ELECTROSTATIC CHUCK, ELECTROSTATIC CHUCK SYSTEM, FILM DEPOSITION APPARATUS, ATTRACTION METHOD, FILM DEPOSITION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE (Japanese)
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- New search for: MATSUMOTO YUKIO
- New search for: MATSUMOTO YUKIO
2020
- Patent / Electronic Resource
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Title:ELECTROSTATIC CHUCK, ELECTROSTATIC CHUCK SYSTEM, FILM DEPOSITION APPARATUS, ATTRACTION METHOD, FILM DEPOSITION METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
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Additional title:静電チャック、静電チャックシステム、成膜装置、吸着方法、成膜方法及び電子デバイスの製造方法
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Patent number:JP2020090721
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Patent applicant:
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Patent family:
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Contributors:MATSUMOTO YUKIO ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2020-06-11
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Japanese
- New search for: C23C / H01L / H02N / H05B
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