Copper Metallization for Current Very Large Scale Integration (English)
- New search for: Jiang, Q.
- New search for: F. Zhu, Y.
- New search for: Zhao, M.
- New search for: Jiang, Q.
- New search for: F. Zhu, Y.
- New search for: Zhao, M.
In:
Recent Patents on Nanotechnology
;
5
, 2
;
106-137
;
2011
-
ISSN:
- Article (Journal) / Electronic Resource
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Title:Copper Metallization for Current Very Large Scale Integration
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Additional title:NANOTEC
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Contributors:
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Published in:Recent Patents on Nanotechnology ; 5, 2 ; 106-137
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Publisher:
- New search for: Bentham Science Publishers Ltd.
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Publication date:2011-04-01
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Size:32 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:Cu interconnects , low-k dielectrics , barrier structure , very large scale integration , Copper Metallization , Large Scale Integration , microelectronics , velocity of electromagnetic waves , Interconnect technology , electromigration , electrical parameters , diffusion progress , Electrical Resistivity , Oxidation Resistance , CMP Process , Thermal Annealing Process , Surface Treatment Process , Nanoscience & Nanotechnology
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Source:
Table of contents – Volume 5, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 76
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Green Nanotechnology of Trends in Future EnergyWei Guo, Kelvii et al. | 2011
- 89
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Development of Natural Zeolites for Their Use in Water-Treatment SystemsMargeta, K. / Vojnovic, B. / Zabukovec Logar, N. et al. | 2011
- 100
-
Recent Achievements in Nanostructured Photovoltaic DevicesM. Khlyap, Halyna / I. Laptev, Viktor et al. | 2011
- 106
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Copper Metallization for Current Very Large Scale IntegrationJiang, Q. / F. Zhu, Y. / Zhao, M. et al. | 2011
- 138
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Recent Progress in p-Type Doping and Optical Properties of SnO2 Nanostructures for Optoelectronic Device ApplicationsPan, Shusheng / Li, Guanghai et al. | 2011
- 162
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Patent SelectionsBentham Science Publishers et al. | 2011