FILM FORMING APPARATUS METHOD FOR DETACHING TARGET UNIT AND METHOD FOR ATTACHING TARGET UNIT (Korean)
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2021
- Patent / Electronic Resource
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Title:FILM FORMING APPARATUS METHOD FOR DETACHING TARGET UNIT AND METHOD FOR ATTACHING TARGET UNIT
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Additional title:성막 장치, 타겟 유닛의 분리 방법, 및 타겟 유닛의 부착 방법
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Patent number:KR20210052301
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Patent applicant:
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Patent family:
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Contributors:MATSUMOTO YUKIO ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2021-05-10
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: C23C / H01J
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