Substrate holder, plasma reactor and method for depositing diamond (English)
Free access
- New search for: NEBEL CHRISTOPH E
- New search for: MÜLLER-SEBERT WOLFGANG
- New search for: WIDMANN CLAUDIA
- New search for: HEIDRICH NICOLA
- New search for: SCHREYVOGEL CHRISTOPH
- New search for: NEBEL CHRISTOPH E
- New search for: MÜLLER-SEBERT WOLFGANG
- New search for: WIDMANN CLAUDIA
- New search for: HEIDRICH NICOLA
- New search for: SCHREYVOGEL CHRISTOPH
2018
- Patent / Electronic Resource
-
Title:Substrate holder, plasma reactor and method for depositing diamond
-
Patent number:US10100433
-
Patent applicant:
-
Patent family:
-
Contributors:NEBEL CHRISTOPH E ( author ) / MÜLLER-SEBERT WOLFGANG ( author ) / WIDMANN CLAUDIA ( author ) / HEIDRICH NICOLA ( author ) / SCHREYVOGEL CHRISTOPH ( author )
-
Publisher:
- New search for: Europäisches Patentamt
-
Publication date:2018-10-16
-
Type of media:Patent
-
Type of material:Electronic Resource
-
Language:English
- New search for: C30B / C23C
- Further information on International Patent Classification
-
Classification:
-
Source: