The formation of SiO2 films on silicon by high dose oxygen ion implantation (English)
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In:
Thin Solid Films
;
98
, 3
;
229-232
;
1982
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ISSN:
- Article (Journal) / Electronic Resource
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Title:The formation of SiO2 films on silicon by high dose oxygen ion implantation
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Contributors:
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Published in:Thin Solid Films ; 98, 3 ; 229-232
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Publisher:
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Publication date:1982-08-04
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Size:4 pages
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ISSN:
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DOI:
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Type of media:Article (Journal)
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Type of material:Electronic Resource
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Language:English
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Source:
Table of contents – Volume 98, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 165
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Réalisation et études des couches minces évaporées de SnSe2Tran Quan, Dang / Le Fèvre, J.J. et al. | 1982
- 179
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Electron microscopy investigation of structure and morphology of small supported metal particles of palladiumRobinson, F. / Gillet, M. et al. | 1982
- 197
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Crystallization of amorphous antimony films deposited onto glass substrates in ultrahigh vacuumHashimoto, Mituru / Sugibuchi, Hitoshi / Kambe, Kenjiro et al. | 1982
- 203
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Growth of tellurium films evaporated on NaCl, KBr and KCl substratesOkuyama, K. / Kumagai, Y. et al. | 1982
- 211
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Modified flash evaporation technique for the preparation of thin amorphous semiconductor filmsKahnt, Hanno / Feltz, Adalbert et al. | 1982
- 215
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The fabrication of both n-type and p-type GaAs thin films deposited by troide sputteringMosher, D.M. / Soukup, R.J. et al. | 1982
- 229
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The formation of SiO2 films on silicon by high dose oxygen ion implantationKreissig, U. / Hensel, E. / Skorupa, W. / Johansen, H. et al. | 1982
- 233
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Annealing behaviour of vapour-deposited AlRh thin filmsChaudhury, Zariff A. / Suryanarayana, C. et al. | 1982
- 241
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Crystallization of substrate-confined liquid indiumUeda, Masaaki / McCaldin, J.O. / Shima, Rindge et al. | 1982
- L95
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Microdiffraction patterns of icosahedral particlesGómez, A. / Schabes-Retchkiman, P. / José-Yacamán, M. et al. | 1982