MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSCOPE WITH (Chinese)
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- New search for: SCHUBERT STEFAN
- New search for: SCHUBERT STEFAN
2024
- Patent / Electronic Resource
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Title:MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSCOPE WITH
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Additional title:多束显微镜与利用配合检查区调整的设定来操作多束显微镜的方法
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Patent number:CN117396996
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Patent applicant:
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Patent family:
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Contributors:SCHUBERT STEFAN ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2024-01-12
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
- New search for: H01J
- Further information on International Patent Classification
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Classification:
IPC: H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS -
Source: