Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages (English)
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2020
- Patent / Electronic Resource
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Title:Scanning electron microscope objective lens calibration using X-Y voltages iteratively determined from images obtained using said voltages
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Patent number:US10790114
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Patent applicant:
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Patent family:
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Contributors:HONJO ICHIRO ( author ) / SEARS CHRISTOPHER ( author ) / YANG HEDONG ( author ) / HA THANH ( author ) / WANG JIANWEI ( author ) / XU HUINA ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2020-09-29
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Type of media:Patent
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Type of material:Electronic Resource
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Language:English
- New search for: H01J / G02B / G06N
- Further information on International Patent Classification
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Classification:
IPC: H01J Elektrische Entladungsröhren oder Entladungslampen, ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS / G02B Optische Elemente, Systeme oder Geräte, OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS / G06N COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS, Rechnersysteme, basierend auf spezifischen Rechenmodellen -
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