Phase control of Al2O3 thin films grown at low temperatures (English)
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- New search for: Andersson, Jon Martin
- New search for: Wallin, Erik
- New search for: Helmersson, Ulf
- New search for: Kreissig, U.
- New search for: Münger, E. Peter
- New search for: Andersson, Jon Martin
- New search for: Wallin, Erik
- New search for: Helmersson, Ulf
- New search for: Kreissig, U.
- New search for: Münger, E. Peter
- Article (Journal) / Electronic Resource
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Title:Phase control of Al2O3 thin films grown at low temperatures
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Contributors:Andersson, Jon Martin ( author ) / Wallin, Erik ( author ) / Helmersson, Ulf ( author ) / Kreissig, U. ( author ) / Münger, E. Peter ( author )
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Publication date:2006-01-01
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Remarks:doi:10.1016/j.tsf.2006.01.016
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
- New search for: 620
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Keywords:
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DDC: 620 -
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