Method and optical microscope for inspecting sample with high resolution (Chinese)
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- New search for: SCHMIDT R ¨ 1 DIGER
- New search for: HARKE BENJAMIN
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- New search for: SCHMIDT R ¨ 1 DIGER
- New search for: HARKE BENJAMIN
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2023
- Patent / Electronic Resource
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Title:Method and optical microscope for inspecting sample with high resolution
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Additional title:用于高分辨率地检查样本的方法和光学显微镜
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Patent number:CN117120908
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Patent applicant:
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Patent family:
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Contributors:SCHMIDT R ¨ 1 DIGER ( author ) / HARKE BENJAMIN ( author ) / REUSS MATTHIAS ( author ) / KASTRUP LARS ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2023-11-24
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
- New search for: G02B
- Further information on International Patent Classification
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Classification:
IPC: G02B Optische Elemente, Systeme oder Geräte, OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS -
Source: