Characteristics of a monolithically integrated micro-displacement sensor (English)
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- New search for: Takeshita, Toshihiro
- New search for: Peng, Yao
- New search for: Morita, Nobutomo
- New search for: Ando, Hideyuki
- New search for: Higurashi, Eiji
- New search for: Sawada, Renshi
- New search for: Takeshita, Toshihiro
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- New search for: Morita, Nobutomo
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- Article (Journal) / Electronic Resource
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Title:Characteristics of a monolithically integrated micro-displacement sensor
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Contributors:Takeshita, Toshihiro ( author ) / Peng, Yao ( author ) / Morita, Nobutomo ( author ) / Ando, Hideyuki ( author ) / Higurashi, Eiji ( author ) / Sawada, Renshi ( author ) / Joint International IMEKO TC1 + TC7 + TC 13 Symposium Intelligent Quality Measurements - Theory, Education and Training; 14 (Jena)
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Publication date:2011-12-06
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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DDC: 620 -
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