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Title:Plasma purification apparatus
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Additional title:플라즈마 정화장치
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Patent number:KR20240048059
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Patent family:
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2024-04-15
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: H01L / B01D / C23C
- Further information on International Patent Classification
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Classification:
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Source: