Characterization of vertical Si nanowire p-n diodes fabricated by metal-assisted etching and AAO templates (English)
- New search for: Kwon, Namyong
- New search for: Kim, Namkyu
- New search for: Sung, Sihyun
- New search for: Kang, Byungyun
- New search for: Chung, Ilsub
- New search for: Kwon, Namyong
- New search for: Kim, Namkyu
- New search for: Sung, Sihyun
- New search for: Kang, Byungyun
- New search for: Chung, Ilsub
In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
;
30
, 4
;
8
;
2012
- Article (Journal) / Electronic Resource
-
Title:Characterization of vertical Si nanowire p-n diodes fabricated by metal-assisted etching and AAO templates
-
Additional title:Characterization of vertical Si nanowire p-n diodes
-
Contributors:Kwon, Namyong ( author ) / Kim, Namkyu ( author ) / Sung, Sihyun ( author ) / Kang, Byungyun ( author ) / Chung, Ilsub ( author )
-
Published in:
-
Publisher:
- New search for: American Vacuum Society
-
Publication date:2012-07-01
-
Size:8 pages
-
ISSN:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Electronic Resource
-
Language:English
-
Keywords:
-
Source:
Table of contents – Volume 30, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
-
CUMULATIVE AUTHOR INDEX A15| 2012
-
Study of silica nano-pattern erosion in H2SO4-H2O2 mixture using spectroscopic ellipsometry 041807Yu, Zhaoning et al. | 2012
-
Si delta doping inside InAs/GaAs quantum dots with different doping densities 041808Wang, Ke-Fan et al. | 2012
-
Effect of In-Ga-Zn-O active layer channel composition on process temperature for flexible oxide thin-film transistorsBak, Jun Yong / Yoon, Sung Min / Yang, Shinhyuk / Kim, Gi Heon / Ko Park, Sang-Hee / Hwang, Chi-Sun et al. | 2012
-
Formation of graphene on SiC() surfaces in disilane and neon environmentsHe, Guowei / Srivastava, Nishtha / Feenstra, Randall M. et al. | 2012
-
Schottky barrier and attenuation length for hot hole injection in nonepitaxial Au on p-type GaAsSitnitsky, Ilona / Garramone, John J. / Abel, Joseph / Xu, Peng / Barber, Steven D. / Ackerman, Matt L. / Kevin Schoelz, J. / Thibado, Paul M. / LaBella, Vincent P. et al. | 2012
-
Silicon recess minimization during gate patterning using synchronous plasma pulsing 040604Petit-Etienne, Camille et al. | 2012
-
Monochromatic electron-emission from planar AlN/GaN multilayers with carbon nanotube gate electrode 042203Yilmazoglu, Oktay et al. | 2012
-
Highly efficient and long life metal-insulator-metal cathodes 041202Kusunoki, Toshiaki et al. | 2012
-
Lateral metallic devices made by a multiangle shadow evaporation technique 04E105Costache, Marius V et al. | 2012
-
Structural characterization of He ion microscope platinum deposition and sub-surface silicon damage 041210Drezner, Yariv et al. | 2012
-
2D ordered arrays of nanopatterns fabricated by using colloidal crystals as templatesWang, Benzhong / Han, Mingyong / Jin Chua, Soo et al. | 2012
-
Study of silica nano-pattern erosion in H2SO4-H2O2 mixture using spectroscopic ellipsometryYu, Zhaoning / Kurataka, Nobuo / Tran, Hieu / Gauzner, Gene et al. | 2012
-
Anomalous Rashba effect of bismuth(111) thin films studied by high-resolution spin- and angle-resolved photoemission spectroscopyTakayama, Akari / Sato, Takafumi / Souma, Seigo / Takahashi, Takashi et al. | 2012
-
SnO2-gated AlGaN/GaN high electron mobility transistors based oxygen sensorsHung, Shao-Tsu / Chang, Chi-Jung / Chen, Chin Ching / Lo, Chien Fong / Ren, Fan / Pearton, Stephen J. / Kravchenko, Ivan I. et al. | 2012
-
Polymer nanocomposites with improved resistance to ionizing radiationBorjanović, Vesna / Bistričić, Lahorija / Mikac, Lara / McGuire, Gary E. / Zamboni, Ivana / Jakšić, Milko / Shenderova, Olga et al. | 2012
-
Passivation of interfacial defects at III-V oxide interfacesLin, Liang / Robertson, John et al. | 2012
-
Letters - Impact of ultrathin Al2O3 interlayer on thermal stability and leakage current properties of TiO2/Al2O3 stacking dielectrics 040601Wang, Hong-Bo et al. | 2012
-
Differences in erosion mechanism and selectivity between Ti and TiN in fluorocarbon plasmas for dielectric etch 041811Weilnboeck, Florian et al. | 2012
-
Optical transitions in magnetoelectric Ga0.6Fe1.4O3 from 0.73 to 6.45 eV 041204Choi, Sukgeun et al. | 2012
-
Nanofabricated quantum dot array formation through annealing of nano-patterned planar InAs 041806Eyink, Kurt G et al. | 2012
-
Energy Conversion and Storage Devices - Maskless fabrication of selectively sized silicon nanostructures for solar cell application 041401Dou, Bingfei et al. | 2012
-
Die singulation technologies for advanced packaging: A critical reviewLei, Wei-Sheng / Kumar, Ajay / Yalamanchili, Rao et al. | 2012
-
Formation of zinc oxide films using submicron zinc particle dispersionsRajachidambaram, Meena S. / Varga, Tamas / Kovarik, Libor / Sanghavi, Rahul / Shutthanandan, Vaithiyalingam / Thevuthasan, Suntharampillai / Han, Seung-Yeol / Chang, Chih-Hung / Herman, Gregory S. et al. | 2012
-
Proton irradiation energy dependence of dc and rf characteristics on InAlN/GaN high electron mobility transistors [Lo, Chien-Fong / Liu, Lu / Ren, Fan / Pearton, Stephen J. / Gila, Brent P. / Kim, Hong-Yeol / Kim, Jihyun / Laboutin, Oleg / Cao, Yu / Johnson, Jerry W. et al. | 2012
-
Microelectronic & Nanoeiectronic Devices - Emittance measurements of electron beams from diamond field emitter arrays 042201Jarvis, Jonathan D et al. | 2012
-
Participation of focused ion beam implanted gallium ions in metal-assisted chemical etching of silicon 040603Hildreth, Owen et al. | 2012
-
Errata - Proton irradiation energy dependence of dc and rf characteristics on InAlN/GaN high electron mobility transistors [J. Vac. Sci. Technol. B 30, 041206 (2012)] 043401Lo, Chien-Fong et al. | 2012
-
Optimization of the ammonium sulfide (NH4)2S passivation process on InSb(111)A 04E103Zhernokletov, Dmitry M et al. | 2012
-
Impact of post-growth thermal annealing and environmental exposure on the unintentional doping of CVD graphene filmsSojoudi, Hossein / Baltazar, Jose / Henderson, Clifford / Graham, Samuel et al. | 2012
-
Carbon contamination and oxidation of Au surfaces under extreme ultraviolet radiation: An x-ray photoelectron spectroscopy studyAl-Ajlony, Al-Montaser Bellah / Kanjilal, Aloke / Harilal, Sivanandan S. / Hassanein, Ahmed et al. | 2012
-
Very low angle annular dark field imaging in the scanning transmission electron microscope: A versatile tool for micro- and nano-characterizationBaumann, Frieder H. et al. | 2012
-
Smart-cut layer transfer of single-crystal SiC using spin-on-glassLee, Jae-Hyung / Bargatin, Igor / Park, Joonsuk / Milaninia, Kaveh M. / Theogarajan, Luke S. / Sinclair, Robert / Howe, Roger T. et al. | 2012
-
Lateral metallic devices made by a multiangle shadow evaporation techniqueCostache, Marius V. / Bridoux, Germàn / Neumann, Ingmar / Valenzuela, Sergio O. et al. | 2012
-
MEMS & NEMS - Smart-cut layer transfer of single-crystal SiC using spin-on-glass 042001Lee, Jae-Hyung et al. | 2012
-
Review Article - Die singulation technologies for advanced packaging: A critical review 040801Lei, Wei-Sheng et al. | 2012
-
Near-edge x-ray absorption fine structure spectroscopy studies of charge redistribution at graphene/dielectric interfaces 041205Schultz, Brian J et al. | 2012
-
GaN-based light-emitting diodes with embedded air void arrays 041207Shen, Yue et al. | 2012
-
Metastable centers in AlGaN/AlN/GaN heterostructures 041209Polyakov, Alexander Y et al. | 2012
-
SnO2-gated AlGaN/GaN high electron mobility transistors based oxygen sensors 041214Hung, Shao-Tsu et al. | 2012
-
Schottky barrier and attenuation length for hot hole injection in nonepitaxial Au on p-type GaAs 04E110Sitnitsky, Ilona et al. | 2012
-
Silicon recess minimization during gate patterning using synchronous plasma pulsingPetit-Etienne, Camille / Pargon, Erwine / David, Sylvain / Darnon, Maxime / Vallier, Laurent / Joubert, Olivier / Banna, Samer et al. | 2012
-
Near-edge x-ray absorption fine structure spectroscopy studies of charge redistribution at graphene/dielectric interfacesSchultz, Brian J. / Lee, Vincent / Price, Jimmy / Jaye, Cherno / Lysaght, Patrick S. / Fischer, Daniel A. / Prendergast, David / Banerjee, Sarbajit et al. | 2012
-
Field emission property of carbon-doped TiO2 nanotube arrays with controllable doping content of carbonKang, You-Min / Wang, Cheng-Wei / Chen, Jian-Biao / Wang, Lin-Qing / Li, Dong-Sheng / Zhu, Wei-Dong / Zhou, Feng et al. | 2012
-
Investigation of interfacial oxidation control using sacrificial metallic Al and La passivation layers on InGaAsBrennan, Barry / Milojevic, Marko / Contreras-Guerrero, Roccio / Kim, Hyun-Chul / Lopez-Lopez, Maximo / Kim, Jiyoung / Wallace, Robert M. et al. | 2012
-
Growth of epitaxial oxides on silicon using atomic layer deposition: Crystallization and annealing of TiO2 on SrTiO3-buffered Si(001)McDaniel, Martin D. / Posadas, Agham / Ngo, Thong Q. / Dhamdhere, Ajit / Smith, David J. / Demkov, Alexander A. / Ekerdt, John G. et al. | 2012
-
Electron beam excitation method to study gas phase during etch processesStephan Thamban, P. L. / Padron-Wells, Gabriel / Yun, Stuart / Hosch, Jimmy W. / Goeckner, Matthew J. et al. | 2012
-
Structural characterization of He ion microscope platinum deposition and sub-surface silicon damageDrezner, Yariv / Greenzweig, Yuval / Fishman, Daniel / van Veldhoven, Emile / Maas, Diederik J. / Raveh, Amir / Livengood, Richard H. et al. | 2012
-
Application of inline high resolution x-ray diffraction in monitoring Si/SiGe and conventional Si in SOI fin-shaped field effect transistor processesHung, Pui Yee / Kasper, Nikolai / Nadeau, Jim / Ok, Injo / Hobbs, Chris / Vigliante, Assunta et al. | 2012
-
Ge concentrations in pile-up layers of sub-100-nm SiGe films for nano-structuring by thermal oxidationLong, Ethan / Galeckas, Augustinas / Kuznetsov, Andrej Yu et al. | 2012
-
Low cost cryogenic high vacuum sample holder for in-plane magneto-transport studiesAbel, Joseph / Matsubayashi, Akitomo / LaBella, Vincent P. et al. | 2012
-
Oxygen incorporation and dipole variation in tantalum nitride film used as metal-gate electrode 042202Lima, Lucas P B et al. | 2012
-
In situ thickness and temperature measurements of CdTe grown by molecular beam epitaxy on GaAs substrate 041203Gu, Renjie et al. | 2012
-
PAPERS FROM THE 39th CONFERENCE ON THE PHYSICS AND CHEMISTRY OF SEMICONDUCTOR INTERFACES - Preface I| 2012
-
Passivation of interfacial defects at III-V oxide interfaces 04E101Lin, Liang et al. | 2012
-
Investigation of interfacial oxidation control using sacrificial metallic Al and La passivation layers on InGaAs 04E104Brennan, Barry et al. | 2012
-
Optical and structural characterization of epitaxial graphene on vicinal 6H-SiC(0001)-Si by spectroscopic ellipsometry, Auger spectroscopy, and STM 04E106Nelson, Florence et al. | 2012
-
Ge concentrations in pile-up layers of sub-100-nm SiGe films for nano-structuring by thermal oxidation 041212Long, Ethan et al. | 2012
-
Nanometer Science & Technology - Field emission property of carbon-doped TiO2 nanotube arrays with controllable doping content of carbon 041801Kang, You-Min et al. | 2012
-
Application of inline high resolution x-ray diffraction in monitoring Si/SiGe and conventional Si in SOI fin-shaped field effect transistor processes 041211Hung, Pui Yee et al. | 2012
-
Anomalous Rashba effect of bismuth(111) thin films studied by high-resolution spin- and angle-resolved photoemission spectroscopy 04E107Takayama, Akari et al. | 2012
-
Growth of epitaxial oxides on silicon using atomic layer deposition: Crystallization and annealing of TiO2 on SrTiO3-buffered Si(001) 04E111McDaniel, Martin D et al. | 2012
-
Carbon contamination and oxidation of Au surfaces under extreme ultraviolet radiation: An x-ray photoelectron spectroscopy study 041603Bellah Al-Ajlony, Al-Montaser et al. | 2012
-
Participation of focused ion beam implanted gallium ions in metal-assisted chemical etching of siliconHildreth, Owen / Rykaczewski, Konrad / Wong, Ching Ping et al. | 2012
-
Highly efficient and long life metal–insulator–metal cathodesKusunoki, Toshiaki / Suzuki, Mutsumi / Sagawa, Masakazu / Mikami, Yoshiro / Nishimura , Etsuko / Ikeda, Mitsuharu / Hirano, Tatsumi / Tsuji, Kazutaka et al. | 2012
-
First-principles study of the growth thermodynamics of Pt on SrTiO3 (001)Seo, Hosung / Posadas, Agham B. / Demkov, Alexander A. et al. | 2012
-
Impact of post-growth thermal annealing and environmental exposure on the unintentional doping of CVD graphene films 041213Sojoudi, Hossein et al. | 2012
-
Lithography - Electron beam lithography on vertical side faces of micrometer-order Si block 041601Yamazaki, Kenji et al. | 2012
-
Formation of zinc oxide films using submicron zinc particle dispersions 041805Rajachidambaram, Meena S et al. | 2012
-
Impact of ultrathin Al2O3 interlayer on thermal stability and leakage current properties of TiO2/Al2O3 stacking dielectricsWang, Hong-Bo / Ma, Da-Yan / Ma, Fei / Xu, Ke-Wei et al. | 2012
-
Optical transitions in magnetoelectric Ga0.6Fe1.4O3 from 0.73 to 6.45 eVChoi, Sukgeun / Lefèvre, Christophe / Roulland, Francois / Mény, Christian / Viart, Nathalie / To, Bobby / Shafer, Devyn E. / Shin, Ranhee / Lee, Jihye / Jo, William et al. | 2012
-
In situ thickness and temperature measurements of CdTe grown by molecular beam epitaxy on GaAs substrateGu, Renjie / Shen, Chuan / Guo, Yuying / Wang, Weiqiang / Fu, Xiangliang / Chen, Lu et al. | 2012
-
Formation of graphene on SiC(0001) surfaces in disilane and neon environments 04E102He, Guowei et al. | 2012
-
Effect of In-Ga-Zn-O active layer channel composition on process temperature for flexible oxide thin-film transistors 041208Bak, Jun Yong et al. | 2012
-
Fabrication of an electrical spin transport device utilizing a diazonium salt/hafnium oxide interface layer on epitaxial graphene grown on 6 H-SiC(0001) 04E109Abel, Joseph et al. | 2012
-
2D ordered arrays of nanopatterns fabricated by using colloidal crystals as templates 041802Wang, Benzhong et al. | 2012
-
Polymer nanocomposites with improved resistance to ionizing radiation 041803Borjanovic, Vesna et al. | 2012
-
Effect of acetylene concentration and thermal ramping rate on the growth of spin-capable carbon nanotube forests 041809Lee, Kyung H et al. | 2012
-
Characterization of vertical Si nanowire p-n diodes fabricated by metal-assisted etching and AAO templates 041810Kwon, Namyong et al. | 2012
-
Maskless fabrication of selectively sized silicon nanostructures for solar cell applicationDou, Bingfei / Jia, Rui / Li, Haofeng / Chen, Chen / Meng, Yanlong / Ding, Wuchang / Liu, Xinyu / Ye, Tianchun / Wang, Yunfeng et al. | 2012
-
Resist–substrate interface tailoring for generating high-density arrays of Ge and Bi2Se3 nanowires by electron beam lithographyHobbs, Richard G. / Schmidt, Michael / Bolger, Ciara T. / Georgiev, Yordan M. / Fleming, Peter / Morris, Michael A. / Petkov, Nikolay / Holmes, Justin D. / Xiu, Faxian / Wang, Kang L. et al. | 2012
-
Effect of acetylene concentration and thermal ramping rate on the growth of spin-capable carbon nanotube forestsLee, Kyung H. / Jung, Dae Woong / Burk, Dorothea / Overzet, Lawrence J. / Lee, Gil S. et al. | 2012
-
Characterization of vertical Si nanowire p-n diodes fabricated by metal-assisted etching and AAO templatesKwon, Namyong / Kim, Namkyu / Sung, Sihyun / Kang, Byungyun / Chung, Ilsub et al. | 2012
-
Oxygen incorporation and dipole variation in tantalum nitride film used as metal-gate electrodeLima, Lucas P. B. / Diniz, José A. / Doi, Ioshiaki / Miyoshi, Juliana / Silva, Audrey R. / Godoy Fo, José / Radtke, Claudio et al. | 2012
-
Emittance measurements of electron beams from diamond field emitter arraysJarvis, Jonathan D. / Choi, Bo K. / Hmelo, Anthony B. / Ivanov, Borislav / Brau, Charles A. et al. | 2012
-
Optimization of the ammonium sulfide (NH4)2S passivation process on InSb(111)AZhernokletov, Dmitry M. / Dong, Hong / Brennan, Barry / Kim, Jiyoung / Wallace, Robert M. et al. | 2012
-
Metastable centers in AlGaN/AlN/GaN heterostructuresPolyakov, Alexander Y. / Smirnov, Nick B. / Govorkov, A. V. / Kozhukhova, E. A. / Pearton, Stephen J. / Ren, Fan / Karpov, S. Yu. / Shcherbachev, K. D. / Kolin, N. G. / Lim, Wantae et al. | 2012
-
Si delta doping inside InAs/GaAs quantum dots with different doping densitiesWang, Ke-Fan / Gu, Yongxian / Yang, Xiaoguang / Yang, Tao / Wang, Zhanguo et al. | 2012
-
Monochromatic electron-emission from planar AlN/GaN multilayers with carbon nanotube gate electrodeYilmazoglu, Oktay / Considine, Laurence / Joshi, Ravi / Mimura, Hidenori / Pavlidis, Dimitris / Hartnagel, Hans L. / Schneider, Jörg J. / Evtukh, Anatoli / Semenenko, Mykola / Litovchenko, Vladimir et al. | 2012
-
Effects of semiconductor processing chemicals on conductivity of graphene 040602Chen, Chung Wei et al. | 2012
-
Electronic & Optoelectronic Materials, Devices & Processing - Electron beam excitation method to study gas phase during etch processes 041201Stephan Thamban, P L et al. | 2012
-
Proton irradiation energy dependence of dc and rf characteristics on InAlN/GaN high electron mobility transistors 041206Lo, Chien-Fong et al. | 2012
-
Shop Notes - Low cost cryogenic high vacuum sample holder for in-plane magneto-transport studies 043201Abel, Joseph et al. | 2012
-
First-principles study of the growth thermodynamics of Pt on SrTiO3 (001) 04E108Seo, Hosung et al. | 2012
-
Resist-substrate interface tailoring for generating high-density arrays of Ge and Bi2Se3 nanowires by electron beam lithography 041602Hobbs, Richard G et al. | 2012
-
Very low angle annular dark field imaging in the scanning transmission electron microscope: A versatile tool for micro- and nano-characterization 041804Baumann, Frieder H et al. | 2012
-
Effects of semiconductor processing chemicals on conductivity of grapheneChen, Chung Wei / Ren, F. / Chi, Gou-Chung / Hung, S. C. / Huang, Y. P. / Kim, Jihyun / Kravchenko, Ivan / Pearton, Stephen J. et al. | 2012
-
GaN-based light-emitting diodes with embedded air void arraysShen, Yue / Li, Shuguang / Kuo, De-Shan / Chang, Shoou-Jinn / Lam, Kin-Tak / Wen, Kuo-Hsun et al. | 2012
-
Proton irradiation energy dependence of dc and rf characteristics on InAlN/GaN high electron mobility transistorsLo, Chien-Fong / Liu, Lu / Ren, Fan / Pearton, Stephen J. / Gila, Brent P. / Kim, Hong-Yeol / Kim, Jihyun / Laboutin, Oleg / Cao, Yu / Johnson, Jerry W. et al. | 2012
-
Electron beam lithography on vertical side faces of micrometer-order Si blockYamazaki, Kenji / Yamaguchi, Hiroshi et al. | 2012
-
Nanofabricated quantum dot array formation through annealing of nano-patterned planar InAsEyink, Kurt G. / Grazulis, Lawrence / Mahalingam, Krishnamurthy / Shoaf, Jodie / Hart, Veronica / Esposito, Daniel / Hoelscher, John / Twyman, Marlon / Tomich, David H. et al. | 2012
-
Differences in erosion mechanism and selectivity between Ti and TiN in fluorocarbon plasmas for dielectric etchWeilnboeck, Florian / Bartis, Elliot / Shachar, Sivan / Oehrlein, Gottlieb S. / Farber, David / Lii, Tom / Lenox, Chet et al. | 2012
-
Optical and structural characterization of epitaxial graphene on vicinal 6H-SiC(0001)–Si by spectroscopic ellipsometry, Auger spectroscopy, and STMNelson, Florence / Sandin, Andreas / Dougherty, Daniel B. / Aspnes, David E. / Rowe, Jack E. / Diebold, Alain C. et al. | 2012
-
Fabrication of an electrical spin transport device utilizing a diazonium salt/hafnium oxide interface layer on epitaxial graphene grown on 6 H-SiC(0001)Abel, Joseph / Matsubayashi, Akitomo / Murray, Thomas / Dimitrakopoulos, Christos / Farmer, Damon B. / Afzali, Ali / Grill, Alfred / Sung, C. Y. / LaBella, Vincent P. et al. | 2012