Surface cleaning and pure nitridation of GaSb by in-situ plasma processing (Unknown)
Free access
- New search for: Takahiro Gotow
- New search for: Sachie Fujikawa
- New search for: Hiroki I. Fujishiro
- New search for: Mutsuo Ogura
- New search for: Wen Hsin Chang
- New search for: Tetsuji Yasuda
- New search for: Tatsuro Maeda
- New search for: Takahiro Gotow
- New search for: Sachie Fujikawa
- New search for: Hiroki I. Fujishiro
- New search for: Mutsuo Ogura
- New search for: Wen Hsin Chang
- New search for: Tetsuji Yasuda
- New search for: Tatsuro Maeda
-
ISSN:
- Article (Journal) / Electronic Resource
-
Title:Surface cleaning and pure nitridation of GaSb by in-situ plasma processing
-
Contributors:Takahiro Gotow ( author ) / Sachie Fujikawa ( author ) / Hiroki I. Fujishiro ( author ) / Mutsuo Ogura ( author ) / Wen Hsin Chang ( author ) / Tetsuji Yasuda ( author ) / Tatsuro Maeda ( author )
-
Published in:
-
Publisher:
- New search for: AIP Publishing LLC
-
Publication date:2017
-
ISSN:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Electronic Resource
-
Language:Unknown
-
Keywords:
-
Source:
Metadata by DOAJ is licensed under CC BY-SA 1.0