Optimized hydrogen concentration within a remotely induced hollow-anode plasma for fast chemical-vapor-deposition of photosensitive and <110>-preferential microcrystalline silicon thin-films (English)
- New search for: Tabuchi, Toshihiro
- New search for: Toyoshima, Yasumasa
- New search for: Fujimoto, Shinichi
- New search for: Takashiri, Masayuki
- Further information on Takashiri, Masayuki:
- https://orcid.org/0000-0001-7041-6595
- New search for: Tabuchi, Toshihiro
- New search for: Toyoshima, Yasumasa
- New search for: Fujimoto, Shinichi
- New search for: Takashiri, Masayuki
In:
Thin Solid Films
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694
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2019
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ISSN:
- Article (Journal) / Electronic Resource
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Title:Optimized hydrogen concentration within a remotely induced hollow-anode plasma for fast chemical-vapor-deposition of photosensitive and <110>-preferential microcrystalline silicon thin-films
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Contributors:Tabuchi, Toshihiro ( author ) / Toyoshima, Yasumasa ( author ) / Fujimoto, Shinichi ( author ) / Takashiri, Masayuki ( author )
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Published in:Thin Solid Films ; 694
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Publisher:
- New search for: Elsevier B.V.
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Publication date:2019-11-23
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 694
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Corrigendum to “Epitaxial growth of gallium oxide films on c-cut sapphire substrate” Thin Solid Films (2015) 556–562Seiler, W. / Selmane, M. / Abdelouahdi, K. / Perrière, J. et al. | 2015
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A multidimensional scheme of characterization for performance deterioration behavior of flexible devices under bending deformationKamiya, Shoji / Izumi, Hayato / Sekine, Tomohito / Shishido, Nobuyuki / Sugiyama, Hiroko / Haga, Yasuko / Minari, Takeo / Koganemaru, Masaaki / Tokito, Shizuo et al. | 2019
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Multilayer passive radiative selective cooling coating based on Al/SiO2/SiNx/SiO2/TiO2/SiO2 prepared by dc magnetron sputteringCunha, N.F. / AL-Rjoub, A. / Rebouta, L. / Vieira, L.G. / Lanceros-Mendez, S. et al. | 2019
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Preparation and characterization of luminescent YPO4: Eu3+ thin films using sol gel spin coating methodBenharrat, L. / Guerbous, L. / Bradai, D. / Boukerika, A. / Manseri, A. / Selmi, N. / Rahal, B. / Hamroun, M.S.E. et al. | 2019
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SiC-conversion coating from silica sol for improved oxidation resistance of carbon-fiber insulator in solar-cell ingot-growing cruciblesAhn, Su-Bin / Nguyen, Minh Dat / Bang, Jung-Won / Kim, Younghee / Lee, Yoonjoo / Shin, Dong-Geun / Kwon, Woo-Teck et al. | 2019
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Titanium oxynitride films for surface passivation of crystalline silicon deposited by plasma-enhanced atomic layer deposition to improve electrical conductivitySong, Eun-Jin / Jo, Hyunjin / Kwon, Se-Hun / Ahn, Ji-Hoon / Kwon, Jung-Dae et al. | 2019
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Influence of the Pt thickness on the structural and magnetic properties of epitaxial Fe/Pt bilayersKarfaridis, D. / Mihalceanu, L. / Keller, S. / Simeonidis, K. / Dimitrakopulos, G.P. / Kehagias, Th. / Papaioannou, E.Th. / Vourlias, G. et al. | 2019
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Influence of generation control of the magnetron plasma on structure and properties of copper nitride layersNowakowska - Langier, Katarzyna / Skowronski, Lukasz / Chodun, Rafał / Okrasa, Sebastian / Strzelecki, Grzegorz W. / Wilczopolska, Magdalena / Wicher, Bartosz / Mirowski, Robert / Zdunek, Krzysztof et al. | 2019
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Enhanced dielectric performance of BaxSr(1-x)TiO3 films prepared by the direct current micro-arc oxidation in the presence of ethylenediamine tetraacetic acidWang, Min / Zuo, Xi / Li, Wenfang / Cao, Genghua / Xiang, An et al. | 2019
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Enhanced transparency of ultrathin Ag films through wetting layer of phosphomolybdic acidChrzanowski, Maciej / Kliczkowski, Maksymilian / Bieganski, Piotr / Placzek-Popko, Ewa / Misiewicz, Jan / Podhorodecki, Artur et al. | 2019
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Multi-layered Ni64Zr36/M/Ni64Zr36 (M = V, Nb) thin films for hydrogen purificationYun, Deok-hwan / Park, Sung Bum / Park, Yong-il et al. | 2019
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Editorial Board| 2019
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Suppression of the metal-insulator transition in magnetron sputtered Ti2O3 filmsShvets, Petr V. / Caffrey, David / Fleischer, Karsten / Shvets, Igor / O'Neill, Katie / Duesberg, Georg S. / Vinichenko, Aleksandr N. / Yu. Maksimova, Ksenia / Yu. Goikhman, Alexander et al. | 2019
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Optimized hydrogen concentration within a remotely induced hollow-anode plasma for fast chemical-vapor-deposition of photosensitive and <110>-preferential microcrystalline silicon thin-filmsTabuchi, Toshihiro / Toyoshima, Yasumasa / Fujimoto, Shinichi / Takashiri, Masayuki et al. | 2019
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Corrigendum to “Optical and Structural Properties of PbSIn3+ Nanocrystals growth by chemical bath” [Thin Solid Films (2019) 35542]Moreno, O. Portillo / Pérez, R. Gutiérrez / Merino, R. Palomino / Portillo, M. Chávez / Téllez, G. Hernández / Rosas c, E. Rubio et al. | 2019
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Optical characterization of type-II ZnO/ZnS multiple quantum wells grown by atomic layer depositionHassan, Mostafa Afifi / Waseem, Aadil / Johar, Muhammad Ali / Yu, Sou Young / Lee, June Key / Ha, Jun-Seok / Ryu, Sang-Wan et al. | 2019
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Brown coloration and electrochromic properties of nickel doped TiO2 thin films deposited by nebulized spray pyrolysis techniqueDhandayuthapani, T. / Sivakumar, R. / Ilangovan, R. / Sanjeeviraja, C. / Jeyadheepan, K / Gopalakrishnan, C. / Sivaprakash, P. / Arumugam, S. et al. | 2019
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Effects of boron doping on solid phase crystallization of in situ doped amorphous Silicon thin films prepared by electron beam evaporationSedani, Salar H. / Yasar, Ozlen F. / Karaman, Mehmet / Turan, Rasit et al. | 2019
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Microstructure of GaAs thin films grown on glass using Ge seed layers fabricated by aluminium induced crystallizationPelati, D. / Patriarche, G. / Largeau, L. / Mauguin, O. / Travers, L. / Brisset, F. / Glas, F. / Oehler, F. et al. | 2019