Experiment-based modeling of a vapor draw ampoule used for low-volatility precursors (English)
- New search for: Sperling, Brent A.
- New search for: Maslar, James E.
- New search for: Sperling, Brent A.
- New search for: Maslar, James E.
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
37
, 6
;
9
;
2019
- Article (Journal) / Electronic Resource
-
Title:Experiment-based modeling of a vapor draw ampoule used for low-volatility precursors
-
Contributors:Sperling, Brent A. ( author ) / Maslar, James E. ( author )
-
Published in:
-
Publisher:
- New search for: American Vacuum Society
-
Publication date:2019-11-01
-
Size:9 pages
-
ISSN:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Electronic Resource
-
Language:English
-
Keywords:
-
Source:
Table of contents – Volume 37, Issue 6
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
-
Mechanical properties of VMoNO as a function of oxygen concentration: Toward development of hard and tough refractory oxynitridesEdström, Daniel / Sangiovanni, Davide G. / Landälv, Ludvig / Eklund, Per / Greene, J. E. / Petrov, Ivan / Hultman, Lars / Chirita, Valeriu et al. | 2019
-
Temperature and oxygen concentration effects on anisotropy in chromium hard mask etching for nanoscale fabricationStaaks, Daniel / Yu, Zhaoning / Dhuey, Scott D. / Sassolini, Simone / Lee, Kim Y. / Rangelow, Ivo W. / Olynick, Deirdre L. et al. | 2019
-
Metal-assisted chemical etching of silicon and achieving pore sizes as small as 30 nm by altering gold thicknessKheyraddini Mousavi, Behnam / Behzadirad, Mahmoud / Silani, Yaser / Karbasian, Farshid / Kheyraddini Mousavi, Arash / Mohajerzadeh, Shams et al. | 2019
-
Distinct defect appearance in Gd implanted polar and nonpolar ZnO surfaces in connection to ion channeling effectJagerová, Adéla / Malinský, Petr / Mikšová, Romana / Nekvindová, Pavla / Cajzl, Jakub / Akhmadaliev, Shavkat / Holý, Václav / Macková, Anna et al. | 2019
-
Improving vacuum performance in the warm linac of the Spallation Neutron SourceStone, Christopher M. / Gerber, Neal / Price, Jeremy P. / Pelfrey, Jonathan D. / Johnson, Jonathan D. / Crawford, James Steven / Baker, Stan / Geng, Xiaosong / Williams, Derrick / Ocker, Katherine D. et al. | 2019
-
Room temperature atomic layer deposition of niobium oxide using plasma excited humidified argon and its application to anticorrosion to hydrochloric acidYoshida, Kazuki / Tokoro, Kentaro / Kanomata, Kensaku / Miura, Masanori / Saito, Kentaro / Ahmmad, Bashir / Kubota, Shigeru / Hirose, Fumihiko et al. | 2019
-
Atomic layer deposition of silicon-based dielectrics for semiconductor manufacturing: Current status and future outlookOvanesyan, Rafaiel A. / Filatova, Ekaterina A. / Elliott, Simon D. / Hausmann, Dennis M. / Smith, David C. / Agarwal, Sumit et al. | 2019
-
Controlling the refractive index and third-order nonlinearity of polyimide/Ta2O5 nanolaminates for optical applicationsFärm, Elina / Mehravar, Soroush / Kieu, Khanh / Peyghambarian, Nasser / Ritala, Mikko / Leskelä, Markku / Kemell, Marianna et al. | 2019
-
Role of plasma properties in controlling crystallinity and phase in oxide films grown by plasma-enhanced atomic layer epitaxyBoris, David R. / Wheeler, Virginia D. / Avila, Jason R. / Qadri, Syed B. / Eddy, Charles R. / Walton, Scott G. et al. | 2019
-
Experiment-based modeling of a vapor draw ampoule used for low-volatility precursorsSperling, Brent A. / Maslar, James E. et al. | 2019
-
Dark current–voltage characteristics of vacuum deposited multilayer amorphous selenium-alloy detectors and the effect of x-ray irradiationFrey, Joel B. / Sadasivam, Kalaivani / Belev, George / Mani, Habib / Laperriere, Luc / Kasap, Safa et al. | 2019
-
Sputter deposition and thermal evaporation of Li2O, Li2S, and Li2Se filmsLorger, Simon / Fischer, Dieter / Usiskin, Robert / Maier, Joachim et al. | 2019
-
Effect of the plasma confinement on properties of a-C:H:SiOx films grown by plasma enhanced chemical vapor depositionGrenadyorov, Alexander S. / Solovyev, Аndrey А. / Oskomov, Konstantin V. / Oskirko, Vladimir O. et al. | 2019
-
Atomic layer deposition of h-BN(0001) multilayers on Ni(111) and chemical vapor deposition of graphene on h-BN(0001)/Ni(111)Jones, Jessica / Pilli, Aparna / Lee, Veronica / Beatty, John / Beauclair, Brock / Chugh, Natasha / Kelber, Jeffry et al. | 2019
-
Growth of cobalt films at room temperature using sequential exposures of cobalt tricarbonyl nitrosyl and low energy electronsSobell, Zachary C. / Cavanagh, Andrew S. / George, Steven M. et al. | 2019
-
Cathodoluminescence degradation of Y2O3:Dy3+ nanophosphor for field emission displaysNagarasanakote Jayaramu, Shivaramu / Coetsee, Elizabeth / Swart, Hendrik C. et al. | 2019
-
Uniform and smooth molybdenum film produced through picosecond pulsed laser depositionDai, Shoujun / Yu, Jin / Mo, Zeqiang / Wang, Jinduo / He, Jianguo / Meng, Jingjing / Wang, Xiaodong et al. | 2019
-
Electrical characteristics of Li and N co-doped amorphous InZnSnO thin film transistorsSu, Jinbao / Ma, Yaobin / Yang, Hui / Li, Ran / Jia, Lanchao / Liu, Depeng / Zhang, Xiqing et al. | 2019
-
All-oxide thin-film transistors with channels of mixed InOx-ZnOy formed by plasma-enhanced atomic layer deposition processLee, Jeong-Mu / Lee, Hwan-Jae / Pi, Jae-Eun / Yang, Jong-Heon / Lee, Jeong Hun / Ahn, Seong-Deok / Kang, Seung-Youl / Moon, Jaehyun et al. | 2019
-
Reactivity in metal-Ge-Te systems: Thermodynamic predictions and experimental observationsCooley, Kayla A. / Mohney, Suzanne E. et al. | 2019
-
Paradigm shift in thin-film growth by magnetron sputtering: From gas-ion to metal-ion irradiation of the growing filmGreczynski, Grzegorz / Petrov, Ivan / Greene, J. E. / Hultman, Lars et al. | 2019
-
Effect of the substrate on structure and properties of titanium nitride films grown by plasma enhanced atomic layer depositionKrylov, Igor / Xu, Xianbin / Qi, Yuanshen / Weinfeld, Kamira / Korchnoy, Valentina / Eizenberg, Moshe / Ritter, Dan et al. | 2019
-
Photoassisted atomic layer deposition of oxides employing alkoxides as single-source precursorsMiikkulainen, Ville / Väyrynen, Katja / Mizohata, Kenichiro / Räisänen, Jyrki / Vehkamäki, Marko / Ritala, Mikko et al. | 2019
-
BBr3 as a boron source in plasma-assisted molecular beam epitaxyCramer, Richard C. / English, John / Bonef, Bastien / Speck, James S. et al. | 2019
-
Effect of two-step post-treatment on optical properties, microstructure, and nanosecond laser damage threshold of HfO2/TiO2/SiO2 multilayer high reflection filmsMao, Sida / Fan, Jie / Zou, Yonggang / Lan, Yunping / Xu, Yingtian / Zhang, Jiabin / Dong, Jianing / Ma, Xiaohui et al. | 2019
-
Fabrication of Mg2Sn(111) film by molecular beam epitaxyAizawa, Takashi / Ohkubo, Isao / Lima, Mariana S. L. / Sakurai, Takeaki / Mori, Takao et al. | 2019
-
Role of sulfur in catalyzing fluorine atom fast etching of silicon with smooth surface morphologyArora, Priyanka / Nguyen, Tam / Chawla, Aseem / Nam, Sang-Ki / Donnelly, Vincent M. et al. | 2019
-
Influence of Si doping and O2 flow on arc-deposited (Al,Cr)2O3 coatingsLandälv, Ludvig / Göthelid, Emmanuelle / Jensen, Jens / Greczynski, Grzegorz / Lu, Jun / Ahlgren, Mats / Hultman, Lars / Alling, Björn / Eklund, Per et al. | 2019
-
Progress in the synthesis of Al- and Cr-based sesquioxide coatings for protective applicationsKoller, Christian Martin / Stueber, Michael / Mayrhofer, Paul-Heinz et al. | 2019
-
Plasma-enhanced atomic layer deposition of vanadium nitrideKozen, Alexander C. / Sowa, Mark J. / Ju, Ling / Strandwitz, Nicholas C. / Zeng, Guosong / Babuska, Tomas F. / Hsain, Zakaria / Krick, Brandon A. et al. | 2019
-
In situ Auger electron spectroscopy of complex oxide surfaces grown by pulsed laser depositionOrvis, Thomas / Surendran, Mythili / Liu, Yang / Cunniff, Austin / Ravichandran, Jayakanth et al. | 2019
-
Characterization of electron-beam deposited SnS films: Processing, properties, and ohmic contactsHajzus, Jenifer R. / Porter, Lisa M. et al. | 2019
-
Temperature dependent Seebeck coefficient and thermal conductivity properties of graphene undoped and doped Ca-Pr-Co oxide thermoelectric nanocompositesKoçyiğit, Serhat / Aytimur, Arda / Uslu, Ibrahim et al. | 2019
-
Effects of power per pulse on reactive HiPIMS deposition of ZrO2 films: A time-resolved optical emission spectroscopy studyPajdarová, Andrea D. / Vlček, Jaroslav et al. | 2019
-
Fabricating Fe nanocrystals via encapsulation at the graphite surfaceLii-Rosales, Ann / Han, Yong / Lai, King C. / Jing, Dapeng / Tringides, Michael C. / Evans, James W. / Thiel, Patricia A. et al. | 2019
-
Probing site-dependent decoupling of hexagonal boron nitride with molecular frontier orbitalsMehler, Alexander / Néel, Nicolas / Kröger, Jörg et al. | 2019
-
Investigation on the influence of oxygen on the deformation and cracking behavior of (Cr,Al)ON hard coatings using combinatorial static and dynamic loadingsBrögelmann, Tobias / Bobzin, Kirsten / Kruppe, Nathan Christopher / Arghavani, Mostafa et al. | 2019
-
Hexagonal boron nitride grown using high atomic boron emission during microwave plasma chemical vapor depositionChakrabarty, Kallol / Arnold, Ivan / Catledge, Shane A. et al. | 2019
-
Identification of defect species in ZnO thin films through process modification and monitoring of photoluminescent propertiesAkazawa, Housei et al. | 2019
-
Universal software for the real-time control of sequential processing techniquesPilz, Julian / Tazreiter, Martin / Coclite, Anna Maria et al. | 2019
-
Oxygen-based digital etching of AlGaN/GaN structures with AlN as etch-stop layersWu, Jingyi / Lei, Siqi / Cheng, Wei-Chih / Sokolovskij, Robert / Wang, Qing / Xia, Guangrui (Maggie) / Yu, Hongyu et al. | 2019
-
Corrosion protection of Cu by atomic layer depositionCremers, Véronique / Rampelberg, Geert / Baert, Kitty / Abrahami, Shoshan / Claes, Nathalie / de Oliveira, Thais Milagres / Terryn, Herman / Bals, Sara / Dendooven, Jolien / Detavernier, Christophe et al. | 2019
-
Review of high-throughput approaches to search for piezoelectric nitridesTalley, Kevin R. / Sherbondy, Rachel / Zakutayev, Andriy / Brennecka, Geoff L. et al. | 2019
-
Morphology influence in rapid plasma nitriding of hafnium layer for HfSiON film growthKitajima, Takeshi / Kage, Ryosuke / Nakano, Toshiki et al. | 2019
-
Radical recombination sensor based on dual probe thermopile heat flux sensorsVelthuis, Johannes F. M. / Storm, Arnold / van Kampen, Maarten / van der Horst, Ruud / Profijt, Harald B. et al. | 2019
-
Reaction mechanism of N atoms interaction with low-k organosilicate glass films: Dynamic density functional theory studyVoronina, Ekaterina N. / Mankelevich, Yuri A. / Rakhimova, Tatyana V. / Lopaev, Dmitry V. et al. | 2019