Smoothening of scalloped DRIE trench walls (English)
- New search for: Syed Mohammed, Zishan Ali
- New search for: Olimpo, M.A.S.
- New search for: Poenar, D.P.
- New search for: Aditya, S.
- New search for: Syed Mohammed, Zishan Ali
- New search for: Olimpo, M.A.S.
- New search for: Poenar, D.P.
- New search for: Aditya, S.
In:
Materials Science in Semiconductor Processing
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63
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83-89
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2017
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ISSN:
- Article (Journal) / Electronic Resource
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Title:Smoothening of scalloped DRIE trench walls
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Contributors:Syed Mohammed, Zishan Ali ( author ) / Olimpo, M.A.S. ( author ) / Poenar, D.P. ( author ) / Aditya, S. ( author )
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Published in:Materials Science in Semiconductor Processing ; 63 ; 83-89
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Publisher:
- New search for: Elsevier Ltd
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Publication date:2017-02-06
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Size:7 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 63
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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Size and density controlled Ag nanocluster embedded MOS structure for memory applicationsBiswas, Debaleen / Mondal, Shyamal / Rakshit, Abhishek / Bose, Arijit / Bhattacharyya, Satyaranjan / Chakraborty, Supratic et al. | 2017
- 6
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Enhanced photocatalytic activity of water stable hydroxyl ammonium lead halide perovskitesAamir, Muhammad / Shah, Zawar Hussain / Sher, Muhammad / Iqbal, Azhar / Revaprasadu, Neerish / Malik, Mohammad Azad / Akhtar, Javeed et al. | 2017
- 12
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Synthesis and characterization of novel oxygenated CdSe window layer for CdTe thin film solar cellsBao, Zheng / Liu, Longxiao / Yang, Xiaoyan / Tang, Ping / Yang, Ke / Lu, Hongting / He, Siying / Liu, Jiyang / Liu, Xiaolan / Li, Bing et al. | 2017
- 18
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Low temperature synthesis of pure anatase carbon doped titanium dioxide: An efficient visible light active photocatalystWarkhade, Swapnil K. / Gaikwad, G.S. / Zodape, Sangesh P. / Pratap, Umesh / Maldhure, Atul V. / Wankhade, Atul V. et al. | 2017
- 25
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Prediction of sawing force for single-crystal silicon carbide with fixed abrasive diamond wire sawWang, Peizhi / Ge, Peiqi / Gao, Yufei / Bi, Wenbo et al. | 2017
- 33
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Use of a sulfur waste for biosynthesis of cadmium sulfide quantum dots with Fusarium oxysporum f. sp. lycopersiciSandoval-Cárdenas, Issell / Gómez-Ramírez, Marlenne / Rojas-Avelizapa, Norma G. et al. | 2017
- 40
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Crystalline damage in silicon wafers and 'rare event' failure introduced by low-energy mechanical impactAtrash, F. / Meshi, I. / Krokhmal, A. / Ryan, P. / Wormington, M. / Sherman, D. et al. | 2017
- 45
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First-principles calculation of atomic configurations of carbon and tin near the surface of a silicon thin film used for solar cellsTadano, Kai / Sueoka, Koji et al. | 2017
- 52
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Selective etching of GaAs grown over AlAs etch-stop layer in buffered citric acid/H2O2 solutionKuźmicz, A. / Chmielewski, K. / Serebrennikova, O. / Muszalski, J. et al. | 2017
- 58
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A substrate removal processing method for III–V solar cells compatible with low-temperature characterizationVilla, J. / Ramiro, I. / Ripalda, J.M. / Antolín, E. / García, I. / Martí, A. et al. | 2017
- 64
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The surface morphology, structural properties and chemical composition of Cd1−xZnxTe polycrystalline thick films deposited by close spaced vacuum sublimationZnamenshchykov, Y.V. / Kosyak, V.V. / Opanasyuk, A.S. / Dauksta, E. / Ponomarov, A.A. / Romanenko, A.V. / Stanislavov, A.S. / Medvids, A. / Shpetnyi, I.O. / Gorobets, Yu.I. et al. | 2017
- 72
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Study of the optical and photoelectrical properties of TlGaSeS layered single crystalsDelice, S. / Gasanly, N.M. et al. | 2017
- 76
-
Effect of low energy proton beam irradiation on structural and electrical properties of ZnO:Al thin filmsSahoo, Susanta Kumar / Mangal, Sutanu / Mishra, D.K. / Kumar, Pravin / Singh, Udai P. et al. | 2017
- 83
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Smoothening of scalloped DRIE trench wallsSyed Mohammed, Zishan Ali / Olimpo, M.A.S. / Poenar, D.P. / Aditya, S. et al. | 2017
- 90
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One step hydrothermal synthesis of SnO2-RGO nanocomposite and its field emission studiesBansode, Sanjeewani R. / Khare, Ruchita T. / Jagtap, Krishna K. / More, Mahendra A. / Koinkar, Pankaj et al. | 2017
- 97
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Surface integrity and removal mechanism of silicon wafers in chemo-mechanical grinding using a newly developed soft abrasive grinding wheelGao, Shang / Huang, Han / Zhu, Xianglong / Kang, Renke et al. | 2017
- 107
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Optical and electrical characteristics of 17keV X-rays exposed TiO2 films and Ag/TiO2/p-Si MOS deviceIshfaq, M. / Khan, M. Rizwan / Ali, Awais / Bhardwaj, Sunil / Cepek, Cinzia / Bhatti, A.S. et al. | 2017
- 115
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Tailoring of microstructure and optoelectronic properties of Aluminum doped Zinc Oxide changing gun tiltFernández, S. / Grandal, J. / Trampert, A. / Naranjo, F.B. et al. | 2016
- 122
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Preparation and characterization of the brownmillerite Sr2Co2O5 as novel photocatalyst in the hydrogen generationSaib, F. / Bellal, B. / Trari, M. et al. | 2016
- 127
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Low-cost hydrothermal synthesis and characterization of pentanary Cu2ZnxNi1−xSnS4 nanoparticle inks for thin film solar cell applicationsBabu, G. Sahaya Dennish / Shajan, X. Sahaya / George, Alphy / Parameswaran, P. / Murugesan, S. / Divakar, R. / Mohandas, E. / Kumaresan, S. / Rao, G. Mohan et al. | 2017
- 137
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Effects of substrate temperature on the degradation of RF sputtered NiO propertiesAhmed, Anas A. / Devarajan, Mutharasu / Afzal, Naveed et al. | 2016
- 142
-
Improvement of electrical performance in junctionless nanowire TFET using hetero-gate-dielectricRahimian, Morteza / Fathipour, Morteza et al. | 2016
- 153
-
Microstructure developments and anti-reflection properties of SiO2 films by liquid-phase depositionHe, Jing / Ke, Yangchuan et al. | 2017
- 161
-
Synthesis, structure determination and electrical properties of β-K0.399V2.623W0.377O7.5 with mixed occupation of vanadium and tungsten elementsBelkhiri, S. / Mezaoui, D. / Pérez, O. et al. | 2017
- 169
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Effect of sputtering power on optical properties of prepared TiO2 thin films by thermal oxidation of sputtered Ti layersAstinchap, Bandar / Moradian, Rostam / Gholami, Katayon et al. | 2017
- 176
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Effect of Silver-Assisted Chemical Vapor Etching on morphological properties and silicon solar cell performanceAmri, Chohdi / Ouertani, Rachid / Hamdi, Abderrahmen / Ezzaouia, Hatem et al. | 2017
- 184
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Band gap measurement of Bi2MoxW1-xO6 by low loss electron energy loss spectroscopyMorales-Cruz, Damasio / Paraguay-Delgado, Francisco / Borja-Urby, Raúl / Basurto-Cereceda, Sofía / Herrera-Pérez, Guillermo / Longo, Paolo / Malac, Marek et al. | 2016
- 190
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Low-cost counter electrodes based on nitrogen-doped porous carbon nanorods for dye-sensitized solar cellsWang, Guiqiang / Yan, Chao / Hou, Shuo / Zhang, Wei et al. | 2017
- 196
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Synthesis and characterization of EuBa2Ca2Cu3O9−x: The influence of temperature on dielectric properties and charge transport mechanismÖzdemir, Z. Güven / Kılıç, M. / Karabul, Y. / Mısırlıoğlu, B. Süngü / Çataltepe, Ö. Aslan / İçelli, O. et al. | 2017
- 203
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Controlled growth of Cu2O thin films by electrodeposition approachHossain, Md. Anower / Al-Gaashani, Rashad / Hamoudi, Hicham / Al Marri, Mohammed J. / Hussein, Ibnelwaleed A. / Belaidi, Abdelhak / Merzougui, Belabbes A. / Alharbi, Fahhad H. / Tabet, Nouar et al. | 2017
- 212
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Surface morphology dependent tungsten oxide thin films as toxic gas sensorGodbole, Rhushikesh / Godbole, V.P. / Bhagwat, Sunita et al. | 2017
- 220
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Effect of intrinsic strain on the optical band gap of single phase nanostructured Cu2ZnSnS4Ansari, Mohd Zubair / Khare, Neeraj et al. | 2017
- 227
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Physical, chemical and electrical characterisation of the diffusion of copper in silicon dioxide and prevention via a CuAl alloy barrier layer systemByrne, C. / Brennan, B. / Lundy, R. / Bogan, J. / Brady, A. / Gomeniuk, Y.Y. / Monaghan, S. / Hurley, P.K. / Hughes, G. et al. | 2017
- 237
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On the metallic bonding of GaN-based vertical light-emitting diodeKhan, M.A. / Trimby, P.W. / Liu, H.W. / Zheng, R.K. et al. | 2017
- 248
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Schottky performance variation on r-plane and c-plane of GaN micro truncated-pyramid grown by selective area MOCVDChen, Jie / Han, Xiaobiao / Huang, Puman / Chen, Weijie / Liang, Jiezhi / Zhong, Changming / Pan, Zhengzhou / Wu, Zhisheng / Liu, Yang / Zhang, Baijun et al. | 2017
- 253
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Synthesis, characterization and conducting properties of novel poly (vinyl cinnamate)/zinc oxide nanocomposites via in situ polymerizationRamesan, M.T. / Nidhisha, V. / Jayakrishnan, P. et al. | 2017
- 261
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Fabrication and photocatalytic activity of magnetic core@shell ZnFe2O4@Ag3PO4 heterojunctionHou, Guiqin / Li, Yunkai / An, Weijia / Gao, Shuijing / Zhang, Wenli / Cui, Wenquan et al. | 2017
- 269
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Influences of substrate type on the pH sensitivity of CuS thin films EGFET prepared by spray pyrolysis depositionSabah, Fayroz A. / Ahmed, Naser M. / Hassan, Z. / Abdullah Almessiere, Munirah et al. | 2017
- 279
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Structural, chemical, and electrical properties of Y2O3 thin films grown by atomic layer deposition with an (iPrCp)2Y(iPr-amd) precursorKang, J.-H. / Jung, Yong Chan / Seong, Sejong / Lee, Taehoon / Ahn, Jinho / Noh, Wontae / Park, In-Sung et al. | 2017
- 285
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Annealing-free multi-thermal techniques comprising aging, cycling and seeding to enhance performance of thick P3HT:PCBM photovoltaic cells via developing hairy crystalsAgbolaghi, Samira / Abbasi, Farhang / Zenoozi, Sahar / Nazari, Maryam et al. | 2017
- 295
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Thickness-dependent optoelectronic properties of CuCr0.93Mg0.07O2 thin films deposited by reactive magnetron sputteringSun, Hui / Arab Pour Yazdi, Mohammad / Ducros, Cedric / Chen, Sheng-Chi / Aubry, Eric / Wen, Chao-Kuang / Hsieh, Jang-Hsing / Sanchette, Frederic / Billard, Alain et al. | 2017
- 303
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Erratum to Advances on Doping Strategies for Triple-Gate FinFETs and Lateral Gate-All-Around Nanowire FETs and Their Impact on Device Performance [MATSCI 62 (2017) 2–12]Veloso, A. / Keersgieter, A. De / Matagne, P. / Horiguchi, N. / Collaert, N. et al. | 2017