Pressure dependence of dissociation fraction and optical emission characteristics in low-pressure inductively coupled N2-Ar plasmas (Unknown)
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- New search for: T. H. Chung
- New search for: Y. W. Lee
- New search for: H. M. Joh
- New search for: M. A. Song
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Title:Pressure dependence of dissociation fraction and optical emission characteristics in low-pressure inductively coupled N2-Ar plasmas
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Published in:
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Publisher:
- New search for: AIP Publishing LLC
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Publication date:2011
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:Unknown
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