SPUTTERING DEVICE AND FILM DEPOSITION METHOD (Japanese)
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- New search for: MATSUMOTO YUKIO
- New search for: MATSUMOTO YUKIO
2022
- Patent / Electronic Resource
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Title:SPUTTERING DEVICE AND FILM DEPOSITION METHOD
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Additional title:スパッタ装置及び成膜方法
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Patent number:JP2022048667
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Patent applicant:
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Patent family:
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Contributors:MATSUMOTO YUKIO ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2022-03-28
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Japanese
- New search for: C23C
- Further information on International Patent Classification
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Classification:
IPC: C23C Beschichten metallischer Werkstoffe, COATING METALLIC MATERIAL -
Source: