- METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGET LIFE (Korean)
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2017
- Patent / Electronic Resource
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Title:- METHODS AND APPARATUS FOR MAINTAINING LOW NON-UNIFORMITY OVER TARGET LIFE
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Additional title:타겟 수명에 걸쳐서 낮은 불-균일성을 유지하기 위한 방법들 및 장치
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Patent number:KR20170044188
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Patent applicant:
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Patent family:
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Contributors:JOHANSON WILLIAM ( author ) / ZHANG FUHONG ( author ) / ALLEN ADOLPH MILLER ( author ) / LIU YU Y ( author )
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Publisher:
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Publication date:2017-04-24
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
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