Highly sensitive strained AlN on Si(111) resonators (English)
- New search for: Placidi, M.
- New search for: Moreno, J.C.
- New search for: Godignon, P.
- New search for: Mestres, N.
- New search for: Frayssinet, E.
- New search for: Semond, F.
- New search for: Serre, C.
- New search for: Placidi, M.
- New search for: Moreno, J.C.
- New search for: Godignon, P.
- New search for: Mestres, N.
- New search for: Frayssinet, E.
- New search for: Semond, F.
- New search for: Serre, C.
In:
Sensors and Actuators, A: Physical
;
150
, 1
;
64-68
;
2008
-
ISSN:
- Article (Journal) / Electronic Resource
-
Title:Highly sensitive strained AlN on Si(111) resonators
-
Contributors:Placidi, M. ( author ) / Moreno, J.C. ( author ) / Godignon, P. ( author ) / Mestres, N. ( author ) / Frayssinet, E. ( author ) / Semond, F. ( author ) / Serre, C. ( author )
-
Published in:Sensors and Actuators, A: Physical ; 150, 1 ; 64-68
-
Publisher:
- New search for: Elsevier B.V.
-
Publication date:2008-12-07
-
Size:5 pages
-
ISSN:
-
DOI:
-
Type of media:Article (Journal)
-
Type of material:Electronic Resource
-
Language:English
-
Keywords:
-
Source:
Table of contents – Volume 150, Issue 1
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
-
Theoretical analysis and experiment research of a statically indeterminate pre-stressed six-axis force sensorYao, Jiantao / Hou, Yulei / Chen, Jie / Lu, Ling / Zhao, Yongsheng et al. | 2008
- 12
-
Divisionally analytical reconstruction of the magnetic field around an electromagnetic velocity probeFu, X. / Hu, L. / Zou, J. / Yang, H.Y. / Ruan, X.D. / Wang, C.Y. et al. | 2008
- 24
-
Fibre Bragg grating (FBG) sensor system for highly flexible single-link robotsPayo, Ismael / Feliu, Vicente / Cortázar, Osvaldo Daniel et al. | 2008
- 40
-
A micromachined AC thermal sensor for monitoring the liquid–gas interface in a microchannelChoi, Sun Rock / Hong, Jonggan / Kim, Dongsik et al. | 2008
- 46
-
Behaviour of magneto-electro-elastic sensors under transient mechanical loadingDaga, Atul / Ganesan, N. / Shankar, K. et al. | 2008
- 56
-
Mechanical design and fabrication of multi-layer indium phosphide freestanding microstructures for a MOEMS microspectrometerGil-Sobraques, R. / Garrigues, M. / Leclercq, J.-L. / Parillaud, O. et al. | 2008
- 64
-
Highly sensitive strained AlN on Si(111) resonatorsPlacidi, M. / Moreno, J.C. / Godignon, P. / Mestres, N. / Frayssinet, E. / Semond, F. / Serre, C. et al. | 2008
- 69
-
Impact of high-g and high vibration environments on piezoresistive pressure sensor performanceGradolph, C. / Friedberger, A. / Müller, G. / Wilde, J. et al. | 2008
- 78
-
Fibre Bragg grating strain sensor and study of its packaging material for use in critical analysis on steel structureGangopadhyay, Tarun Kumar / Majumder, Mousumi / Kumar Chakraborty, Ashim / Kumar Dikshit, Asok / Kumar Bhattacharya, Dipak et al. | 2008
- 87
-
Micro direct methanol fuel cells and their stacks using a polymer electrolyte sandwiched by multi-window microcolumn electrodesSeo, Young Ho / Cho, Young-Ho et al. | 2008
- 97
-
Gradual oxidation of stain etched porous silicon nanostructures applied to silicon-based solar cellsGonzález-Díaz, B. / Guerrero-Lemus, R. / Méndez-Ramos, J. / Díaz-Herrera, B. / Rodríguez, V.D. et al. | 2008
- 102
-
Advanced piezoelectric–ferroelectric stack actuatorKushnir, Uri / Rabinovitch, Oded et al. | 2008
- 110
-
Position feedback control using magneto impedance sensors on conveyor with superconducting magnetic levitationIizuka, Tetsuhiko / Sakai, Naomichi / Fujita, Hiroyuki et al. | 2008
- 116
-
Tracking control of hysteretic piezoelectric actuator using adaptive rate-dependent controllerTan, U-Xuan / Latt, Win Tun / Widjaja, Ferdinan / Shee, Cheng Yap / Riviere, Cameron N. / Ang, Wei Tech et al. | 2008
- 124
-
A pH-activated artificial muscle using the McKibben-type braided structureTondu, B. / Emirkhanian, R. / Mathé, S. / Ricard, A. et al. | 2008
- 131
-
Piezoelectrically actuated microcantilevers: An experimental nonlinear vibration analysisMahmoodi, S. Nima / Jalili, Nader et al. | 2008
- 137
-
Displacement sensing of a micro-electro-thermal actuator using a monolithically integrated thermal sensorChow, Jacky / Lai, Yongjun et al. | 2008
- 144
-
Micromachined “side-viewing” optical sensor probe for detection of esophageal cancersGarcia-Uribe, A. / Balareddy, K.C. / Zou, J. / Wojcik, A.K. / Wang, K.K. / Wang, L.V. et al. | 2008
- 151
-
Passive wireless SAWR sensor system model including the effects of antenna distancesFu, Qiuyun / Wang, Jianling / Zhou, Dongxiang / Luo, Wei et al. | 2008
- 156
-
Fabrication of gapless dual-curvature microlens as a diffuser for a LED packagePan, C.T. / Chen, M.F. / Cheng, P.J. / Hwang, Y.M. / Tseng, S.D. / Huang, J.C. et al. | 2008