistry of CdS thin films deposited by sublimation on different solar cell substrate materialsEspinós, J. P. / Martín-Concepción, A. I. / Mansilla, C. / Yubero, F. / González-Elipe, A. R. et al. | 2006
- 929
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Phase separation of a alloy in the transition from an amorphous structure to crystalline structuresKim, YoungKuk / Park, S. A. / Baeck, J. H. / Noh, M. K. / Jeong, K. / Cho, M.-H. / Park, H. M. / Lee, M. K. / Jeong, E. J. / Ko, D.-H. et al. | 2006
- 934
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Hysteresis behavior during reactive magnetron sputtering of using a rotating cylindrical magnetronDepla, D. / Haemers, J. / Buyle, G. / De Gryse, R. et al. | 2006
- 939
-
Reactive vacuum vapor deposition of aluminum oxide thin films by an air-to-air metallizerKobayashi, T. / Itoh, Y. / Nakano, Y. / Hirai, E. / Hashimoto, R. / Kamikawa, S. et al. | 2006
- 946
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Process optimization for the sputter deposition of molybdenum thin films as electrode for AIN thin filmsMartin, F. et al. | 2006
- 946
-
Process optimization for the sputter deposition of molybdenum thin films as electrode for AlN thin filmsMartin, F. / Muralt, P. / Dubois, M.-A. et al. | 2006
- 953
-
Alternative method of using an electron beam for charge compensation during ultralow energy secondary-ion-mass spectroscopy experimentsGuzmán de la Mata, B. / Dowsett, M. G. / Morris, R. J. H. et al. | 2006
- 957
-
Effects of pulsing parameters on production and distribution of macroparticles in cathodic vacuum arc depositionHu, Yawei / Li, Liuhe / Dai, Hua / Li, Xiaoling / Cai, Xun / Chu, Paul K. et al. | 2006
- 962
-
Influence of layer thickness and compositional variations on the electrorefractive properties of a quantum well polarization-conversion modulatorRistic, Sasa / Jaeger, Nicolas A. F. et al. | 2006
- 966
-
Working pressure induced structural and mechanical properties of nanoscale multilayered coatingsLi, D. J. / Wang, M. X. / Zhang, J. J. / Yang, J. et al. | 2006
- 970
-
Low-voltage resistive switching of polycrystalline thin films grown on Si substrates by off-axis rf sputteringPark, Jae-Wan / Park, Jong-Wan / Yang, Min Kyu / Jung, Kyooho / Kim, Dal-Young / Lee, Jeon-Kook et al. | 2006
- 974
-
Effect of oxygen incorporation on structural and properties of Ti–Si–N nanocomposite coatings deposited by reactive unbalanced magnetron sputteringDing, X. Z. / Zeng, X. T. / Liu, Y. C. / Zhao, L. R. et al. | 2006
- 978
-
Direct observations of rapid diffusion of Cu in Au thin films using in situ x-ray diffractionElmer, J. W. / Palmer, T. A. / Specht, E. D. et al. | 2006
- 988
-
Type of precursor and synthesis of silicon oxycarbide thin films with a surfatron microwave oxygen/argon plasmaWalkiewicz-Pietrzykowska, Agnieszka / Espinós, J. P. / González-Elipe, Agustin R. et al. | 2006
- 995
-
Understanding ion-milling damage in epilayersWang, Changzhen / Smith, David J. / Tobin, Steve / Parodos, Themis / Zhao, Jun / Chang, Yong / Sivananthan, Sivalingam et al. | 2006
- 995
-
Understanding !on-milling damage in Hg1-xCdxTe epilayersWang, Changzhen et al. | 2006
- 1001
-
blue light emitting diodes with modulation-doped heterostructure layersChen, Chin-Hsiang et al. | 2006
- 1005
-
Tunable hydrophilicity on a hydrophobic fluorocarbon polymer coating on siliconKolari, K. / Hokkanen, A. et al. | 2006
- 1012
-
Plasma etching of proton-exchanged lithium niobateHu, H. / Milenin, A. P. / Wehrspohn, R. B. / Hermann, H. / Sohler, W. et al. | 2006
- 1016
-
Observations of electrical and luminescence anomalies in blue light-emitting diodesNee, Tzer-En / Wang, Jen-Cheng / Shen, Hui-Tang / Lin, Chung-Han / Wu, Ya-Fen et al. | 2006
- 1020
-
Layer structure of ultrathin Ag films onHo, H. Y. / Chen, Y. J. / Su, C. W. / Chen, R. H. / Shern, C. S. et al. | 2006
- 1024
-
Evaluation of the shapes of Auger- and secondary-electron line scans across interfaces with the logistic functionWight, S. A. / Powell, C. J. et al. | 2006
- 1031
-
Dependence of the electrical properties of the ZnO thin films grown by atomic layer epitaxy on the reactant feed sequenceLee, Chongmu / Lim, Jongmin et al. | 2006
- 1036
-
Spectroellipsometric analysis of plasma-polymerized fluorocarbon filmsEaswarakhanthan, T. / Beyssen, D. / Le Brizoual, L. / Bougdira, J. et al. | 2006
- 1044
-
Characterization of a methyl radical source for ultrahigh vacuum thin film growth studiesGold, J. S. / Lannon, J. M. / Ziemer, K. S. / Guntu, M. / Tolani, V. L. / Stinespring, C. D. et al. | 2006
- 1051
-
Effect of thermal annealing on the metastable optical properties of GaN thin filmsChang, Y. C. / Kolbas, R. M. / Reitmeier, Z. J. / Davis, R. F. et al. | 2006
- 1055
-
Low energy focused ion beam system designRauscher, Michael / Plies, Erich et al. | 2006
- 1067
-
Reactive ion beam etching of film and removal of sidewall redepositionWang, Xudi / Liu, Ying / Xu, Xiangdong / Fu, Shaojun / Cui, Zheng et al. | 2006
- 1073
-
Oxidation threshold in silicon etching at cryogenic temperaturesTillocher, T. / Dussart, R. / Mellhaoui, X. / Lefaucheux, P. / Maaza, N. Mekkakia / Ranson, P. / Boufnichel, M. / Overzet, L. J. et al. | 2006
- 1083
-
Evolution of film temperature during magnetron sputteringShaginyan, L. R. / Han, J. G. / Shaginyan, V. R. / Musil, J. et al. | 2006
- 1091
-
Stress evolution as a function of substrate bias in rf magnetron sputtered yttria-stabilized zirconia filmsPiascik, Jeffrey R. / Thompson, Jeffrey Y. / Bower, Christopher A. / Stoner, Brian R. et al. | 2006
- 1096
-
Gallium nitride thin films deposited by radio-frequency magnetron sputteringMaruyama, Toshiro / Miyake, Hidetomo et al. | 2006
- 1100
-
Integrated active transient thermography for rapid nondestructive analysis of sputtering target bond integrityWickersham, C. E. et al. | 2006
- 1107
-
Effect of grain orientation on tantalum magnetron sputtering yieldZhang, Z. / Kho, Ling / Wickersham, C. E. et al. | 2006
- 1112
-
Physical-vapor deposition flux-distribution calculations for static and rotating substrates: Derivation of the deposition geometry for optimal film-thickness uniformityTeeter, Glenn et al. | 2006
- 1119
-
Conceptual design of a deposition system for uniform and combinatorial synthesis of multinary thin-film materials via open-boat physical-vapor depositionTeeter, Glenn et al. | 2006
- 1128
-
Structural and electrochromic characterizations of pulsed laser deposited filmsYang, Dongfang et al. | 2006
- 1136
-
Extreme ultraviolet binary phase gratings: Fabrication and application to diffractive opticsSalmassi, F. / Naulleau, P. P. / Gullikson, E. M. / Olynick, D. L. / Liddle, J. A. et al. | 2006
- 1141
-
High efficiency SiO2-TiO2 hybrid sol-gel antireflective coating for infrared applicationsBrinley, E. et al. | 2006
- 1141
-
High efficiency hybrid sol-gel antireflective coating for infrared applicationsa)Brinley, E. / Seal, S. / Folks, R. / Braunstein, E. / Kramer, L. et al. | 2006
- 1147
-
Comment on “Nanoscale fatigue and fracture toughness measurement of multilayered thin film structures for digital micromirror devices” [J. Vac. Sci. Technol. A 22, 1397 (2004)]Malzbender, Jürgen et al. | 2006
- 1147
-
Brief Reports and Comments - Comment on "Nanoscale fatigue and fracture toughness measurement of multilayered thin film structures for digital micromirror devices" (J. Vac. Sci. Technol. A 22, 1397 (2004))Malzbender, Jürgen et al. | 2006
- 1148
-
Brief Reports and Comments - Performance of a hot-cathode-ionization-gauge head with correcting electrode and shield tube, operated with an automated-pressure-compensating circuit in a synchrotron radiation environmentSaeki, Hiroshi et al. | 2006
- 1148
-
Performance of a hot-cathode-ionization-gauge head with correcting electrode and shield tube, operated with an automated-pressure-compensating circuit in a synchrotron radiation environmentSaeki, Hiroshi / Magome, Tamotsu / Shoji, Yoshihiko et al. | 2006
- 1151
-
Erratum: “Surface roughness in XeF etching of a-Si∕c-Si(100) [J. Vac. Sci. Technol. A 23, 126 (2005)]”a)Stevens, A. A. E. / Beijerinck, H. C. W. et al. | 2006
- 1151
-
Erratum: "Surface roughness in XeF2 etching of a-Si-c-Si(100) (J. Vac. Sci. Technol. A 23, 126 (2005))"Stevens, A.A.E. et al. | 2006
- 1154
-
Papers from the 52nd International Symposium of AVS - Preface| 2006
- 1156
-
Effect of nitrogen on the photocatalytic activity of thin filmsPrabakar, K. / Takahashi, T. / Nezuka, T. / Nakashima, T. / Kubota, Y. / Fujishima, A. et al. | 2006
- 1156
-
Papers from the 52nd International Symposium of AVS - Applied Surface Science - Effect of nitrogen on the photocatalytic activity of TiOxNy thin filmsPrabakar, K. et al. | 2006
- 1161
-
Sputtering pressure dependent photocatalytic properties of thin filmsTakahashi, T. / Prabakar, K. / Nezuka, T. / Yamazaki, T. / Nakashima, T. / Kubota, Y. / Fujishima, A. et al. | 2006
- 1161
-
Papers from the 52nd International Symposium of AVS - Nanometer-Scale Science and Technology II - Sputtering pressure dependent photocatalytic properties of TiO2 thin filmsTakahashi, T. et al. | 2006
- 1166
-
Role of low-level impurities and intercalated molecular gases in the alpha particle radiolysis of polytetrafluoroethylene examined by static time-of-flight secondary-ion-mass spectrometeryFisher, G. L. / Szakal, C. / Wetteland, C. J. / Winograd, N. et al. | 2006
- 1166
-
Papers from the 52nd International Symposium of AVS - Nanometer-Scale Science and Technology II - Role of low-level impurities and intercalated molecular gases in the a particle radiolysis of polytetrafluoroethylene examined by static time-of-flight secondary-ion-mass spectrometeryFisher, Gregory L. et al. | 2006
- 1166
-
Role of low-level impurities and intercalated molecular gases in the particle radiolysis of polytetrafluoroethylene examined by static time-of-flight secondary-ion-mass spectrometeryFisher, Gregory L. / Szakal, Christopher / Wetteland, Christopher J. / Winograd, Nicholas et al. | 2006
- 1172
-
Time-of-flight secondary ion mass spectrometry measurements of a fluorocarbon-based self-assembled monolayer on SiOhlhausen, J. A. / Zavadil, K. R. et al. | 2006
- 1172
-
Papers from the 52nd International Symposium of AVS - Nanometer-Scale Science and Technology II - Time-of-flight secondary ion mass spectrometry measurements of a fluorocarbon-based self-assembled monolayer on SiOhlhausen, J.A. et al. | 2006
- 1179
-
Papers from the 52nd International Symposium of AVS - Nanometer-Scale Science and Technology II - Thin oxide-free phosphate films of composition formed on the surface of vanadium metal and characterized by x-ray photoelectron spectroscopyAsunskis, D.J. et al. | 2006
- 1179
-
Thin oxide-free phosphate films of composition formed on the surface of vanadium metal and characterized by x-ray photoelectron spectroscopyAsunskis, D. J. / Sherwood, P. M. A. et al. | 2006
- 1185
-
Effect of probe tip size on atomic force microscopy roughness values for very smooth samplesGondran, Carolyn F. H. / Michelson, Diane K. et al. | 2006
- 1185
-
Papers from the 52nd International Symposium of AVS - Nanometer-Scale Science and Technology II - Effect of probe tip size on atomic force microscopy roughness values for very smooth samplesGondran, Carolyn F.H. et al. | 2006
- 1191
-
Exploring the collective dynamics of lipid membranes with inelastic neutron scatteringRheinstadter, M. C. / Seydel, T. / Haussler, W. / Salditt, T. et al. | 2006
- 1191
-
Papers from the 52nd International Symposium of AVS - Biomaterial Interfaces - Exploring the collective dynamics of lipid membranes with inelastic neutron scatteringRheinstädter, Maikel C. et al. | 2006
- 1191
-
Exploring the collective dynamics of lipid membranes with inelastic neutron scatteringa)Rheinstädter, Maikel C. / Seydel, Tilo / Häußler, Wolfgang / Salditt, Tim et al. | 2006
- 1197
-
Surface modification of silicon and polydimethylsiloxane surfaces with vapor-phase-deposited ultrathin fluorosilane films for biomedical nanodevicesBhushan, Bharat / Hansford, Derek / Lee, Kang Kug et al. | 2006
- 1197
-
Papers from the 52nd International Symposium of AVS - Biomaterial Interfaces - Surface modification of silicon and polydimethylsiloxane surfaces with vapor-phase-deposited ultrathin fluorosilane films for biomedical nanodevicesBhushan, Bharat et al. | 2006
- 1203
-
Time-of-flight secondary ion mass spectrometry chemical imaging analysis of micropatterns of streptavidin and cells without labelingLee, Tae Geol / Shon, Hyun Kyong / Lee, Kyung-Bok / Kim, Jinmo / Choi, Insung S. / Moon, Dae Won et al. | 2006
- 1203
-
Papers from the 52nd International Symposium of AVS - Biomaterial Interfaces - Time-of-flight secondary ion mass spectrometry chemical imaging analysis of micropatterns of streptavidin and cells without labelingLee, Tae Geol et al. | 2006
- 1208
-
Metal organic chemical vapor deposition of thin films using the single precursor zirconium 3-methyl-3-pentoxide,Cho, Wontae / Jang, Hong Suk / An, Ki-Seok / Lee, Young Kuk / Chung, Taek-Mo / Kim, Chang Gyoun / Kim, Yunsoo / So, Byung-Soo / Hwang, Jin-Ha / Jung, Donggeun et al. | 2006
- 1208
-
Papers from the 52nd International Symposium of AVS - Electronc Materials and Devices - Metal organic chemical vapor deposition of ZrO2 thin films using the single precursor zirconium 3-methyl-3-pentoxide, Zr(mp)4Cho, Wontae et al. | 2006
- 1213
-
Unintentional doping and compensation effects of carbon in metal-organic chemical-vapor deposition fabricated ZnO thin filmsLi, Xiaonan / Asher, Sally E. / Limpijumnong, Sukit / Zhang, S. B. / Wei, Su-Huai / Barnes, Teresa M. / Coutts, Timothy J. / Noufi, Rommel et al. | 2006
- 1213
-
Papers from the 52nd International Symposium of AVS - Electronc Materials and Devices - Unintentional doping and compensation effects of carbon in metal-organic chemical-vapor deposition fabricated ZnO thin filmsLi, Xiaonan et al. | 2006
- 1218
-
Production of a hafnium silicate dielectric layer for use as a gate oxide by solid-state reactionJohnson-Steigelman, H. T. / Brinck, A. V. / Chang, J. P. / Lyman, P. F. et al. | 2006
- 1218
-
Papers from the 52nd International Symposium of AVS - Electronc Materials and Devices - Production of a hafnium silicate dielectric layer for use as a gate oxide by solid-state reactionJohnson-Steigelman, H.T. et al. | 2006
- 1223
-
Papers from the 52nd International Symposium of AVS - Electronc Materials and Devices - Effect of nitrogen contents on the temperature dependence of photoluminescence in InGaAsN-GaAs single quantum wellsLai, Fang-I. et al. | 2006
- 1223
-
Effect of nitrogen contents on the temperature dependence of photoluminescence in single quantum wellsLai, Fang-I / Kuo, S. Y. / Wang, J. S. / Kuo, H. C. / Wang, S. C. / Wang, H. S. / Liang, C. T. / Chen, Y. F. et al. | 2006
- 1228
-
Effect of poly (3-hexylthiophene) film thickness on organic thin film transistor propertiesJia, Huiping / Gowrisanker, Srinivas / Pant, Gaurang K. / Wallace, Robert M. / Gnade, Bruce E. et al. | 2006
- 1228
-
Papers from the 52nd International Symposium of AVS - Electronc Materials and Devices - Effect of poly (3-hexylthiophene) film thickness on organic thin film transistor propertiesJia, Huiping et al. | 2006
- 1233
-
Papers from the 52nd International Symposium of AVS - Electronic Materials and Processing I - Role of defects at nanoscale ZnO and Cu(In, Ga)Se2 semiconductor interfacesStrzhemechny, Y.M. et al. | 2006
- 1233
-
Role of defects at nanoscale ZnO and semiconductor interfacesStrzhemechny, Y. M. et al. | 2006
- 1238
-
Papers from the 52nd International Symposium of AVS - Electronic Materials and Processing I - Interstitial oxygen-related defects and current leakage in trench metal-oxide-semiconductor field-effect transistor on epi-As++ structureWang, Q. et al. | 2006
- 1238
-
Interstitial oxygen-related defects and current leakage in trench metal-oxide-semiconductor field-effect transistor on structureWang, Q. / Daggubati, Manmohan / Paravi, Hossein / Yu, Rong / Zhang, Xiao Feng et al. | 2006
- 1243
-
Papers from the 52nd International Symposium of AVS - Electronic Materials and Processing I - Effects of molecular environments on the electrical switching with memory of nitro-containing OPEsGergel-Hackett, N. et al. | 2006
- 1243
-
Effects of molecular environments on the electrical switching with memory of nitro-containing OPEsGergel-Hackett, N. / Majumdar, N. / Martin, Z. / Swami, N. / Harriott, L. R. / Bean, J. C. / Pattanaik, G. / Zangari, G / Zhu, Y. / Pu, I. et al. | 2006
- 1249
-
Modeling of self-assembled heterostructures: Quantum dot to quantum ring transformationFilikhin, I. / Vlahovic, B. / Deyneka, E. et al. | 2006
- 1249
-
Papers from the 52nd International Symposium of AVS - Electronic Materials and Processing II - Modeling of InAs-GaAs self-assembled heterostructures: Quantum dot to quantum ring transformationFilikhin, I. et al. | 2006
- 1252
-
Papers from the 52nd International Symposium of AVS - Applied Surface Science - Comparison of a dominant electron trap in n-type and p-type GaNAs using deep-level transient spectroscopyJohnston, S.W. et al. | 2006
- 1252
-
Comparison of a dominant electron trap in -type and -type GaNAs using deep-level transient spectroscopyJohnston, S. W. / Kurtz, S. R. et al. | 2006
- 1258
-
Surface characterization of human hair using tapping mode atomic force microscopy and measurement of conditioner thickness distributionLodge, Richard A. / Bhushan, Bharat et al. | 2006
- 1258
-
Papers from the 52nd International Symposium of AVS - MEMS and NEMS - Surface characterization of human hair using tapping mode atomic force microscopy and measurement of conditioner thickness distributionLodge, Richard A. et al. | 2006
- 1270
-
Papers from the 52nd International Symposium of AVS - MEMS and NEMS - Replication-based fabrication for an optical device that incorporates vertically curved structuresLee, M.W. et al. | 2006
- 1270
-
Replication-based fabrication for an optical device that incorporates vertically curved structuresLee, M. W. / Lim, K. J. / Choi, C. H. / Jo, S. B. / Lee, S. G. / Lee, E. H. / Park, S. G. / O, B. H. et al. | 2006
- 1277
-
Copper electroplating to fill blind vias for three-dimensional integrationSpiesshoefer, S. / Patel, J. / Lam, T. / Cai, L. / Polamreddy, S. / Figueroa, R. F. / Burkett, S. L. / Schaper, L. / Geil, R. / Rogers, B. et al. | 2006
- 1277
-
Papers from the 52nd International Symposium of AVS - MEMS and NEMS - Copper electroplating to fill blind vias for three-dimensional integrationSpiesshoefer, S. et al. | 2006
- 1283
-
Papers from the 52nd International Symposium of AVS - MEMS and NEMS - Aspect ratio dependent etching lag reduction in deep silicon etch processesLai, S.L. et al. | 2006
- 1283
-
Aspect ratio dependent etching lag reduction in deep silicon etch processesLai, S. L. / Johnson, D. / Westerman, R. et al. | 2006
- 1289
-
Dependence of power trench metal-oxide-semiconductor field-effect transistor processes on wafer thicknessDaggubati, M. / Sim, G. / Long, D. / Paravi, H. / Wang, Q. et al. | 2006
- 1289
-
Papers from the 52nd International Symposium of AVS - Manufacturing Science and Technology - Dependence of power trench metal-oxide-semiconductor field-effect transistor processes on wafer thicknessDaggubati, M. et al. | 2006
- 1293
-
Fabrication of high precision demultiplexer using embossing technique with thermal curable polymersChoi, C.-H. / Lee, M.-W. / O, B.-H. / Lee, S.-G. / Park, S.-G. / Lee, E.-H. et al. | 2006
- 1293
-
Papers from the 52nd International Symposium of AVS - Manufacturing Science and Technology - Fabrication of high precision demultiplexer using embossing technique with thermal curable polymersChoi, C.-H. et al. | 2006
- 1297
-
Effects of various oxidizers on chemical mechanical polishing performance of nickel for microelectromechanical system applicationsKim, Nam-Hoon / Choi, Gwon-Woo / Seo, Yong-Jin / Lee, Woo-Sun et al. | 2006
- 1297
-
Papers from the 52nd International Symposium of AVS - Manufacturing Science and Technology - Effects of various oxidizers on chemical mechanical polishing performance of nickel for microelectromechanical system applicationsKim, Nam-Hoon et al. | 2006
- 1302
-
Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamondHickey, D. P. / Kuryliw, E. / Siebein, K. / Jones, K. S. / Chodelka, R. / Elliman, R. et al. | 2006
- 1302
-
Papers from the 52nd International Symposium of AVS - Manufacturing Science and Technology - Cross-sectional transmission electron microscopy method and studies of implant damage in single crystal diamondHickey, D.P. et al. | 2006
- 1308
-
End-pointing chamber clean by calorimetric probing of process effluentChen, Ing-Shin / Neuner, Jeffrey W. / Welch, James J. / Chen, Philip S. H. / DiMeo, Frank et al. | 2006
- 1308
-
Papers from the 52nd International Symposium of AVS - Manufacturing Science and Technology - End-pointing chamber clean by calorimetric probing of process effluentChen, Ing-Shin et al. | 2006
- 1314
-
Synthesis and purification of single-walled carbon nanotubes by methane decomposition over iron-supported catalystsKim, Jong-Sik / Kim, Gwan-Ha / Kim, Chang-Il et al. | 2006
- 1314
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - Synthesis and purification of single-walled carbon nanotubes by methane decomposition over iron-supported catalystsKim, Jong-Sik et al. | 2006
- 1318
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - Growth of carbon nanotube bundle arrays on silicon surfacesBronikowski, Michael J. et al. | 2006
- 1318
-
Growth of carbon nanotube bundle arrays on silicon surfacesBronikowski, Michael J. / Manohara, Harish M. / Hunt, Brian D. et al. | 2006
- 1323
-
Temperature-induced control of aspect ratio of gold nanorodsPark, Hyung Ju / Ah, Chil Seong / Kim, Wan-Joong / Choi, Insung S. / Lee, Kwang-Pil / Yun, Wan Soo et al. | 2006
- 1323
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - Temperature-induced control of aspect ratio of gold nanorodsPark, Hyung Ju et al. | 2006
- 1327
-
Controlled gold nanoparticle assembly on DNA molecule as template for nanowire formationKim, Hyung Jin / Roh, Yonghan / Hong, Byungyou et al. | 2006
- 1327
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - Controlled gold nanoparticle assembly on DNA molecule as template for nanowire formationKim, Hyung Jin et al. | 2006
- 1332
-
Observation of strong red photoluminescence with broadband in indium oxynitride nanoparticlesKo, T. S. / Chu, C. P. / Chen, H. G. / Lu, T. C. / Kuo, H. C. / Wang, S. C. et al. | 2006
- 1332
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - Observation of strong red photoluminescence with broadband in indium oxynitride nanoparticlesKo, T.S. et al. | 2006
- 1336
-
Synthesis of Au nanotubes with nanowires as sacrificial templatesLu, M. Y. / Chang, Y. C. / Chen, L. J. et al. | 2006
- 1336
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - Synthesis of Au nanotubes with SiOx nanowires as sacrificial templatesLu, M.Y. et al. | 2006
- 1340
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - High-voltage parallel writing on iron nitride thin filmsFarkas, N. et al. | 2006
- 1340
-
High-voltage parallel writing on iron nitride thin filmsFarkas, N. / Ehrman, J. D. / Evans, E. A. / Ramsier, R. D. / Dagata, J. A. et al. | 2006
- 1344
-
Formation of large-area nanostructures on Si and Ge surfaces during low energy ion beam erosionZiberi, B. / Frost, F. / Rauschenbach, B. et al. | 2006
- 1344
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - Formation of large-area nanostructures on Si and Ge surfaces during low energy ion beam erosionZiberi, B. et al. | 2006
- 1349
-
Quantum-dot nanodevices with carbon nanotubesIshibashi, K. / Moriyama, S. / Tsuya, D. / Fuse, T. / Suzuki, M. et al. | 2006
- 1349
-
Papers from the 52nd International Symposium of AVS - Nanometer Structures - Quantum-dot nanodevices with carbon nanotubesIshibashi, K. et al. | 2006
- 1356
-
Optical activation of implanted impurities in ZnS nanowiresStichtenoth, D. / Schwen, D. / Müller, S. / Borchers, C. / Ronning, C. et al. | 2006
- 1356
-
Papers from the 52nd International Symposium of AVS - Nanometer-Scale Science and Technology II - Optical activation of implanted impurities in ZnS nanowiresStichtenoth, D. et al. | 2006
- 1360
-
Some aspects of dissipation mechanisms in chlorine containing capacitively coupled dischargesFranz, Gerhard et al. | 2006
- 1360
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Some aspects of dissipation mechanisms in chlorine containing capacitively coupled dischargesFranz, Gerhard et al. | 2006
- 1366
-
Particle-in-cell simulations of planar and cylindrical Langmuir probes: Floating potential and ion saturation currentIza, Felipe / Lee, Jae Koo et al. | 2006
- 1366
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Particle-in-cell simulations of planar and cylindrical Langmuir probes: Floating potential and ion saturation currentIza, Felipe et al. | 2006
- 1373
-
Dry etching of gate-stack structure in inductively coupled plasmasShin, M. H. / Park, M. S. / Lee, N.-E. / Kim, Jiyoung / Kim, Chung Ywong / Ahn, Jinho et al. | 2006
- 1373
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Dry etching of TaN-HfO2 gate-stack structure in BCl3-Ar-O2 inductively coupled plasmasShin, M.H. et al. | 2006
- 1380
-
Effects of addition on chemical dry etching of silicon oxide layers in remote plasmasHwang, J. Y. / Kim, D. J. / Lee, N.-E. / Jang, Y. C. / Bae, G. H. et al. | 2006
- 1380
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Effects of N2 addition on chemical dry etching of silicon oxide layers in F2-N2-Ar remote plasmasHwang, J.Y. et al. | 2006
- 1386
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Effect of different frequency combination on ArF photoresist deformation and silicon dioxide etching in the dual frequency superimposed capacitively coupled plasmasLee, C.H. et al. | 2006
- 1386
-
Effect of different frequency combination on ArF photoresist deformation and silicon dioxide etching in the dual frequency superimposed capacitively coupled plasmasLee, C. H. / Kim, D. H. / Lee, N.-E. / Kwon, G. C. et al. | 2006
- 1395
-
Surface etching mechanism of thin films using quadrupole mass spectroscopyKim, Jong-Gyu / Kim, Gwan-Ha / Kim, Chang-Il et al. | 2006
- 1395
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Surface etching mechanism of Bi4-xLaxTi3O12 thin films using quadrupole mass spectroscopyKim, Jong-Gyu et al. | 2006
- 1399
-
Etching characteristics of thin films in gas chemistryKim, Gwan-Ha / Kim, Chang-Il et al. | 2006
- 1399
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Etching characteristics of LaNiO3 thin films in BCl3-Ar gas chemistryKim, Gwan-Ha et al. | 2006
- 1404
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Wafer level microarcing model in 90 nm chemical-vapor deposition low-k via etch on 300 mm silicon-on-insulator substrateCong, Hai et al. | 2006
- 1404
-
Wafer level microarcing model in chemical-vapor deposition low- via etch on silicon-on-insulator substrateCong, Hai / Low, Chun Hui / Pradeep, Yelehanka Ramachandramurthy / Zhang, Xin / Chandima, Perera / Liu, Wu Ping / Tan, Juan Boon / Hsia, Liang Choo et al. | 2006
- 1410
-
Cold atmospheric plasma in nitrogen and air generated by the hybrid plasma sourceBaránková, H. / Bárdoš, L. / Söderström, D. et al. | 2006
- 1410
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Cold atmospheric plasma in nitrogen and air generated by the hybrid plasma sourceBaránková, H. et al. | 2006
- 1414
-
Damage-free metal-oxide-semiconductor gate electrode patterning on thin HfSiON film using neutral beam etchingNoda, Shuichi / Ozaki, Takuya / Samukawa, Seiji et al. | 2006
- 1414
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Damage-free metal-oxide-semiconductor gate electrode patterning on thin HfSiON film using neutral beam etchingNoda, Shuichi et al. | 2006
- 1421
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Characteristics of large-diameter plasma using a radial-line slot antennaTian, C. et al. | 2006
- 1421
-
Characteristics of large-diameter plasma using a radial-line slot antennaTian, C. / Nozawa, T. / Ishibasi, K. / Kameyama, H. / Morimoto, T. et al. | 2006
- 1425
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology - Application of the shaped electrode technique to a large area rectangular capacitively coupled plasma reactor to suppress standing wave nonuniformitySansonnens, L. et al. | 2006
- 1425
-
Application of the shaped electrode technique to a large area rectangular capacitively coupled plasma reactor to suppress standing wave nonuniformitySansonnens, L. / Schmidt, H. / Howling, A. A. / Hollenstein, Ch. / Ellert, Ch. / Buechel, A. et al. | 2006
- 1431
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology I - Mechanism for difference in etched depth between isolated and dense via holes of SiOCH filmMomonoi, Yoshinori et al. | 2006
- 1431
-
Mechanism for difference in etched depth between isolated and dense via holes of SiOCH filmMomonoi, Yoshinori / Yonekura, Kazumasa / Izawa, Masaru et al. | 2006
- 1441
-
Papers from the 52nd International Symposium of AVS - Surface Engineering - Reactive magnetron sputtering deposition and columnar growth of nc-TiC-a-C:H nanocomposite coatingsGalvan, D. et al. | 2006
- 1441
-
Reactive magnetron sputtering deposition and columnar growth of nanocomposite coatingsGalvan, D. / Pei, Y. T. / De Hosson, J. Th. M. et al. | 2006
- 1448
-
Papers from the 52nd International Symposium of AVS - Surface Engineering - Tribological behavior and thermal stability of TiC-a-C: H nanocomposite coatingsPei, Y.T. et al. | 2006
- 1448
-
Tribological behavior and thermal stability of nanocomposite coatingsPei, Y. T. / Galvan, D. / De Hosson, J. Th. M. et al. | 2006
- 1454
-
Hot electrons at metal-organic interface: Time-resolved two-photon photoemission study of phenol on Ag(111)Ryu, Sunmin / Chang, Jinyoung / Kwon, Hyuksang / Kim, Seong Keun et al. | 2006
- 1454
-
Papers from the 52nd International Symposium of AVS - Surface Science - Hot electrons at metal-organic interface: Time-resolved two-photon photoemission study of phenol on Ag(111)Ryu, Sunmin et al. | 2006
- 1460
-
Adsorption of sulfur dioxide on Zircaloy-4 atStojilovic, N. / Ehrman, J. D. / Ramsier, R. D. et al. | 2006
- 1460
-
Papers from the 52nd International Symposium of AVS - Surface Science - Adsorption of sulfur dioxide on Zircaloy-4 at 300 KStojilovic, N. et al. | 2006
- 1464
-
Surface and bulk electronic structures of Heusler-type Fe~2 VAIMiyazaki, H. / Soda, K. / Yagi, S. / Kato, M. / Takeuchi, T. / Mizutani, U. / Nishino, Y. et al. | 2006
- 1464
-
Surface and bulk electronic structures of Heusler-typeMiyazaki, Hidetoshi / Soda, Kazuo / Yagi, Sinya / Kato, Masahiko / Takeuchi, Tsunehiro / Mizutani, Uichiro / Nishino, Yoichi et al. | 2006
- 1464
-
Papers from the 52nd International Symposium of AVS - Surface Science - Surface and bulk electronic structures of Heusler-type Fe2VAlMiyazaki, Hidetoshi et al. | 2006
- 1468
-
Formation of nickel silicide and germanosilicide layers on Si(001), relaxed , and strained Si/relaxed and effect of postthermal annealingKo, J. H. / Jang, C. H. / Kim, S. H. / Song, Y.-J. / Lee, N. E. et al. | 2006
- 1468
-
Papers from the 52nd International Symposium of AVS - Surface Science - Formation of nickel silicide and germanosilicide layers on Si(001), relaxed SiGe-Si(001), and strained Si-relaxed SiGe-Si(001) and effect of postthermal annealingKo, J.H. et al. | 2006
- 1474
-
Papers from the 52nd International Symposium of AVS - Surface Science - Laser assisted and wet chemical etching of silicon nanostructuresKolasinski, Kurt W. et al. | 2006
- 1474
-
Laser assisted and wet chemical etching of silicon nanostructuresKolasinski, Kurt W. / Mills, David / Nahidi, Mona et al. | 2006
- 1480
-
Ostwald ripening of manganese silicide islands on Si(001)Krause, M. R. / Stollenwerk, A. / Licurse, M. / LaBella, V. P. et al. | 2006
- 1480
-
Papers from the 52nd International Symposium of AVS - Surface Science I - Ostwald ripening of manganese silicide islands on Si(001)Krause, M.R. et al. | 2006
- 1484
-
Papers from the 52nd International Symposium of AVS - Surface Science II - Effect of self-assembled monolayer film order on nanofrictionSambasivan, Sharadha et al. | 2006
- 1484
-
Effect of self-assembled monolayer film order on nanofrictionSambasivan, Sharadha / Hsieh, Shuchen / Fischer, Daniel A. / Hsu, Stephen M. et al. | 2006
- 1489
-
Irradiation effect of nitrogen ion beam on hydrogenated amorphous carbon filmsWatanabe, Yoshihisa / Katoh, Satoru / Kitazawa, Nobuaki et al. | 2006
- 1489
-
Papers from the 52nd International Symposium of AVS - Thin Films - Irradiation effect of nitrogen ion beam on hydrogenated amorphous carbon filmsWatanabe, Yoshihisa et al. | 2006
- 1494
-
Papers from the 52nd International Symposium of AVS - Thin Films - Fabrication of micropatterned mesoporous silica film on a flexible polymer substrate through pattern transfer and subsequent photocalcinationHozumi, Atsushi et al. | 2006
- 1494
-
Fabrication of micropatterned mesoporous silica film on a flexible polymer substrate through pattern transfer and subsequent photocalcinationHozumi, Atsushi / Kizuki, Takashi / Inagaki, Masahiko / Shirahata, Naoto et al. | 2006
- 1500
-
Papers from the 52nd International Symposium of AVS - Thin Films - X-ray photoemission spectroscopy and Fourier transform infrared characterizations of C60 states in C60 doped conducting polymersKato, H. et al. | 2006
- 1500
-
X-ray photoemission spectroscopy and Fourier transform infrared characterizations of C~6~0 states in C~6~0 doped conducting polymersKato, H. / Takemura, S. / Iwasaki, K. / Watanabe, Y. / Nanba, N. / Hiramatsu, T. / Nishikawa, O. / Taniguchi, M. et al. | 2006
- 1500
-
X-ray photoemission spectroscopy and Fourier transform infrared characterizations of states in doped conducting polymersa)Kato, H. / Takemura, S. / Iwasaki, K. / Watanabe, Y. / Nanba, N. / Hiramatsu, T. / Nishikawa, O. / Taniguchi, M. et al. | 2006
- 1505
-
X-ray photoemission spectroscopy characterization of electrochemical growth of conducting polymer on oxidized Si surfaceKato, H. / Takemura, S. / Takakuwa, N. / Ninomiya, K. / Watanabe, T. / Watanabe, Y. / Nanba, N. / Hiramatsu, T. et al. | 2006
- 1505
-
Papers from the 52nd International Symposium of AVS - Thin Films - X-ray photoemission spectroscopy characterization of electrochemical growth of conducting polymer on oxidized Si surfaceKato, H. et al. | 2006
- 1509
-
Fe(001) thin films for x-ray diffraction and terahertz emission studiesMeserole, C. A. / Fisher, G. L. / Hilton, D. J. / Jia, Q. X. / Averitt, R. D. / Funk, D. J. / Taylor, A. J. et al. | 2006
- 1509
-
Papers from the 52nd International Symposium of AVS - Thin Films - Fe(001) thin films for x-ray diffraction and terahertz emission studiesMeserole, C.A. et al. | 2006
- 1514
-
Effect of gas mixing ratio on thin film etching behavior in inductively coupled plasmaKim, Gwan-Ha / Kim, Chang-Il et al. | 2006
- 1514
-
Papers from the 52nd International Symposium of AVS - Thin Films - Effect Of Cl2-Ar gas mixing ratio on (Pb,Sr)TiO3 thin film etching behavior in inductively coupled plasmaKim, Gwan-Ha et al. | 2006
- 1518
-
Papers from the 52nd International Symposium of AVS - Thin Films - Thermochromic La1-xSrxMnO3 (x=0.1, 0.175, and 0.3) smart coatings grown by reactive pulsed laser depositionSoltani, M. et al. | 2006
- 1518
-
Thermochromic (, 0.175, and 0.3) smart coatings grown by reactive pulsed laser depositionSoltani, M. / Chaker, M. / Jiang, X. X. / Nikanpour, D. / Margot, J. et al. | 2006
- 1524
-
TiN and thin film preparation using hollow cathode sputtering with application to solar cellsGuo, S. Y. / Shafarman, W. N. / Delahoy, A. E. et al. | 2006
- 1524
-
Papers from the 52nd International Symposium of AVS - Thin Films - TiN and TiO2: Nb thin film preparation using hollow cathode sputtering with application to solar cellsGuo, S.Y. et al. | 2006
- 1530
-
Inhomogeneous rarefaction of the process gas in a direct current magnetron sputtering systemJimenez, F. / Ekpe, S. D. / Dew, S. K. et al. | 2006
- 1530
-
Papers from the 52nd International Symposium of AVS - Thin Films - Inhomogeneous rarefaction of the process gas in a direct current magnetron sputtering systemJimenez, F. et al. | 2006
- 1535
-
Characteristics of atomic layer deposited films and their photocatalytic activityPheamhom, Rodjana / Sunwoo, Changshin / Kim, Do-Heyoung et al. | 2006
- 1535
-
Papers from the 52nd International Symposium of AVS - Thin Films - Characteristics of atomic layer deposited TiO2 films and their photocatalytic activityPheamhom, Rodjana et al. | 2006
- 1540
-
Effects of TiO~x physical vapor deposition parameters on the preferred orientation and adhesion of Pt films on gamma-Al~2O~3Derniaux, E. / Kayser, P. / Gageant, C. / Sanchez, C. / Boivin, D. et al. | 2006
- 1540
-
Effects of physical vapor deposition parameters on the preferred orientation and adhesion of Pt films onDerniaux, E. / Kayser, P. / Gageant, C. / Sanchez, C. / Boivin, D. et al. | 2006
- 1540
-
Papers from the 52nd International Symposium of AVS - Thin Films - Effects of TiOx physical vapor deposition parameters on the preferred orientation and adhesion of Pt films on g-Al2O3Derniaux, E. et al. | 2006
- 1546
-
Birefringent films for contrast enhancement of liquid crystal on silicon projection systemsHendrix, Karen / Tan, Kim / Duelli, Markus / Shemo, David / Tilsch, Markus et al. | 2006
- 1546
-
Papers from the 52nd International Symposium of AVS - Thin Films - Birefringent films for contrast enhancement of liquid crystal on silicon projection systemsHendrix, Karen et al. | 2006
- 1552
-
Papers from the 52nd International Symposium of AVS - Thin Films - Compliant system of polyimide microwires for cryogenic detector applicationsAllen, C.A. et al. | 2006
- 1552
-
Compliant system of polyimide microwires for cryogenic detector applicationsAllen, C. A. / Franz, D. E. / Moseley, S. H. et al. | 2006
- 1556
-
Vacuum measurement by carbon nanotube field emissiona)Choi, In-Mook / Woo, Sam-Yong / Hong, Seung-Soo et al. | 2006
- 1556
-
Vacuum measurement by carbon nanotube field emissionChoi, I.-M. / Woo, S.-Y. / Hong, S.-S. et al. | 2006
- 1556
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - Vacuum measurement by carbon nanotube field emissionChoi, In-Mook et al. | 2006
- 1560
-
Spallation Neutron Source ring vacuum systemsMapes, M. / Hseuh, H. C. / Rank, J. / Smart, L. / Todd, R. / Weiss, D. et al. | 2006
- 1560
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - Spallation Neutron Source ring vacuum systemsMapes, M. et al. | 2006
- 1568
-
Improvement of materials surface properties by rf glow discharge treatmentHuang, T. B. / Chen, X. / Tian, X. Q. / Cha, L. Z. et al. | 2006
- 1568
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - Improvement of materials surface properties by rf glow discharge treatmentHuang, T.B. et al. | 2006
- 1572
-
High temperature outgassing tests on materials used in the DIII-D tokamakHoltrop, K. L. / Hansink, M. J. et al. | 2006
- 1572
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - High temperature outgassing tests on materials used in the DIII-D tokamakHoltrop, K.L. et al. | 2006
- 1578
-
Pressure dependence of laminar-turbulent transition in gasesHinkle, L. D. / Muriel, A. / Novopashin, S. A. et al. | 2006
- 1578
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - Pressure dependence of laminar-turbuient transition in gasesHinkle, L.D. et al. | 2006
- 1584
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - Computational fluid dynamic model of a tapered Holweck vacuum pump operating in the viscous and transition regimes. I. Vacuum performanceGiors, S. et al. | 2006
- 1584
-
Computational fluid dynamic model of a tapered Holweck vacuum pump operating in the viscous and transition regimes. I. Vacuum performanceGiors, S. / Colombo, E. / Inzoli, F. / Subba, F. / Zanino, R. et al. | 2006
- 1592
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - Selective water vapor cryopumping through argonKryukov, A.P. et al. | 2006
- 1592
-
Selective water vapor cryopumping through argonKryukov, A. P. / Podcherniaev, O. / Hall, P. H. / Plumley, D. J. / Levashov, V. Yu. / Shishkova, I. N. et al. | 2006
- 1597
-
Effect of heat on the pumping performance of cryopumpCheng, H.-P. / Shen, Y.-H. et al. | 2006
- 1597
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - Effect of heat on the pumping performance of cryopumpCheng, H.-P. et al. | 2006
- 1601
-
Papers from the 52nd International Symposium of AVS - Vacuum Technology - ISAC target vacuum systemYosifov, Dimo et al. | 2006
- 1601
-
ISAC target vacuum systemYosifov, Dimo / Sekachev, Igor et al. | 2006
- 1605
-
Papers from the 52nd International Symposium of AVS - Applied Surface Science-Surface Characterization of Organic and Biological Systems - Measuring the thickness of organic-polymer-biological films on glass substrates using spectroscopic ellipsometryTompkins, Harland G. et al. | 2006
- 1605
-
Measuring the thickness of organic/polymer/biological films on glass substrates using spectroscopic ellipsometryTompkins, Harland G. / Tiwald, Tom / Bungay, Corey / Hooper, Andrew E. et al. | 2006
- 1610
-
Hot electron transport across manganese silicide layers on the Si(001) surfaceStollenwerk, A. J. / Krause, M. R. / Moore, R. / LaBella, V. P. et al. | 2006
- 1610
-
Papers from the 52nd International Symposium of AVS - Applied Surface Science-Thin Film Characterization - Hot electron transport across manganese silicide layers on the Si(001) surfaceStollenwerk, A.J. et al. | 2006
- 1613
-
Papers from the 52nd International Symposium of AVS - Applied Surface Science-Thin Film Characterization - Optimization and deposition of CdS thin films as applicable to TiO2-CdS composite catalysisPrabakar, K. et al. | 2006
- 1613
-
Optimization and deposition of CdS thin films as applicable to composite catalysisPrabakar, K. / Takahashi, T. / Nakashima, T. / Kubota, Y. / Fujishima, A. et al. | 2006
- 1618
-
Papers from the 52nd International Symposium of AVS - Applied Surface Science-Thin Film Characterization II - Laser processing of polymer nanocomposite thin filmsSellinger, A.T. et al. | 2006
- 1618
-
Laser processing of polymer nanocomposite thin filmsSellinger, A. T. / Leveugle, E. M. / Gogick, K. / Zhigilei, L. V. / Fitz-Gerald, J. M. et al. | 2006
- 1623
-
Surface and texture characterization of thin-film ZnTe formed with pulsed-laser depositionErlacher, Artur / Lukaszew, Alejandra R. / Jaeger, Herbert / Ullrich, Bruno et al. | 2006
- 1623
-
Papers from the 52nd International Symposium of AVS - Applied Surface Science-Thin Film Characterization II - Surface and texture characterization of thin-film ZnTe formed with pulsed-laser depositionErlacher, Artur et al. | 2006
- 1627
-
Papers from the 52nd International Symposium of AVS - Electronic Materials and Processing-Novel Approaches in Wide Bandgap Semiconductors - Quantitative assessment of diffusivity and specularity of surface-textured reflectors for light extraction in light-emitting diodesXi, Y. et al. | 2006
- 1627
-
Quantitative assessment of diffusivity and specularity of surface-textured reflectors for light extraction in light-emitting diodesXi, Y. / Li, X. / Kim, J. K. / Mont, F. / Gessmann, Th. / Luo, H. / Schubert, E. F. et al. | 2006
- 1631
-
Metal-organic chemical-vapor deposition of high-reflectance III-nitride distributed Bragg reflectors on Si substratesMastro, M. A. / Holm, R. T. / Bassim, N. D. / Gaskill, D. K. / Culbertson, J. C. / Fatemi, M. / Eddy, C. R. / Henry, R. L. / Twigg, M. E. et al. | 2006
- 1631
-
Papers from the 52nd International Symposium of AVS - Electronic Materials and Processing-Novel Approaches in Wide Bandgap Semiconductors - Metal-organic chemical-vapor deposition of high-reflectance III-nitride distributed Bragg reflectors on Si substratesMastro, M.A. et al. | 2006
- 1635
-
Low-temperature synthesis of silica-enhanced gallium nitride nanowires on silicon substrateHsieh, Chin-Hua / Chou, Li-Jen / Chueh, Yu-Lun / Chang, Mu-Tung et al. | 2006
- 1635
-
Papers from the 52nd International Symposium of AVS - Electronic Materials and Processing-Novel Approaches in Wide Bandgap Semiconductors - Low-temperature synthesis of silica-enhanced gallium nitride nanowires on silicon substrateHsieh, Chin-Hua et al. | 2006
- 1640
-
Manganese-induced long-range lattice disorder and vacancy formation in metal-organic chemical vapor deposition grown and ion-implantedFenwick, William E. / Asghar, Ali / Gupta, Shalini / Kang, Hun / Strassburg, Martin / Dietz, Nikolaus / Graham, Samuel / Kane, Matthew H. / Ferguson, Ian T. et al. | 2006
- 1640
-
Papers from the 52nd International Symposium of AVS - Magnetic Interfaces and Nanostructures-Magnetic Semiconductors - Manganese-induced long-range lattice disorder and vacancy formation in metal-organic chemical vapor deposition grown and ion-implanted Ga1-xMnxNFenwick, William E. et al. | 2006
- 1644
-
Papers from the 52nd International Symposium of AVS - Magnetic Interfaces and Nanostructures-Magnetic Semiconductors - Observation of crystallite formation in ferromagnetic Mn-implanted SiAwo-Affouda, C. et al. | 2006
- 1644
-
Observation of crystallite formation in ferromagnetic Mn-implanted SiAwo-Affouda, C. / Bolduc, M. / Huang, M. B. / Ramos, F. / Dunn, K. A. / Thiel, B. / Agnello, G. / LaBella, V. P. et al. | 2006
- 1648
-
Papers from the 52nd International Symposium of AVS - Magnetic Interfaces and Nanostructures-Magnetic Semiconductors - Annealing temperature effects on the structure of ferromagnetic Mn-implanted SiBolduc, M. et al. | 2006
- 1648
-
Annealing temperature effects on the structure of ferromagnetic Mn-implanted SiBolduc, M. / Awo-Affouda, C. / Ramos, F. / LaBella, V. P. et al. | 2006
- 1652
-
Papers from the 52nd International Symposium of AVS - Magnetic Interfaces and Nanostructures-Advanced Magnetic Storage and Manufactoring Processes - Interface stability between amorphous ferromagnetic layer and Al oxide barrier in tunneling magnetoresistive films at elevated temperaturesPeng, Xilin et al. | 2006
- 1652
-
Interface stability between amorphous ferromagnetic layer and Al oxide barrier in tunneling magnetoresistive films at elevated temperaturesPeng, Xilin / Kvitek, Dick / Morone, Augusto / Axdal, Steven H. / Xue, Song et al. | 2006
- 1655
-
Papers from the 52nd International Symposium of AVS - Plasma Science and Technology-Emerging Plasma Applications - Effect of substrate material and bias on properties of TiN films deposited in the hybrid plasma reactorBárdos, L. et al. | 2006
- 1655
-
Effect of substrate material and bias on properties of TiN films deposited in the hybrid plasma reactorBárdos, L. / Baránková, H. / Gustavsson, L.-E. et al. | 2006
- 1660
-
Para-sexiphenyl thin films grown by hot wall epitaxy on KCl(001) substratesAndreev, A. Yu. / Montaigne, A. / Hlawacek, G. / Sitter, H. / Teichert, C. et al. | 2006
- 1660
-
Para-sexiphenyl thin films grown by hot wall epitaxy on KCI(001) substratesAndreev, A. Y. / Montaigne, A. / Hlawacek, G. / Sitter, H. / Teichert, C. et al. | 2006
- 1660
-
Papers from the 52nd International Symposium of AVS - Surface Science-Organic Film Growth and Characterization - Para-sexiphenyl thin films grown by hot wall epitaxy on KCl(001) substratesAndreev, A.Yu et al. | 2006
- 1664
-
Preparation and characterization of transparent conducting ZnTe:Cu back contact interface layer for solar cell for photoelectrochemical applicationAvachat, Upendra S. / Dhere, Neelkanth G. et al. | 2006
- 1664
-
Papers from the 52nd International Symposium of AVS - Thin Films-Thin Films for Photovoltaic and Energy Applications - Preparation and characterization of transparent conducting ZnTe:Cu back contact interface layer for CdS-CdTe solar cell for photoelectrochemical applicationAvachat, Upendra S. et al. | 2006
- 1668
-
blend film: A photoemission investigationLozzi, L. / Granato, V. / Picozzi, S. / Simeoni, M. / La Rosa, S. / Delly, B. / Santucci, S. et al. | 2006
- 1668
-
Papers from the 52nd International Symposium of AVS - Thin Films-Thin Films for Photovoltaic and Energy Applications - CuPc: C60 blend film: A photoemission investigationLozzi, L. et al. | 2006
- 1676
-
Real-time spectroscopic ellipsometry studies of the growth of amorphous and epitaxial silicon for photovoltaic applicationsLevi, D. H. / Teplin, C. W. / Iwaniczko, E. / Yan, Y. / Wang, T. H. / Branz, H. M. et al. | 2006
- 1676
-
Papers from the 52nd International Symposium of AVS - Thin Films-In Situ-Ex Situ and Real-Time Monitoring - Real-time spectroscopic ellipsometry studies of the growth of amorphous and epitaxial silicon for photovoltaic applicationsLevi, D.H. et al. | 2006
- 1684
-
Papers from the 52nd International Symposium of AVS - Thin Films-Focused Beam Processing and Fabrication - Reduction of laser-induced roughness in a-Si:H surfaces for vacuum compatible lithographyJacobs, R.N. et al. | 2006
- 1684
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Reduction of laser-induced roughness in -Si:H surfaces for vacuum compatible lithographyJacobs, R. N. / Robinson, E. W. / Stoltz, A. J. / Dinan, J. H. / Salamanca-Riba, L. et al. | 2006
- 1690
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CUMULATIVE AUTHOR INDEX| 2006