DEPOSITION APPARATUS (Japanese)
Free access
- New search for: MATSUMOTO YUKIO
- New search for: MATSUMOTO YUKIO
2022
- Patent / Electronic Resource
-
Title:DEPOSITION APPARATUS
-
Additional title:成膜装置
-
Patent number:JP2022061206
-
Patent applicant:
-
Patent family:
-
Contributors:MATSUMOTO YUKIO ( author )
-
Publisher:
- New search for: Europäisches Patentamt
-
Publication date:2022-04-18
-
Type of media:Patent
-
Type of material:Electronic Resource
-
Language:Japanese
- New search for: C23C / H01L / H05B
- Further information on International Patent Classification
-
Classification:
-
Source: