Compact type wafer lifting mechanism (English)
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- New search for: MEN ENGUO
- New search for: ZHANG SHUANG
- New search for: MEN ENGUO
- New search for: ZHANG SHUANG
2015
- Patent / Electronic Resource
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Title:Compact type wafer lifting mechanism
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Patent number:CN104576471
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Patent applicant:
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Patent family:
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Contributors:MEN ENGUO ( author ) / ZHANG SHUANG ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2015-04-29
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: H01L
- Further information on International Patent Classification
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Classification:
IPC: H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES -
Source: