Effect of N2/Ar flow ratio on the structural and electrical properties of SrHfON thin films prepared by magnetron sputtering (English)
- New search for: Tian, Hao
- New search for: Feng, Li-ping
- New search for: Liu, Zheng-tang
- New search for: Tian, Hao
- New search for: Feng, Li-ping
- New search for: Liu, Zheng-tang
In:
Vacuum
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109
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139-143
;
2014
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ISSN:
- Article (Journal) / Electronic Resource
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Title:Effect of N2/Ar flow ratio on the structural and electrical properties of SrHfON thin films prepared by magnetron sputtering
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Contributors:
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Published in:Vacuum ; 109 ; 139-143
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Publisher:
- New search for: Elsevier Ltd
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Publication date:2014-07-04
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Size:5 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 109
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Effect of implantation temperature on exfoliation of H2 +-implanted SiLi, B.S. / Wang, Z.G. / Du, Y.Y. / Wei, K.F. / Yao, C.F. / Cui, M.H. / Li, Y.F. / Zhu, H.P. et al. | 2014
- 8
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Comparison of spatial distributions of atomic oxygen and hydrogen in ICP by means of catalytic probes and actinometryKregar, Z. / Zaplotnik, R. / Mozetič, M. / Milošević, S. et al. | 2014
- 15
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Effect of substrate temperature on SiC interlayers for diamond coatings deposition on WC-Co substratesHei, Hongjun / Shen, Yanyan / Ma, Jing / Li, Xiaojing / Yu, Shengwang / Tang, Bin / Tang, Weizhong et al. | 2014
- 21
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Effect of substrate on the dielectric properties of bismuth magnesium niobate thin films prepared by RF magnetron sputteringLi, Lingxia / Xu, Dan / Yu, Shihui / Dong, Helei / Jin, Yuxin / Zheng, Haoran et al. | 2014
- 26
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Considerations for the physical vapor deposition of high molar mass organic compoundsCastrucci, Jeffrey S. / Dang, Jeremy D. / Kamino, Brett A. / Campbell, Andrew / Pitts, David / Lu, Zheng-Hong / Bender, Timothy P. et al. | 2014
- 34
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Numerical study and simulation of a 170 GHz megawatt-level corrugated coaxial-gyrotronQin, Mimi / Luo, Yong / Yang, Kuo / Huang, Yong / Li, Hongfu et al. | 2014
- 43
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Properties of TiSiN coatings deposited by hybrid HiPIMS and pulsed-DC magnetron co-sputteringArab Pour Yazdi, M. / Lomello, F. / Wang, J. / Sanchette, F. / Dong, Z. / White, T. / Wouters, Y. / Schuster, F. / Billard, A. et al. | 2014
- 52
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Simulation of inductively coupled plasma with applied bias voltage using COMSOLOchoa Brezmes, Angel / Breitkopf, Cornelia et al. | 2014
- 61
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Measurement of LiCl removal behavior from porous solids by vacuum evaporationPark, Byung Heung / Oh, Seung-Chul / Hur, Jin-Mok et al. | 2014
- 68
-
Coordinated analysis of multiple factors of argon blowing parameters on the effect of circulation flow rate in RH vacuum refining processHan, Jie / Wang, Xiao-dong / Ba, De-chun et al. | 2014
- 74
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MOCVD-grown textured surface ZnO transparent conductive layers with modulated structure for thin film solar cellsChen, Xin-liang / Yang, Xu / Liu, Jie-ming / Zhang, De-kun / Zhang, Jian-jun / Zhao, Ying / Zhang, Xiao-dan et al. | 2014
- 78
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Ion extraction from a flowing plasma using electrostatic field: Simulation and experimentBaruah, S. / Jana, B. / Majumdar, A. / Sahu, G.K. / Thakur, K.B. / Das, A.K. et al. | 2014
- 82
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Degassing of aluminum alloys via the electromagnetic directional solidificationRen, Yongsheng / Ma, Wenhui / Wei, Kuixian / Yu, Wenzhou / Dai, Yongnian / Morita, Kazuki et al. | 2014
- 86
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Characterization of the Si3N4/42CrMo joints vacuum brazed with Pd modified filler alloy for high temperature applicationHe, Yanming / Zhang, Jie / Lv, Peiling / Liu, Chunfeng et al. | 2014
- 94
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Consequence of source material on the surface properties of nebulizer spray coated cerium oxide thin filmsSuresh, R. / Ponnuswamy, V. / Mariappan, R. et al. | 2014
- 102
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Evolution of hydrogen from AISI 200 stainless steel: A study to determine whether it is a diffusion or recombination limited process and experimental evidence for strongly bound hydrogenNemanič, V. / Šetina, J. et al. | 2014
- 108
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Effects of sputtering power on properties of PbSe nanocrystalline thin films deposited by RF magnetron sputteringFeng, Wenran / Wang, Xiaoyang / Zhou, Hai / Chen, Fei et al. | 2014
- 112
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Microstructure and mechanical properties of a Mo-toughened Mo3Si-based in situ nanocompositeXu, Jiang / Hu, Wei / Yan, Yong / Lu, Xiaolin / Munroe, Paul / Xie, Zong-Han et al. | 2014
- 120
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Observation on array of PbTe nanocrystals embedded in amorphous InSe multiple quantum wellsManonmani Parvathi, M. / Arivazhagan, V. / Rajesh, S. et al. | 2014
- 124
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On the phase transformation of Ag-41.53Mg (at.%) – An in situ XRD studyDai, Cong / Forbes, Scott et al. | 2014
- 127
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Process optimization for vacuum distillation of Sn–Sb alloy by response surface methodologyWang, Anxiang / Li, Yifu / Yang, Bin / Xu, Baoqiang / Kong, Lingxin / Liu, Dachun et al. | 2014
- 135
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Visible light activated photocatalytic TaON coatings deposited via pulsed-DC magnetron sputteringRatova, M. / West, G.T. / Kelly, P.J. et al. | 2014
- 139
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Effect of N2/Ar flow ratio on the structural and electrical properties of SrHfON thin films prepared by magnetron sputteringTian, Hao / Feng, Li-ping / Liu, Zheng-tang et al. | 2014
- 144
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A novel rapid D.C. salt bath nitrocarburizing technologyZhou, Zhengshou / Dai, Mingyang / Shen, Zhiyuan / Hu, Jing et al. | 2014
- 148
-
Electron beam assisted joining of nanograin-sized Fe–Co–V magnetic foils: Study and optimization of magnetic properties of weld jointsMostaan, H. / Shamanian, M. / Monirvaghefi, S.M. / Behjati, P. / Szpunar, J.A. / Sherafati, J. et al. | 2014
- 157
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Influence of post ageing on creep behaviour of aluminized Ni-based single crystal superalloy prepared by low-activity high-temperatureLatief, F.H. / Kakehi, K. et al. | 2014
- 162
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Effect of Ni addition on the dielectric strength and liquid phase separation of Cu–Cr alloys during the vacuum breakdownWei, Xin / Yu, Demei / Sun, Zhanbo / Yang, Zhimao / Song, Xiaoping / Ding, Bingjun et al. | 2014
- 166
-
Development of low-pressure high-frequency plasma chemical vapor deposition method on surface modification of silicon waferThungsuk, Nuttee / Nuchuay, Peerapong / Hirotani, Daisuke / Okamura, Yoshimi / Nakabayashi, Kenichi / Kinoshita, Hiroyuki / Yuji, Toshifumi / Mungkung, Narong / Kasayapanand, Nat et al. | 2014
- 170
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Characterization and effect of pre-oxidation on D.C. plasma nitriding for AISI4140 steelLiu, Han / Li, Jing-cai / Sun, Fei / Hu, Jing et al. | 2014
- 175
-
Effect of growth temperature on structural and morphological evolution of epitaxial SrTiO3 thin films grown on LaAlO3 (001) substrates by ion beam sputter depositionPanomsuwan, Gasidit / Takai, Osamu / Saito, Nagahiro et al. | 2014
- 180
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On the hydrogenated silicon carbide (SiCx:H) interlayer properties prompting adhesion of hydrogenated amorphous carbon (a-C:H) deposited on steelCemin, F. / Bim, L.T. / Menezes, C.M. / Aguzzoli, C. / Maia da Costa, M.E.H. / Baumvol, I.J.R. / Alvarez, F. / Figueroa, C.A. et al. | 2014
- 184
-
Melting of solids under high pressureHieu, Ho Khac et al. | 2014
- 187
-
Study on valence band and work function of n-type Hg3In2Te6 single crystal by photoelectron spectroscopyLi, Yapeng / Fu, Li / Liu, Congyuan et al. | 2014
- 191
-
Hydrogenation properties of Pd-coated Zr-based Laves phase compoundsZhang, Mi / Hu, Rui / Zhang, Tiebang / Kou, Hongchao / Li, Jinshan / Xue, Xiangyi et al. | 2014
- 197
-
Emission spectra dependence on voltage and emissive layer layout in organic light-emitting diodesLü, Zhaoyue / Hou, Ying / Xiao, Jing / Xu, Haisheng et al. | 2014
- 200
-
Nanopattern formation in UV laser treated a-AlOx and nc-Al/AlOx layersSzívós, János / Serényi, M. / Gergely-Fülöp, E. / Lohner, T. / Sáfrán, G. et al. | 2014
- 206
-
Chlorination-disproportionation of Al4O4C and Al4C3 in vacuumFeng, Yuebin / Yang, Bin / Yu, Qingchun / Dai, Yongnian et al. | 2014
- 212
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An investigation of the properties of epitaxial chromium-substituted vanadium carbide thin filmsCarroll, John / Krchnavek, Robert / Lunk, Carl / Scabarozi, Theodore / Lofland, Samuel / Hettinger, Jeffrey et al. | 2014
- 216
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Pulsed vacuum and etching systems: Theoretical design considerations for a pulsed vacuum system and its application to XeF2 etching of SiMousavi, Arash Kheyraddini / Abbas, Khawar / Elahi, Mirza Mohammad Mahbube / Lima, Edidson / Moya, Stephen / Butner, Joseph Daniel / Piñon, Denise / Benga, Adeeko / Mousavi, Behnam Kheyraddini / Leseman, Zayd Chad et al. | 2014
- 223
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V2O5 precursor-templated synthesis of textured nanoparticles based VN nanofibers and their exploration as efficient field emitterDewangan, Khemchand / Patil, Girish P. / Kashid, Ranjit V. / Bagal, Vivekanand S. / More, M.A. / Joag, D.S. / Gajbhiye, N.S. / Chavan, Padmakar G. et al. | 2014
- 230
-
Temperature dependence of hydrogen depth distribution in the near-surface region of stainless steelTakeyasu, Kotaro / Matsumoto, Masuaki / Fukutani, Katsuyuki et al. | 2014
- 235
-
EditorialSharipov, Felix / Malyshev, Oleg B. et al. | 2014
- 236
-
Rarefied gas flow into vacuum through a pipe composed of two circular sections of different radiiTitarev, V.A. / Shakhov, E.M. et al. | 2014
- 246
-
Ab initio simulation of rarefied gas flow through a thin orificeSharipov, Felix / Strapasson, José L. et al. | 2014
- 253
-
Numerical study of unsteady rarefied gas flow through an orificeHo, M.T. / Graur, I. et al. | 2014
- 266
-
Application a hybrid solver to gas flow through a slit at arbitrary pressure ratioRovenskaya, O. / Croce, G. et al. | 2014
- 275
-
A hybrid continuum-particle solver for unsteady rarefied gas flowsPantazis, S. / Rusche, H. et al. | 2014
- 284
-
Non-stationary rarefied gas flow into vacuum from a circular pipe closed at one endShakhov, E.M. / Titarev, V.A. et al. | 2014
- 294
-
Numerical study of thermal creep flow between two ratchet surfacesChen, J. / Baldas, L. / Colin, S. et al. | 2014
- 302
-
Pressure driven flows of rarefied gases through long channels with double trapezoidal cross-sectionsSzalmás, Lajos et al. | 2014
- 308
-
Effects of exit boundary conditions on results of kinetic simulations of spherical expansion of mon- and diatomic gases in a gravitational fieldVolkov, Alexey N. et al. | 2014
- 319
-
Computation of 1-D shock structure in a gas in rotational non-equilibrium using a new set of simplified Burnett equationsZhao, Wenwen / Chen, Weifang / Liu, Hualin / Agarwal, Ramesh K. et al. | 2014
- 326
-
Numerical modelling of thermoacoustic waves in a rarefied gas confined between coaxial cylindersKalempa, Denize / Sharipov, Felix et al. | 2014
- 333
-
Heat transfer and fluid characteristics of rarefied flow in thermal cavitiesMoghadam, Ehsan Yazdanpanah / Roohi, Ehsan / Esfahani, Javad Abolfazli et al. | 2014
- 341
-
Kinetic modeling of a tapered Holweck pumpNaris, S. / Tantos, C. / Valougeorgis, D. et al. | 2014
- 349
-
The direct jumping of molecules through the compression of gas centrifugeTokmantsev, V.I. / Seleznev, V.D. et al. | 2014
- 354
-
Accurate simulation of turbomolecular pumps with modified algorithm by 3D direct simulation Monte Carlo methodLi, Yanwu / Chen, Xuekang / Guo, Wenjin / Li, Danming / Wang, Qiangfeng / Feng, Kai et al. | 2014
- 360
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Knudsen pumps modeling with Lennard-Jones and ab initio intermolecular potentialsDodulad, O.I. / Kloss, Yu.Yu. / Savichkin, D.O. / Tcheremissine, F.G. et al. | 2014
- 368
-
Study of the ultra-high-vacuum system of the 14-m-long vacuum chamber of the Taiwan Photon Source using the pressure build-up methodWu, L.H. / Lee, T.Y. / Hsiung, G.Y. / Yang, Y.C. / Chen, Z.W. / Chang, Y.P. / Huang, C.S. / Huang, Y.T. / Chang, C.H. / Chang, S.W. et al. | 2014
- 373
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Computational and experimental study of unsteady gas flow in a dynamic vacuum standardPantazis, S. / Jousten, K. et al. | 2014
- 385
-
Time-dependent rarefied gas flow of single gases and binary gas mixtures into vacuumVargas, Manuel / Naris, Steryios / Valougeorgis, Dimitris / Pantazis, Sarantis / Jousten, Karl et al. | 2014
- 397
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Vacuum physics applied to the transport of gases through corkTeodoro, O.M.N.D. / Fonseca, A.L. / Pereira, H. / Moutinho, A.M.C. et al. | 2014
- 401
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Near-wall liquid film ejection with co-current gas flow from nozzle into vacuumYarygin, V.N. / Prikhodko, V.G. / Yarygin, I.V. / Vyazov, Yu.N. et al. | 2014
- 405
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Experimental measurements and numerical simulations of the Knudsen force on a non-uniformly heated beamStrongrich, Andrew D. / O'Neill, William J. / Cofer, Anthony G. / Alexeenko, Alina A. et al. | 2014
- 417
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Gas dynamics considerations in a non-invasive profile monitor for charged particle beamsTzoganis, Vasilis / Jeff, Adam / Welsch, Carsten P. et al. | 2014
- IFC
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Editorial Board & Publication Information| 2014