ELECTROSTATIC CHUCK ELECTROSTATIC CHUCKSYSTEM FILM FORMING APPARATUSADSORPTION PROCESSFILM FORMING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD (Korean)
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- New search for: MATSUMOTO YUKIO
- New search for: MATSUMOTO YUKIO
2020
- Patent / Electronic Resource
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Title:ELECTROSTATIC CHUCK ELECTROSTATIC CHUCKSYSTEM FILM FORMING APPARATUSADSORPTION PROCESSFILM FORMING METHOD AND ELECTRONIC DEVICE MANUFACTURING METHOD
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Additional title:정전척, 정전척 시스템, 성막 장치, 흡착 방법, 성막 방법 및 전자 디바이스의 제조 방법
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Patent number:KR20200069817
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Patent applicant:
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Patent family:
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Contributors:MATSUMOTO YUKIO ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2020-06-17
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: H01L / B23Q / C23C / H02N
- Further information on International Patent Classification
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Classification:
IPC: H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES / B23Q DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING, Einzelheiten, Bestandteile oder Zubehör für Werkzeugmaschinen, z.B. Anordnungen zum Kopieren oder Steuern / C23C Beschichten metallischer Werkstoffe, COATING METALLIC MATERIAL / H02N Elektrische Maschinen, soweit nicht anderweitig vorgesehen, ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR -
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