3D metrology from 3D data cubes generated by stack of registered images taken during delayering of sample (Chinese)
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- New search for: BLAYVAS ILYA
- New search for: BLAYVAS ILYA
2024
- Patent / Electronic Resource
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Title:3D metrology from 3D data cubes generated by stack of registered images taken during delayering of sample
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Additional title:来自由样品去层期间取得的配准图像堆叠所产生的3D数据立方体的3D计量
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Patent number:CN117642624
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Patent applicant:
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Patent family:
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Contributors:BLAYVAS ILYA ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2024-03-01
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Chinese
- New search for: G01N / G06T / H01J
- Further information on International Patent Classification
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Classification:
IPC: G01N Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften, INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES / G06T Bilddatenverarbeitung oder Bilddatenerzeugung allgemein, IMAGE DATA PROCESSING OR GENERATION, IN GENERAL / H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS -
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