FILM DEPOSITION DEVICE, FILM DEPOSITION METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD (Japanese)
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- New search for: MATSUMOTO YUKIO
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2020
- Patent / Electronic Resource
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Title:FILM DEPOSITION DEVICE, FILM DEPOSITION METHOD, AND ELECTRONIC DEVICE MANUFACTURING METHOD
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Additional title:成膜装置、成膜方法、および電子デバイスの製造方法
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Patent number:JP2020056054
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Patent applicant:
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Patent family:
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Contributors:MATSUMOTO YUKIO ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2020-04-09
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Japanese
- New search for: C23C / H01L / H05B
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