Method for measuring thermal accommodation coefficients of gases on thin film surfaces using a MEMS sensor structure (English)
- New search for: Grau, Mario
- New search for: Völklein, Friedemann
- New search for: Meier, Andreas
- New search for: Kunz, Christina
- New search for: Heidler, Jonas
- New search for: Woias, Peter
- New search for: Grau, Mario
- New search for: Völklein, Friedemann
- New search for: Meier, Andreas
- New search for: Kunz, Christina
- New search for: Heidler, Jonas
- New search for: Woias, Peter
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
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34
, 4
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7
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2016
- Article (Journal) / Electronic Resource
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Title:Method for measuring thermal accommodation coefficients of gases on thin film surfaces using a MEMS sensor structure
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Additional title:Method for measuring thermal accommodation coefficients
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Contributors:Grau, Mario ( author ) / Völklein, Friedemann ( author ) / Meier, Andreas ( author ) / Kunz, Christina ( author ) / Heidler, Jonas ( author ) / Woias, Peter ( author )
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Published in:
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Publisher:
- New search for: American Vacuum Society
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Publication date:2016-07-01
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Size:7 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 34, Issue 4
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Structural, mechanical, and magnetic properties of GaFe3N thin filmsJunaid, Muhammad / Music, Denis / Hans, Marcus / Schneider, Jochen M. / Scholz, Tanja / Dronskowski, Richard / Primetzhofer, Daniel et al. | 2016
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Precursor dependent nucleation and growth of ruthenium films during chemical vapor depositionLiao, Wen / Ekerdt, John G. et al. | 2016
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Planar regions of GaAs (001) prepared by Ga droplet motionZheng, Changxi / Tang, Wen-Xin / Jesson, David E. et al. | 2016
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Structural and chemical analysis of annealed plasma-enhanced atomic layer deposition aluminum nitride filmsBroas, Mikael / Sippola, Perttu / Sajavaara, Timo / Vuorinen, Vesa / Pyymaki Perros, Alexander / Lipsanen, Harri / Paulasto-Kröckel, Mervi et al. | 2016
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Effect of the addition of Si into Nb2O5 coatings on their structural, optical, and mechanical propertiesMirabal-Rojas, Roberto / Muhl, Stephen / Rodil, Sandra E. / Camps, Enrique / Lejeune, Michael / Zeinert, Andreas et al. | 2016
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Effect of discharge power on target poisoning and coating properties in reactive magnetron sputter deposition of TiNSaringer, Christian / Franz, Robert / Zorn, Katrin / Mitterer, Christian et al. | 2016
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Antimicrobial activity of tantalum oxide coatings decorated with Ag nanoparticlesCao, Huiliang / Meng, Fanhao / Liu, Xuanyong et al. | 2016
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Near-edge x-ray absorption fine structure spectroscopy at atmospheric pressure with a table-top laser-induced soft x-ray sourceKühl, Frank-Christian / Müller, Matthias / Schellhorn, Meike / Mann, Klaus / Wieneke, Stefan / Eusterhues, Karin et al. | 2016
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Application of nitrogen plasma immersion ion implantation to titanium nasal implants with nanonetwork surface structureSun, Ying-Sui / Zhang, Lan / Zhu, Hongqin / Yang, Wei-En / Lan, Ming-Ying / Lee, Sheng-Wei / Huang, Her-Hsiung et al. | 2016
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Atomic bonding effects in annular dark field scanning transmission electron microscopy. II. ExperimentsOdlyzko, Michael L. / Held, Jacob T. / Mkhoyan, K. Andre et al. | 2016
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Atomic bonding effects in annular dark field scanning transmission electron microscopy. I. Computational predictionsOdlyzko, Michael L. / Himmetoglu, Burak / Cococcioni, Matteo / Mkhoyan, K. Andre et al. | 2016
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Fabrication of Nb/Pb structures through ultrashort pulsed laser depositionGontad, Francisco / Lorusso, Antonella / Klini, Argyro / Broitman, Esteban / Perrone, Alessio / Fotakis, Costas et al. | 2016
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Use of aluminum oxide as a permeation barrier for producing thin films on aluminum substratesProvo, James L. et al. | 2016
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Studies on cathodic arc PVD grown TiCrN based erosion resistant thin filmsValleti, Krishna / C, Puneet / L, Rama Krishna / Joshi, Shrikant V. et al. | 2016
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Defect formation during chlorine-based dry etching and their effects on the electronic and structural properties of InP/InAsP quantum wellsLandesman, Jean-Pierre / Jiménez, Juan / Levallois, Christophe / Pommereau, Frédéric / Frigeri, Cesare / Torres, Alfredo / Léger, Yoan / Beck, Alexandre / Rhallabi, Ahmed et al. | 2016
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Analysis of compositional uniformity in AlxGa1−xN thin films using atom probe tomography and electron microscopyLiu, Fang / Huang, Li / Porter, Lisa M. / Davis, Robert F. / Schreiber, Daniel K. et al. | 2016
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XPS study of thermal and electron-induced decomposition of Ni and Co acetylacetonate thin films for metal depositionWeiss, Theodor / Warneke, Jonas / Zielasek, Volkmar / Swiderek, Petra / Bäumer, Marcus et al. | 2016
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Growth and structural evolution of Sn on Ag(001): Epitaxial monolayer to thick alloy filmChakraborty, Suvankar / Menon, Krishnakumar S. R. et al. | 2016
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X-ray photoelectron spectroscopy for identification of morphological defects and disorders in graphene devicesAydogan, Pinar / Polat, Emre O. / Kocabas, Coskun / Suzer, Sefik et al. | 2016
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Time-resolved ion flux and impedance measurements for process characterization in reactive high-power impulse magnetron sputteringLundin, Daniel / Čada, Martin / Hubička, Zdenĕk et al. | 2016
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Large-scale molecular dynamics simulations of TiN/TiN(001) epitaxial film growthEdström, Daniel / Sangiovanni, Davide G. / Hultman, Lars / Petrov, Ivan / Greene, J. E. / Chirita, Valeriu et al. | 2016
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High performance Schottky diodes based on indium-gallium-zinc-oxideZhang, Jiawei / Xin, Qian / Song, Aimin et al. | 2016
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Substrate impact on the low-temperature growth of GaN thin films by plasma-assisted atomic layer depositionKizir, Seda / Haider, Ali / Biyikli, Necmi et al. | 2016
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Method for measuring thermal accommodation coefficients of gases on thin film surfaces using a MEMS sensor structureGrau, Mario / Völklein, Friedemann / Meier, Andreas / Kunz, Christina / Heidler, Jonas / Woias, Peter et al. | 2016
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Gas discharge plasma treatment of poly(ethylene glycol-co-1,3/1,4 cyclohexanedimethanol terephthalate) for enhanced paint adhesionSalapare, Hernando S. / Cosiñero, Hannah Shamina O. / Suarez, Beverly Anne T. / Bacaoco, Miguel Y. / Nuñez, Julius Andrew P. / Guittard, Frédéric / Ramos, Henry J. et al. | 2016
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Solventless grafting of functional polymer coatings onto Parylene CDe Luna, Mark M. / Chen, Benny / Bradley, Laura C. / Bhandia, Ravi / Gupta, Malancha et al. | 2016
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Impact of reduced graphene oxide on MoS2 grown by sulfurization of sputtered MoO3 and Mo precursor filmsPacley, Shanee / Hu, Jianjun / Jespersen, Michael / Hilton, Al / Waite, Adam / Brausch, Jacob / Beck-Millerton, Emory / Voevodin, Andrey A. et al. | 2016
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Formation of a SiOF reaction intermixing layer on SiO2 etching using C4F6/O2/Ar plasmasOhya, Yoshinobu / Tomura, Maju / Ishikawa, Kenji / Sekine, Makoto / Hori, Masaru et al. | 2016
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Target poisoning during CrN deposition by mixed high power impulse magnetron sputtering and unbalanced magnetron sputtering techniquePurandare, Yashodhan P. / Ehiasarian, Arutiun P. / Eh Hovsepian, Papken et al. | 2016
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Atomic layer deposition of (K,Na)(Nb,Ta)O3 thin filmsSønsteby, Henrik Hovde / Nilsen, Ola / Fjellvåg, Helmer et al. | 2016
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Effect of the chamber wall on fluorocarbon-assisted atomic layer etching of SiO2 using cyclic Ar/C4F8 plasmaKawakami, Masatoshi / Metzler, Dominik / Li, Chen / Oehrlein, Gottlieb S. et al. | 2016
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Fluorocarbon based atomic layer etching of Si3N4 and etching selectivity of SiO2 over Si3N4Li, Chen / Metzler, Dominik / Lai, Chiukin Steven / Hudson, Eric A. / Oehrlein, Gottlieb S. et al. | 2016
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Adsorption of n-butane on graphene/Ru(0001)—A molecular beam scattering studySivapragasam, Nilushni / Nayakasinghe, Mindika T. / Burghaus, Uwe et al. | 2016
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Roughness generation during Si etching in Cl2 pulsed plasmaMourey, Odile / Petit-Etienne, Camille / Cunge, Gilles / Darnon, Maxime / Despiau-Pujo, Emilie / Brichon, Paulin / Lattu-Romain, Eddy / Pons, Michel / Joubert, Olivier et al. | 2016
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Fast and low-cost method to fabricate large-area superhydrophobic surface on steel substrate with anticorrosion and anti-icing propertiesYan, Wei / Liu, Hongtao / Chen, Tianchi / Sun, Qinghe / Zhu, Wei et al. | 2016
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Silicon nitride and silicon etching by CH3F/O2 and CH3F/CO2 plasma beamsKaler, Sanbir S. / Lou, Qiaowei / Donnelly, Vincent M. / Economou, Demetre J. et al. | 2016
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Gas cluster ion beam for the characterization of organic materials in submarine basalts as Mars analogsSano, Naoko / Purvis, Graham W. H. / Barlow, Anders J. / Abbott, Geoffrey D. / Gray, Neil N. D. / Cumpson, Peter J. et al. | 2016
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Atomic layer deposited nanocrystalline tungsten carbides thin films as a metal gate and diffusion barrier for Cu metallizationKim, Jun Beom / Kim, Soo-Hyun / Han, Won Seok / Lee, Do-Joong et al. | 2016
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Formation of homologous In2O3(ZnO)m thin films and its thermoelectric propertiesJia, Junjun / Ow-Yang, Cleva / Inan Akmehmet, Güliz / Nakamura, Shin-ichi / Kato, Kunihisa / Shigesato, Yuzo et al. | 2016
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Surface passivation of Fe3O4 nanoparticles with Al2O3 via atomic layer deposition in a rotating fluidized bed reactorDuan, Chen-Long / Deng, Zhang / Cao, Kun / Yin, Hong-Feng / Shan, Bin / Chen, Rong et al. | 2016