벌크 텅스텐 슬러리의 배리어 필름 제거율을 증가시키는 방법 (Korean)
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- New search for: WARD WILLIAM J
- New search for: CARNES MATTHEW E
- New search for: CUI JI
- New search for: HUANG HELIN
- New search for: WARD WILLIAM J
- New search for: CARNES MATTHEW E
- New search for: CUI JI
- New search for: HUANG HELIN
2022
- Patent / Electronic Resource
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Title:벌크 텅스텐 슬러리의 배리어 필름 제거율을 증가시키는 방법
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Patent number:KR20220034854
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Patent applicant:
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Patent family:
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Contributors:WARD WILLIAM J ( author ) / CARNES MATTHEW E ( author ) / CUI JI ( author ) / HUANG HELIN ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2022-03-18
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: C09G / C09K / C23F / H01L
- Further information on International Patent Classification
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Classification:
IPC: C09G Poliermittelmischungen, ausgenommen Möbelpolituren, POLISHING COMPOSITIONS OTHER THAN FRENCH POLISH / C09K Materialien für Anwendungen, soweit nicht anderweitig vorgesehen, MATERIALS FOR APPLICATIONS NOT OTHERWISE PROVIDED FOR / C23F Nichtmechanisches Entfernen metallischer Stoffe von Oberflächen, NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACES / H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES -
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