Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module (Unknown)
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In:
Sensors, Vol 13, Iss 1, Pp 1085-1101 (2013)
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2013
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ISSN:
- Article (Journal) / Electronic Resource
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Title:Monolithic Composite “Pressure + Acceleration + Temperature + Infrared” Sensor Using a Versatile Single-Sided “SiN/Poly-Si/Al” Process-Module
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Contributors:
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Published in:
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Publisher:
- New search for: MDPI AG
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Publication date:2013
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:Unknown
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Keywords:
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Source:
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