기판을 세정하는 방법 및 장치 (Korean)
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2019
- Patent / Electronic Resource
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Title:기판을 세정하는 방법 및 장치
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Patent number:KR20190047045
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Patent applicant:
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Patent family:
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Contributors:WANG HUI ( author ) / WANG XI ( author ) / CHEN FUPING ( author ) / CHEN FUFA ( author ) / WANG JIAN ( author ) / ZHANG XIAOYAN ( author ) / JIN YINUO ( author ) / JIA ZHAOWEI ( author ) / WANG JUN ( author ) / LI XUEJUN ( author )
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Publisher:
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Publication date:2019-05-07
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
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