Atomic layer deposition of SiO2 from Tris(dimethylamino)silane and ozone by using temperature-controlled water vapor treatment (English)
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In:
Thin Solid Films
;
519
, 1
;
270-275
;
2010
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ISSN:
- Article (Journal) / Electronic Resource
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Title:Atomic layer deposition of SiO2 from Tris(dimethylamino)silane and ozone by using temperature-controlled water vapor treatment
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Contributors:Hirose, F. ( author ) / Kinoshita, Y. ( author ) / Shibuya, S. ( author ) / Narita, Y. ( author ) / Takahashi, Y. ( author ) / Miya, H. ( author ) / Hirahara, K. ( author ) / Kimura, Y. ( author ) / Niwano, M. ( author )
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Published in:Thin Solid Films ; 519, 1 ; 270-275
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Publisher:
- New search for: Elsevier B.V.
-
Publication date:2010-07-23
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Size:6 pages
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ISSN:
-
DOI:
-
Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 519, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Highly (100)-oriented CeO2 films prepared on amorphous substrates by laser chemical vapor depositionVargas-Garcia, J.R. / Beltran-Romero, L. / Tu, R. / Goto, T. et al. | 2010
- 5
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Power and pressure effects upon magnetron sputtered aluminum doped ZnO films propertiesRahmane, S. / Djouadi, M.A. / Aida, M.S. / Barreau, N. / Abdallah, B. / Hadj Zoubir, N. et al. | 2010
- 11
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Formation of microcrystalline SiC films by chemical transport with a high-pressure glow plasma of pure hydrogenOhmi, Hiromasa / Hamaoka, Yoshinori / Kamada, Daiki / Kakiuchi, Hiroaki / Yasutake, Kiyoshi et al. | 2010
- 18
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Dip coated 12CaO·7Al2O3 thin films through sol–gel process using metal alkoxideChavhan, P.M. / Sharma, Anubha / Sharma, R.K. / Singh, Gurmeet / Kaushik, N.K. et al. | 2010
- 18
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Dip coated 12CaO x 7Al2O3 thin films through sol-gel process using metal alkoxideChavhan, P.M. / Sharma, Anubha / Sharma, R.K. / Singh, Gurmeet / Kaushik, N.K. et al. | 2010
- 24
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Structure and mechanical properties of low temperature magnetron sputtered nanocrystalline (nc-)Ti(N,C)/amorphous diamond like carbon (a-C:H) coatingsTsotsos, C. / Baker, M.A. / Polychronopoulou, K. / Gibson, P.N. / Giannakopoulos, K. / Polycarpou, A.A. / Böbel, K. / Rebholz, C. et al. | 2010
- 31
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Room temperature deposition of Al-doped ZnO films on quartz substrates by radio-frequency magnetron sputtering and effects of thermal annealingYang, Weifeng / Wu, Zhengyun / Liu, Zhuguang / Pang, Aisuo / Tu, Yu-Li / Feng, Zhe Chuan et al. | 2010
- 37
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Morphology and structure of La1.85Sr0.15CuO4+δ thin films deposited on (100) SrTiO3 substrates by dc magnetron sputteringZu, M. / Zhang, Y.Z. / Wen, H.H. et al. | 2010
- 37
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Morphology and structure of La1.85Sr0.15CuO4+d thin films deposited on (100) SrTiO3 substrates by dc magnetron sputteringZu, M. / Zhang, Y. Z. / Wen, H. H. et al. | 2010
- 37
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Morphology and structure of La1.85Sr0.15CuO4+ delta thin films deposited on (100) SrTiO3 substrates by dc magnetron sputteringZu, M. / Zhang, Y.Z. / Wen, H.H. et al. | 2010
- 42
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Differences between films and monoliths of sol–gel derived aluminasDressler, M. / Nofz, M. / Klobes, P. / Dörfel, I. / Reinsch, S. et al. | 2010
- 52
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Optical properties of rare-earth doped epitaxial Sr0.5Ba0.5Nb2O6 thin films grown by pulsed laser depositionYao, Y.B. / Liu, W.C. / Mak, C.L. / Wong, K.H. / Tam, H.L. / Cheah, K.W. et al. | 2010
- 58
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Microstructure and lattice bending in polycrystalline laser–crystallized silicon thin films for photovoltaic applicationsMaeder, X. / Niederberger, C. / Christiansen, S. / Bochmann, A. / Andrä, G. / Gawlik, A. / Falk, F. / Michler, J. et al. | 2010
- 64
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Influence of Sb/As soak times on the structural and optical properties of GaAsSb/GaAs interfacesBremner, S.P. / Ghosh, K. / Nataraj, L. / Cloutier, S.G. / Honsberg, C.B. et al. | 2010
- 69
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Growth of strained La1−xSrxCoO3 films and multilayers using layer-by-layer growthTrommler, S. / Hühne, R. / Rata, A.D. / Schultz, L. / Holzapfel, B. et al. | 2010
- 74
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An angular distribution function for the sputter-depositing atoms and general equations describing the initial thickness profile of a thin film deposited inside a via and trench by sputteringKim, Chang-Gyu / Lee, Won-Jong et al. | 2010
- 81
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Synthesis of Mn–Al alloy nanoparticles by plasma arc dischargeLee, Jung-Goo / Li, Pu / Choi, Chul-Jin / Dong, Xing-Long et al. | 2010
- 86
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Hydrogen-free diamond-like carbon films prepared by microwave electron cyclotron resonance plasma-enhanced direct current magnetron sputteringRu, Lili / Huang, Jianjun / Gao, Liang / Qi, Bing et al. | 2010
- 91
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Effect of pyrolysis temperature on the microstructure of disordered carbon nanowiresSamuel, B.A. / Rajagopalan, R. / Foley, H.C. / Haque, M.A. et al. | 2010
- 96
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Structural, thermal and optical characterization of TiO2:ZrO2 thin films prepared by sol–gel methodBensouyad, H. / Sedrati, H. / Dehdouh, H. / Brahimi, M. / Abbas, F. / Akkari, H. / Bensaha, R. et al. | 2010
- 101
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Fabrication of nitrogen-doped mesoporous TiO2 layer with higher visible photocatalytic activity by plasma-based ion implantationJinlong, Li / Xinxin, Ma / Mingren, Sun / Li, Xiaomin / Zhenlun, Song et al. | 2010
- 106
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Optimization of the structural, microstructural and optical properties of nanostructured Cr2+:ZnSe films deposited by magnetron co-sputtering for mid-infrared applicationsVivet, N. / Morales, M. / Levalois, M. / Charvet, S. / Jomard, F. et al. | 2010
- 111
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Preparation of boron-doped TiO2 films by autoclaved-sol method at low temperature and study on their photocatalytic activityLu, Xiaona / Tian, Baozhu / Chen, Feng / Zhang, Jinlong et al. | 2010
- 117
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Fourier transform infrared spectroscopy characterization of AlN thin films grown on sacrificial silicon oxide layers via metal organic vapor phase epitaxyKuchibhatla, S. / Rodak, L.E. / Korakakis, D. et al. | 2010
- 122
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Texture development, microstructure and phase transformation characteristics of sputtered Ni–Ti Shape Memory Alloy films grown on TiN<111>Martins, R.M.S. / Schell, N. / Reuther, H. / Pereira, L. / Mahesh, K.K. / Silva, R.J.C. / Fernandes, F.M. Braz et al. | 2010
- 122
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Texture development, microstructure and phase transformation characteristics of sputtered Ni-Ti Shape Memory Alloy films grown on TiN less-than 111 greater-thanMartins, R.M.S. / Schell, N. / Reuther, H. / Pereira, L. / Mahesh, K.K. / Silva, R.J.C. / Braz Fernandes, F.M. et al. | 2010
- 129
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Spray deposition and property analysis of anatase phase titania (TiO2) nanostructuresRaj, A. Moses Ezhil / Agnes, V. / Bena Jothy, V. / Ravidhas, C. / Wollschläger, Joachim / Suendorf, M. / Neumann, M. / Jayachandran, M. / Sanjeeviraja, C. et al. | 2010
- 136
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Electrical properties of polycrystalline GaInAs thin filmsKajikawa, Y. / Okuzako, T. / Takami, S. / Takushima, M. et al. | 2010
- 145
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Investigation of the microstructure and corrosion performance of a nanostructured titania-containing hybrid silicate film on mild steelMadani, Sayed Morteza / Ehteshamzadeh, Maryam / Hashemipour Rafsanjani, Hassan et al. | 2010
- 151
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Si-rich a-SiC:H thin films: Structural and optical transformations during thermal annealingKünle, Matthias / Kaltenbach, Thomas / Löper, Philipp / Hartel, Andreas / Janz, Stefan / Eibl, Oliver / Nickel, Klaus-Georg et al. | 2010
- 158
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Templated synthesis of porous TiO2 thin films using amphiphilic graft copolymer and their use in dye-sensitized solar cellsKoh, Joo Hwan / Seo, Jin Ah / Ahn, Sung Hoon / Kim, Jong Hak et al. | 2010
- 164
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Chemical states of carbon in amorphous boron carbide thin films deposited by radio frequency magnetron sputteringBao, Ruqiang / Chrisey, Douglas B. et al. | 2010
- 169
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Conductive composite films composed of polyaniline thin layers on microporous polyacrylonitrile surfacesZhai, Guangzhao / Fan, Qingqing / Tang, Yue / Zhang, Yu / Pan, Ding / Qin, Zongyi et al. | 2010
- 174
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Photocatalytic activity of TiO2 nanofilms deposited onto polyvinyl chloride and glass substratesDarko, Samuel A. / Maxwell, Ebony / Park, Sangmoon et al. | 2010
- 178
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Aluminum-induced crystallization of amorphous silicon films deposited by hot wire chemical vapor deposition on glass substratesEbil, Ozgenc / Aparicio, Roger / Birkmire, Robert et al. | 2010
- 184
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Electrochemical synthesis of Sn doped ZnO nanowires on zinc foil and their field emission studiesSheini, Farid Jamali / Joag, Dilip S. / More, Mahendra A. et al. | 2010
- 190
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Effect of deposition distance and temperature on electrical, optical and structural properties of radio-frequency magnetron-sputtered gallium-doped zinc oxideGorrie, Christopher W. / Sigdel, Ajaya K. / Berry, Joseph J. / Reese, Brandon J. / van Hest, Maikel F.A.M. / Holloway, Paul H. / Ginley, David S. / Perkins, John D. et al. | 2010
- 197
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Homoleptic single molecular precursors for the deposition of platinum and palladium chalcogenide thin filmsMusetha, P.L. / Revaprasadu, N. / Kolawole, G.A. / Pullabhotla, Rajasekhar V.S.R. / Ramasamy, K. / O'Brien, P. et al. | 2010
- 203
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Challenges to quantitative energy-dispersive X-ray spectrometry and its application to graded embedded silicon–germanium for high-performance complementary metal oxide semiconductor devicesHübner, R. / Engelmann, H.-J. / Zschech, E. et al. | 2010
- 210
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Thin film growth of epitaxial gadolinium oxide, gadolinium yttrium oxide, and gadolinium cerium oxide by electrodepositionMann, Jonathan R. / Bhattacharya, Raghu N. et al. | 2010
- 214
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Nickel nanoparticles decoration of ordered mesoporous silica thin films for carbon nanotubes growthAcuña, J.J.S. / Marchi, M.C. / Alvarez, F. et al. | 2010
- 218
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Chemical synthesis of poly(5-carboxyindole) and poly(5-carboxyindole)/carboxylated multiwall carbon nanotube nanocompositeJoshi, Leela / Gupta, Bhavana / Prakash, Rajiv et al. | 2010
- 223
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Effects of low temperature ZnO and MgO buffer thicknesses on properties of ZnO films grown on (0001) Al2O3 substrates by plasma-assisted molecular beam epitaxyKim, Jae Goo / Han, Seok Kyu / Yang, Sang Mo / Hong, Soon-Ku / Lee, Jae Wook / Lee, Jeong Yong / Song, Jung-Hoon / Ihm, Young Eon / Kim, Dojin / Park, Jin Sub et al. | 2010
- 228
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Molecular beam epitaxy of GaSb on GaAs substrates with AlSb/GaSb compound buffer layersHao, Ruiting / Deng, Shukang / Shen, Lanxian / Yang, Peizhi / Tu, Jielei / Liao, Hua / Xu, Yingqiang / Niu, Zhichuan et al. | 2010
- 231
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A facile route to ultra-long bis(8-hydroxyquinoline) magnesium nanoribbons and the fabrication of photoswitchWang, Xiuhua / Shao, Mingwang / Liu, Li et al. | 2010
- 235
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Low refractive index silicon oxide coatings at room temperature using atmospheric-pressure very high-frequency plasmaKakiuchi, H. / Ohmi, H. / Yamaguchi, Y. / Nakamura, K. / Yasutake, K. et al. | 2010
- 240
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Preparation of epitaxial DyFeO3 thin films and magnetodielectric couplingLuo, S.J. / Li, S.Z. / Zhang, N. / Wei, T. / Dong, X.W. / Wang, K.F. / Liu, J.-M. et al. | 2010
- 244
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In-situ electrical resistance measurement of the selenization process in the CuInGa–Se systemLiu, Wei / Tian, Jian-Guo / He, Qing / Li, Feng-Yan / Li, Chang-Jian / Sun, Yun et al. | 2010
- 251
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Effects of heat treatment on the microstructure of amorphous boron carbide coating deposited on graphite substrates by chemical vapor depositionLi, Siwei / Zeng, Bin / Feng, Zude / Liu, Yongsheng / Yang, Wenbin / Cheng, laifei / Zhang, Litong et al. | 2010
- 259
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Investigation of pad staining and its effect on removal rate in copper chemical mechanical planarizationLee, H. / Zhuang, Y. / Borucki, L. / Joh, S. / O'Moore, F. / Philipossian, A. et al. | 2010
- 265
-
Ab initio study of the adsorption of antimony and arsenic on the Si(110) surfaceHuitzil-Tepanecatl, Arely / Cocoletzi, Gregorio H. / Takeuchi, Noboru et al. | 2010
- 270
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Atomic layer deposition of SiO2 from Tris(dimethylamino)silane and ozone by using temperature-controlled water vapor treatmentHirose, F. / Kinoshita, Y. / Shibuya, S. / Narita, Y. / Takahashi, Y. / Miya, H. / Hirahara, K. / Kimura, Y. / Niwano, M. et al. | 2010
- 276
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Photo-induced characteristics of a Ti–Nb–Sn biometallic alloy with low Young's modulusMasahashi, N. / Mizukoshi, Y. / Semboshi, S. / Ohtsu, N. / Jung, T.K. / Hanada, S. et al. | 2010
- 284
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The growth of nanoscale ZnO films by pulsed-spray evaporation chemical vapor deposition and their structural, electric and optical propertiesJiang, Yinzhu / Bahlawane, Naoufal et al. | 2010
- 289
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Fabrication of calix[4]pyrrole nanofilms at the glassy carbon surface and their characterization by spectroscopic, optic and electrochemical methodsTaner, Bilge / Özcan, Emine / Üstündağ, Zafer / Keskin, Selda / Solak, Ali Osman / Ekşi, Haslet et al. | 2010
- 296
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Effect of two organic contamination modes on laser-induced damage of high reflective films in vacuumLing, Xiulan / Zhao, Yuanan / Shao, Jianda / Fan, Zhengxiu et al. | 2010
- 301
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A two-component preceramic polymer system for structured coatings on metalsKappa, Mathias / Kebianyor, Ayuk / Scheffler, Michael et al. | 2010
- 306
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Thermal stability of magnetron sputtered Si-B-C-N materials at temperatures up to 1700^oCZeman, P. / Capek, J. / Cerstvy, R. / Vlcek, J. et al. | 2010
- 306
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Thermal stability of magnetron sputtered Si–B–C–N materials at temperatures up to 1700°CZeman, P. / Čapek, J. / Čerstvý, R. / Vlček, J. et al. | 2010
- 312
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Nanomechanical characterization of thermally evaporated Cr thin films — FE analysis of the substrate effectKataria, S. / Goyal, Sunil / Dash, S. / Tyagi, A.K. et al. | 2010
- 319
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Deposition and characterization of pulsed direct current magnetron sputtered Al95.5Cr2.5Si2 (N1−xOx) thin filmsNajafi, H. / Shetty, A. / Karimi, A. / Morstein, M. et al. | 2010
- 325
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Mechanical properties of ZnO thin films deposited on polyester substrates used in flexible device applicationsSierros, Konstantinos A. / Banerjee, Derrick A. / Morris, Nicholas J. / Cairns, Darran R. / Kortidis, Ioannis / Kiriakidis, George et al. | 2010
- 331
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Fracture behavior of nano-layered coatings under tensionChai, Herzl / Josell, Daniel et al. | 2010
- 337
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A hybrid experimental/numerical approach to characterize interfacial adhesion in multilayer low-k thin film specimensKitey, R. / Sottos, N. R. / Geubelle, P. H. et al. | 2010
- 337
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A hybrid experimental/numerical approach to characterize interfacial adhesion in multilayer low-κ thin film specimensKitey, Rajesh / Sottos, Nancy R. / Geubelle, Philippe H. et al. | 2010
- 345
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Influence of film thickness on the texture, morphology and electro-optical properties of indium tin oxide filmsLiang, Chih-Hao / Chen, Sheng-Chau / Qi, Xiaoding / Chen, Chi-San / Yang, Chih-Chao et al. | 2010
- 351
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Optical properties of evaporated poly-Si thin-films on glassHe, Song / Sproul, Alistair B. et al. | 2010
- 357
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Preparation and photoelectrocatalytic properties of polyaniline/layered manganese oxide self-assembled filmYu, Shuping / Xi, Mingjun / Han, Kefei / Wang, Zhongming / Yang, Wensheng / Zhu, Hong et al. | 2010
- 362
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Growth characteristics and electrical properties of La2O3 gate oxides grown by thermal and plasma-enhanced atomic layer depositionKim, Woo-Hee / Maeng, W.J. / Moon, Kyeong-Ju / Myoung, Jae-Min / Kim, Hyungjun et al. | 2010
- 367
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Atomic layer deposition of tantalum nitride based thin films from cyclopentadienyl type precursorAnacleto, A. Correia / Zauner, A. / Cany-Canian, D. / Gatineau, J. / Hugon, M.-C. et al. | 2010
- 373
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Formation and performance of ohmic contact electrodes on BaTiO3-based thermistors by localized electroless Cu-platingLiu, B.S. / Zhang, F.M. / Yang, X.Y. et al. | 2010
- 378
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Lattice and internal relaxation of ZnO thin film under in-plane strainGuoqiang, Qin / Guanglei, Zhang / Dongchun, Li / Shimin, Liu et al. | 2010
- 385
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Effect of target properties on transparent conducting impurity-doped ZnO thin films deposited by DC magnetron sputteringMinami, Tadatsugu / Oda, Jun-ichi / Nomoto, Jun-ichi / Miyata, Toshihiro et al. | 2010
- 391
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A low-temperature-cross-linked poly(4-vinylphenol) gate-dielectric for organic thin film transistorsVicca, Peter / Steudel, Soeren / Smout, Steve / Raats, Arne / Genoe, Jan / Heremans, Paul et al. | 2010
- 394
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Investigations of the optical absorption spectra of porous silicon layers on the Silicon backing by the nondestructive photoacoustic methodMaliński, Mirosław / Chrobak, Łukasz / Bychto, Leszek / Okupski, Tomasz et al. | 2010
- 399
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Characterization of magnetoresistance hysteresis of Permalloy thin-film using near-field microwave microscopeMelikyan, Harutyun / Babajanyan, Arsen / Lee, Neun Jong / Kim, Tae Hee / Lee, Hanju / Lee, Kiejin / Friedman, Barry et al. | 2010
- 404
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Highly amorphous Fe90Zr10 thin films, and the influence of crystallites on the magnetismKorelis, P.T. / Liebig, A. / Björck, M. / Hjörvarsson, B. / Lidbaum, H. / Leifer, K. / Wildes, A.R. et al. | 2010
- 410
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Room temperature ferromagnetism in Fe-doped CeO2 thin films grown on LaAlO3 (001)Sharma, S.K. / Thakur, P. / Kumar, Shalendra / Shukla, D.K. / Brookes, N.B. / Lee, C.G. / Pirota, K.R. / Koo, B.H. / Knobel, M. et al. | 2010
- 414
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Highly organized crystalline monolayer of a semi-fluorinated alkane on a solid substrate obtained by spin-coatingBardin, Lisa / Faure, Marie-Claude / Filipe, Eduardo J.M. / Fontaine, Philippe / Goldmann, Michel et al. | 2010
- 417
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Surfactant induced orientation of non-centrosymmetric polyoxometalate clusters in Langmuir–Blodgett filmsLi, Haolong / Zhang, Jianming / Bubeck, Christoph et al. | 2010
- 423
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Preparation and characterization of TaAlOx high-κ dielectric for metal–insulator–metal capacitor applicationsHota, M.K. / Mahata, C. / Bera, M.K. / Mallik, S. / Sarkar, C.K. / Varma, S. / Maiti, C.K. et al. | 2010
- 423
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Preparation and characterization of TaAlOx high-k dielectric for metal-insulator-metal capacitor applicationsHota, M. K. / Mahata, C. / Bera, M. K. / Mallik, S. / Sarkar, C. K. / Varma, S. / Maiti, C. K. et al. | 2010
- 430
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Deposited dielectrics on metal thin films using silicon and glass substrates for hot electron-induced electrochemiluminescenceNiskanen, Antti J. / Ylinen-Hinkka, Tiina / Pusa, Matti / Kulmala, Sakari / Franssila, Sami et al. | 2010
- 434
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Titanium dioxide thin films for high temperature gas sensorsSeeley, Zachary Mark / Bandyopadhyay, Amit / Bose, Susmita et al. | 2010
- 439
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The influences of substrate temperature on ambipolar organic heterojunction transistorsGu, Wen / Li, Xifeng / Zhang, Hao / Wei, Bin / Zhang, Jianhua / Wang, Jun et al. | 2010
- 443
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Analysis and characterization of a mechanical sensor to monitor stress in interconnect featuresWilson, Christopher J. / Croes, Kristof / Tőkei, Zsolt / Beyer, Gerald P. / Gallacher, Barry J. / Bull, Steve J. / Horsfall, Alton B. / O'Neill, Anthony G. et al. | 2010
- 450
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Unipolar resistive switching characteristics in Co3O4 filmsGao, Xu / Guo, Hongxuan / Xia, Yidong / Yin, Jiang / Liu, Zhiguo et al. | 2010
- 453
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Ohmic contacts and n-type doping on TixCr2−xO3 films and the temperature dependence of their transport propertiesRangel-Kuoppa, Victor-Tapio / Conde-Gallardo, Agustin et al. | 2010
- 457
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Pulsed laser annealing of sodium super ionic conductor for carbon dioxide sensorsKao, Shi-Chien / Su, Guo-Dung John et al. | 2010
- 462
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Realisation and chemical characterisation of a model system for saccharide-based biosensorLeone, G. / Consumi, M. / Tognazzi, A. / Magnani, A. et al. | 2010
- 471
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Terahertz Schottky barrier diodes with various isolation designs for advanced radio frequency applicationsChen, S.-M. / Fang, Y.-K. / Juang, F.R. / Yeh, W.-K. / Chao, C.-P. / Tseng, H.-C. et al. | 2010
- 475
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The influence of base doping density on the performance of evaporated poly-Si thin-film solar cells by solid-phase epitaxyHe, Song / Janssens, Joachim / Wong, Johnson / Sproul, Alistair B. et al. | 2010
- 479
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Piezoresistive polysilicon film obtained by low-temperature aluminum-induced crystallizationPatil, Suraj Kumar / Çelik-Butler, Zeynep / Butler, Donald P. et al. | 2010
- 487
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Development and characterization of fluorine tin oxide electrodes modified with high area porous thin films containing gold nanoparticlesQuintana, Carmen / Atienzar, Pedro / Budroni, Gerolamo / Mora, Laura / Hernández, Lucas / García, Hermenegildo / Corma, Avelino et al. | 2010
- 494
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Thickness dependency of sol-gel derived ZnO thin films on gas sensing behaviorsKakati, Nitul / Jee, Seung Hyun / Kim, Su Hyun / Oh, Jun Young / Yoon, Young Soo et al. | 2010
- 499
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Unipolar resistive switching behavior of BiFeO3 thin films prepared by chemical solution depositionChen, Shih-Wei / Wu, Jenn-Ming et al. | 2010
- 505
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Effects of N2-annealing conditions on the sensing properties of Pt/HfO2/SiC Schottky-diode hydrogen sensorTang, W.M. / Leung, C.H. / Lai, P.T. et al. | 2010
- 512
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Electrical behavior of p-type PbS-based metal-oxide-semiconductor thin film transistorsMorales-Fernández, I.E. / Medina-Montes, M.I. / González, L.A. / Gnade, B. / Quevedo-López, M.A. / Ramírez-Bon, R. et al. | 2010
- 517
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Ammonia-free chemically deposited CdS films as active layers in thin film transistorsArreola-Jardón, G. / González, L.A. / García-Cerda, L.A. / Gnade, B. / Quevedo-López, M.A. / Ramírez-Bon, R. et al. | 2010
- 521
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Characterization of boron-doped diamond-like carbon prepared by radio frequency sputteringPu, Jui-Chen / Wang, Sea-Fue / Lin, Chia-Lun / Sung, James C. et al. | 2010
- 527
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Epitaxial Ni films for ballistic ferromagnetic nanostructuresMalikov, I.V. / Fomin, L.A. / Vinnichenko, V.Yu. / Mikhailov, G.M. et al. | 2010
- 536
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Structure and stimulated emission of a high-quality zinc oxide epilayer grown by atomic layer deposition on the sapphire substrateChen, H.C. / Chen, M.J. / Liu, T.C. / Yang, J.R. / Shiojiri, M. et al. | 2010
- 541
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Effects of calcination temperature on the morphology, structure and photocatalytic activity of titanate nanotube thin filmsXiao, Ning / Li, Zhonghua / Liu, Jiawen / Gao, Yuan et al. | 2010
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Structure, interface, and luminescence of (011) ZnO nanofilmsShen, Jung-Hsiung / Yeh, Sung-Wei / Huang, Hsing-Lu / Gan, Dershin et al. | 2010
- 556
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Erratum to “Refractive index, extinction coefficient and DC conductivity of amorphous arsenic triselenide thin film doped with silver” [Thin Solid Films 424 (2003) 296–302]Bakr, N.A. / Elhadidy, H. / Hammam, M. / Migahed, M.D. et al. | 2010
- 557
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Erratum to: Protein adsorption on low temperature alpha alumina films for surgical instruments [Thin Solid Films (2009) 5927–5930]Cloud, A.N. / Kumar, S. / Kavdia, M. / Abu-Safe, H.H. / Gordon, M.H. et al. | 2010
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Editorial Board| 2010