A Novel Dry Selective Isotropic Atomic Layer Etching of SiGe for Manufacturing Vertical Nanowire Array with Diameter Less than 20 nm (Unknown)
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In:
Materials, Vol 13, Iss 3, p 771 (2020)
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2020
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ISSN:
- Article (Journal) / Electronic Resource
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Title:A Novel Dry Selective Isotropic Atomic Layer Etching of SiGe for Manufacturing Vertical Nanowire Array with Diameter Less than 20 nm
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Contributors:Junjie Li ( author ) / Yongliang Li ( author ) / Na Zhou ( author ) / Guilei Wang ( author ) / Qingzhu Zhang ( author ) / Anyan Du ( author ) / Yongkui Zhang ( author ) / Jianfeng Gao ( author ) / Zhenzhen Kong ( author ) / Hongxiao Lin ( author )
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Published in:
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Publisher:
- New search for: MDPI AG
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Publication date:2020
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:Unknown
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Keywords:vertical nanopillar , atomic layer etching , sige , field effect transistor , nano device , sensor material , Technology , T , Electrical engineering. Electronics. Nuclear engineering , TK1-9971 , Engineering (General). Civil engineering (General) , TA1-2040 , Microscopy , QH201-278.5 , Descriptive and experimental mechanics , QC120-168.85
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Source:
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