High power impulse magnetron sputtering discharge (English)
- New search for: Gudmundsson, J. T.
- New search for: Brenning, N.
- New search for: Lundin, D.
- New search for: Helmersson, U.
- New search for: Gudmundsson, J. T.
- New search for: Brenning, N.
- New search for: Lundin, D.
- New search for: Helmersson, U.
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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30
, 3
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35
;
2012
- Article (Journal) / Electronic Resource
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Title:High power impulse magnetron sputtering discharge
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Additional title:High power impulse magnetron sputtering discharge
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Contributors:Gudmundsson, J. T. ( author ) / Brenning, N. ( author ) / Lundin, D. ( author ) / Helmersson, U. ( author )
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Published in:
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Publisher:
- New search for: American Vacuum Society
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Publication date:2012-05-01
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Size:35 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 30, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 30601
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Letters - Noninvasive measurement and control of the temperature of Pt nanofilms on Si supportsNedrygailov, I I et al. | 2012
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Noninvasive measurement and control of the temperature of Pt nanofilms on Si supportsNedrygailov, I. I. / Hasselbrink, E. / Diesing, D. / Dasari, S. K. / Hashemian, M. A. / Karpov, E. G. et al. | 2012
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Influence of magnetic ordering on the elastic properties of PdFe3NTakahashi, Tetsuya / Music, Denis / Schneider, Jochen M. et al. | 2012
- 30801
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Review Articles - High power impulse magnetron sputtering dischargeGudmundsson, J T et al. | 2012
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High power impulse magnetron sputtering dischargeGudmundsson, J. T. / Brenning, N. / Lundin, D. / Helmersson, U. et al. | 2012
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Colloidal nanocrystal quantum dot assemblies as artificial solidsHanrath, Tobias et al. | 2012
- 31101
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Interfaces - Improved characteristics of mesa-type intrinsic Josephson junctions by vacuum cleavage process for Bi2,Sr2,CaCu2O8+δ/Au contactsIshida, Hiroki et al. | 2012
- 031101
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Improved characteristics of mesa-type intrinsic Josephson junctions by vacuum cleavage process for Bi~2Sr~2CaCu~2O~8~+~ ~d~e~l~t~a~ /Au contactsIshida, H. / Kato, T. / Saito, A. / Yasui, K. et al. | 2012
- 31301
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Plasma Science and Technology - Effect of CI2- and HBr-based inductively coupled plasma etching on InP surface composition analyzed using in situ x-ray photoelectron spectroscopyBouchoule, S et al. | 2012
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Effect of Cl2- and HBr-based inductively coupled plasma etching on InP surface composition analyzed using in situ x-ray photoelectron spectroscopyBouchoule, S. / Vallier, L. / Patriarche, G. / Chevolleau, T. / Cardinaud, C. et al. | 2012
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Negative plasma potential in a multidipole chamber with a dielectric coated plasma boundarySheehan, J. P. / Hershkowitz, Noah et al. | 2012
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Characterization of hydrogen–plasma interactions with photoresist, silicon, and silicon nitride surfacesThedjoisworo, Bayu A. / Cheung, David / Zamani, Davoud et al. | 2012
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Ion energy distributions, electron temperatures, and electron densities in Ar, Kr, and Xe pulsed dischargesShin, Hyungjoo / Zhu, Weiye / Economou, Demetre J. / Donnelly, Vincent M. et al. | 2012
- 031401
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Binding of styrene on silicon (111)-7 x 7 surfaces as a model molecular electronics systemWeiland, C.R. / Yang, L. / Doren, D.J. / Menning, C.A. / Skliar, D. / Willis, B.G. / Chen, J.G. / Opila, R.L. et al. | 2012
- 31401
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Surfaces - Binding of styrene on silicon (111)-7 x 7 surfaces as a model molecular electronics systemWeiland, Conan R et al. | 2012
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Solvent-assisted growth of metal phthalocyanine thin films on Au(111)Tskipuri, Levan / Shao, Qian / Reutt-Robey, Janice et al. | 2012
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Improvement of electrical and optical properties of molybdenum oxide thin films by ultralow pressure sputtering methodSook Oh, Myeong / Seob Yang, Bong / Ho Lee, Jong / Ha Oh, Seong / Soo Lee, Ung / Jang Kim, Yoon / Joon Kim, Hyeong / Soo Huh, Myung et al. | 2012
- 31501
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Thin Films - Improvement of electrical and optical properties of molybdenum oxide thin films by ultralow pressure sputtering methodOh, Myeong Sook et al. | 2012
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Influence of process parameters on rolling-contact-fatigue life of ion plated nickel–copper–silver lubricationDanyluk, Mike / Dhingra, Anoop et al. | 2012
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Visible light-induced photocatalytic properties of WO3 films deposited by dc reactive magnetron sputteringImai, Masahiro / Kikuchi, Maiko / Oka, Nobuto / Shigesato, Yuzo et al. | 2012
- 31504
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Influence of chemical composition and deposition conditions on microstructure evolution during annealing of arc evaporated ZrAIN thin filmsRogström, L et al. | 2012
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Influence of chemical composition and deposition conditions on microstructure evolution during annealing of arc evaporated ZrAlN thin filmsRogström, L. / Johansson, M. P. / Ghafoor, N. / Hultman, L. / Odén, M. et al. | 2012
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Equivalent-circuit model for vacuum ultraviolet irradiation of dielectric filmsSinha, Harsh / Shohet, J. Leon et al. | 2012
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Influence of process parameters on properties of reactively sputtered tungsten nitride thin filmsAddonizio, Maria L. / Castaldo, Anna / Antonaia, Alessandro / Gambale, Emilia / Iemmo, Laura et al. | 2012
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Influence of ionization degree on film properties when using high power impulse magnetron sputteringSamuelsson, Mattias / Lundin, Daniel / Sarakinos, Kostas / Björefors, Fredrik / Wälivaara, Bengt / Ljungcrantz, Henrik / Helmersson, U. et al. | 2012
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Incompatibility of standard III–V compound semiconductor processing techniques with terbium-doped InGaAs of high terbium concentrationRamu, Ashok T. / Clinger, Laura E. / Dongmo, Pernell B. / Imamura, Jeffrey T. / Zide, Joshua M. O. / Bowers, John E. et al. | 2012
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Thin layer composition profiling with angular resolved x-ray photoemission spectroscopy: Factors affecting quantitative resultsConard, T. / Vandervorst, W. / Bergmaier, A. / Kimura, K. et al. | 2012
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Effect of target–substrate distance on properties of flexible InZnSnO films grown by linear facing target sputteringShin, Hyun-Su / Lee, Ju-Hyun / Kim, Han-Ki et al. | 2012
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Effect of reactor pressure on the electrical and structural properties of InN epilayers grown by high-pressure chemical vapor depositionIndika Senevirathna, M. K. / Gamage, Sampath / Atalay, Ramazan / Acharya, Ananta R. / Unil Perera, A. G. / Dietz, Nikolaus / Buegler, Max / Hoffmann, Axel / Su, Liqin / Melton, Andrew et al. | 2012
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Atomic force microscopy and x-ray diffraction studies on agglomeration phenomena of ultrathin Au/Fe bilayersKamiko, Masao / Koo, Jung-Woo / Kim, Jae-Min / Ha, Jae-Geun et al. | 2012
- 31601
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Vacuum Science and Technology - Study on surface modification of silicon using CHF3/O2 plasma for nano-imprint lithographyKim, Youngkeun et al. | 2012
- 031601
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Study on surface modification of silicon using CHF~3/O~2 plasma for nano-imprint lithographyKim, Y. / Kang, S. / Ham, Y.-H. / Kwon, K.-H. / Shutov, D.A. / Lee, H.-W. / Lee, J.J. / Do, L.-M. / Baek, K.-H. et al. | 2012
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Design and construction of the SuperKEKB vacuum systemSuetsugu, Yusuke / Kanazawa, Ken-ichi / Shibata, Kyo / Ishibashi, Takuya / Hisamatsu, Hiromi / Shirai, Mitsuru / Terui, Shinji et al. | 2012
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Quantification of the atomic hydrogen flux as a function of filament temperature and H2 flow rateUgur, D. / Storm, A. J. / Verberk, R. / Brouwer, J. C. / Sloof, W. G. et al. | 2012
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Binding of styrene on silicon (111)-7 × 7 surfaces as a model molecular electronics systemWeiland, Conan R. / Yang, Liu / Doren, Douglas J. / Menning, Carl A. / Skliar, Dimitri / Willis, Brian G. / Chen, Jingguang G. / Opila, Robert L. et al. | 2012
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CUMULATIVE AUTHOR INDEX| 2012
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Improved characteristics of mesa-type intrinsic Josephson junctions by vacuum cleavage process for Bi2Sr2CaCu2O8+δ/Au contactsIshida, Hiroki / Kato, Takahiro / Saito, Atsushi / Yasui, Kanji et al. | 2012
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Study on surface modification of silicon using CHF3/O2 plasma for nano-imprint lithographya)Kim, Youngkeun / Kang, Sungchil / Ham, Yong-Hyun / Kwon, Kwang-Ho / Alexandrovich Shutov, Dmitriy / Lee, Hyun-Woo / Jong Lee, Jae / Do, Lee-Mi / Baek, Kyu-Ha et al. | 2012