Spin coating apparatus and spin coating method using the same (Korean)
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- New search for: WON JUN HO
- New search for: WON JUN HO
2023
- Patent / Electronic Resource
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Title:Spin coating apparatus and spin coating method using the same
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Additional title:스핀 코팅장치 및 이를 이용한 스핀 코팅방법
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Patent number:KR20230032670
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Patent applicant:
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Patent family:
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Contributors:WON JUN HO ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2023-03-07
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: H01L / G03F
- Further information on International Patent Classification
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Classification:
IPC: H01L Halbleiterbauelemente, SEMICONDUCTOR DEVICES / G03F Fotomechanische Herstellung strukturierter oder gemusterter Oberflächen, z.B. zum Drucken, zum Herstellen von Halbleiterbauelementen, PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES -
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