CHARGED PARTICLE BEAM APPARATUS AND SAMPLE ALIGNMENT METHOD OF CHARGED PARTICLE BEAM APPARATUS (Korean)
Free access
2023
- Patent / Electronic Resource
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Title:CHARGED PARTICLE BEAM APPARATUS AND SAMPLE ALIGNMENT METHOD OF CHARGED PARTICLE BEAM APPARATUS
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Additional title:하전 입자선 장치, 하전 입자선 장치의 시료 얼라이먼트 방법
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Patent number:KR102492492
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Patent family:
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2023-01-30
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: H01J / G01N / G06T
- Further information on International Patent Classification
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Classification:
IPC: H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / G01N Untersuchen oder Analysieren von Stoffen durch Bestimmen ihrer chemischen oder physikalischen Eigenschaften, INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES / G06T Bilddatenverarbeitung oder Bilddatenerzeugung allgemein, IMAGE DATA PROCESSING OR GENERATION, IN GENERAL -
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