An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon (English)
- New search for: Abdolvand, Reza
- New search for: Ayazi, Farrokh
- New search for: Abdolvand, Reza
- New search for: Ayazi, Farrokh
In:
Sensors and Actuators, A: Physical
;
144
, 1
;
109-116
;
2007
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ISSN:
- Article (Journal) / Electronic Resource
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Title:An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in silicon
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Contributors:Abdolvand, Reza ( author ) / Ayazi, Farrokh ( author )
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Published in:Sensors and Actuators, A: Physical ; 144, 1 ; 109-116
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Publisher:
- New search for: Elsevier B.V.
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Publication date:2007-12-27
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Size:8 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Keywords:
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Source:
Table of contents – Volume 144, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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High-speed gas concentration measurement using ultrasoundToda, H. / Kobayakawa, T. et al. | 2007
- 7
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Optimization and characterization of a ZnO biosensor arrayDickherber, Anthony / Corso, Christopher D. / Hunt, William D. et al. | 2008
- 13
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A mid-infrared optical fibre sensor for the detection of carbon monoxide exhaust emissionsMulrooney, Jim / Clifford, John / Fitzpatrick, Colin / Chambers, Paul / Lewis, Elfed et al. | 2007
- 18
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A biocompatible Parylene thermal flow sensing arrayMeng, Ellis / Li, Po-Ying / Tai, Yu-Chong et al. | 2007
- 29
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Development of high-accuracy image centroiding algorithm for CMOS-based digital sun sensorsChang, Young-Keun / Lee, Byung-Hoon et al. | 2007
- 38
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A wireless biosensor using microfabricated phage-interfaced magnetoelastic particlesJohnson, Michael L. / Wan, Jiehui / Huang, Shichu / Cheng, Zhongyang / Petrenko, Valery A. / Kim, Dong-Joo / Chen, I.-Hsuan / Barbaree, James M. / Hong, Jong Wook / Chin, Bryan A. et al. | 2007
- 48
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Microwave nondestructive evaluation of dielectric materials with a metamaterial lensShreiber, D. / Gupta, M. / Cravey, R. et al. | 2007
- 56
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Dynamics and control of a MEMS angle measuring gyroscopePark, Sungsu / Horowitz, Roberto / Tan, Chin-Woo et al. | 2007
- 64
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Optical low-coherence reflectometry for a distributed sensor array of fiber Bragg gratingsLiu, Weisheng / Guan, Zu-Guang / Liu, Guorong / Yan, Chunsheng / He, Sailing et al. | 2008
- 69
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Top-gate ZnO thin-film transistors with a polymer dielectric designed for ultraviolet optical gatingLee, Kimoon / Choi, Jeong-M. / Hwang, D.K. / Oh, Min Suk / Kim, J.K. / Jung, Y. / Oh, K. / Im, Seongil et al. | 2008
- 74
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Characterization of miniaturized one-side-electrode-type fluid-based inclinometerManaf, Asrulnizam Bin Abd / Nakamura, Kazumasa / Matsumoto, Yoshinori et al. | 2008
- 83
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Simultaneous measurement of temperature and strain with long period grating pairs using low resolution detectionAbi Kaed Bey, Samer K. / Sun, Tong / Grattan, Kenneth T.V. et al. | 2008
- 90
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Piezoelectric properties of vinylidene fluoride oligomer for use in medical tactile sensor applicationsTakashima, Kazuto / Horie, Satoshi / Mukai, Toshiharu / Ishida, Kenji / Matsushige, Kazumi et al. | 2008
- 97
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Evaluation of tile–wall bonding integrity based on impact acoustics and support vector machineTong, F. / XU, X.M. / Luk, B.L. / Liu, K.P. et al. | 2008
- 105
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Effect of magnesium doping on the structural and piezoelectric properties of sputtered ZnO thin filmWater, Walter / Yan, Yin-Shiang / Meen, Teen-Hang et al. | 2007
- 109
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An advanced reactive ion etching process for very high aspect-ratio sub-micron wide trenches in siliconAbdolvand, Reza / Ayazi, Farrokh et al. | 2007
- 117
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Fabrication and characterization of low temperature sintering PMN–PZN–PZT step-down multilayer piezoelectric transformerChao, Xiaolian / Yang, Zupei / Li, Gang / Cheng, Yaoqiang et al. | 2007
- 124
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The influence of surface profiles on leakage in room temperature seal-bondingOkada, Hironao / Itoh, Toshihiro / Suga, Tadatomo et al. | 2007
- 130
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A simple technique for automated performance testing of piezoelectric micro-motors by transient motion analysisRayner, P.J. / Wilson, S.A. / Whatmore, R.W. / Cain, M.G. et al. | 2007
- 135
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Design and fabrication of medical micro-nebulizerShen, Sheng-Chih / Wang, Yu-Jen / Chen, Yung-Yue et al. | 2007
- 144
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Application of low temperature co-fire ceramics on in-plane micro-generatorPan, C.T. / Chen, Y.J. et al. | 2007
- 154
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The gas flow rate increase obtained by an oscillating piezoelectric actuator on a micronozzleWiederkehr, R.S. / Salvadori, M.C. / Brugger, J. / Degasperi, F.T. / Cattani, M. et al. | 2007
- 161
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Design of a magnetostrictive (MS) actuatorGrunwald, A. / Olabi, A.G. et al. | 2007
- 176
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Feedback control of tri-layer polymer actuators to improve their positioning ability and speed of responseYao, Qingyu / Alici, Gursel / Spinks, Geoffrey M. et al. | 2008
- 185
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Mechanical characterization of a dielectric elastomer microactuator with ion-implanted electrodesRosset, S. / Niklaus, M. / Dubois, P. / Shea, H.R. et al. | 2007
- 194
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Nonlinear oscillations of piezoelectric microresonators with curved cross-sectionsLi, H. / Piekarski, B. / DeVoe, D.L. / Balachandran, B. et al. | 2007
- 201
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Performance of thin film silicon MEMS on flexible plastic substratesPatil, S.B. / Chu, V. / Conde, J.P. et al. | 2007
- 207
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A distributed MEMS phase shifter on a low-resistivity silicon substrateWang, Jianqun / Ativanichayaphong, Thermpon / Huang, Wen-Ding / Cai, Ying / Davis, Alan / Chiao, Mu / Chiao, J.-C. et al. | 2007
- 213
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Development and experimental characterization of micromachined electromagnetic probes for biological manipulation and stimulation applicationsYapici, Murat K. / Ozmetin, Ali E. / Zou, Jun / Naugle, Donald G. et al. | 2007
- 222
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Data fusion for defect characterisation using a dual probe systemEdwards, R.S. / Sophian, A. / Dixon, S. / Tian, G.Y. et al. | 2007
- 229
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Corrigendum to “Development of a miniaturised hydraulic actuation system for artificial hands” [Sens. Actuators A 141 (2007) 548–557]Kargov, A. / Werner, T. / Pylatiuk, C. / Schulz, S. et al. | 2007
- CO2
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Editorial Board| 2008